Vacuum Unit Ejector / Vacuum Pump System

Refer to Fig.1) 3) Remove the junction box B (top) for all stations using a precision screwdriver. (Refer to Fig.2) (Remove the junction box B from D side.) 4) Remove all connectors mounted to the junction box B.

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

9 u t MDHR3 !4 !3 q !1 @0 @1 w o e i !5 MHZ MHF r !7 !6 t !8 !0 !2 i !9 y u MHL Component Parts MHR MHR Description Material Description Material Note No. Note No.

Manually Operated Integral Fitting Type/Threaded Type Series LVH

Note LVH 1 y t r PP Actuator section Integral fitting type PFA LVD Stainless steel With reducer 2 Body Threaded type PPS LVQ i PFA 3 Diaphragm PTFE LQ1 End plate PPS 4 PFA body only Insert bushing 5 PFA LVN 6 PFA Nut t y PP Lever 7 TL/TIL PFA Collar 8 LQ3 Dimensions/Integral Fitting Type N G A D L 4 x M K Non-locking type Locking type 60 (H2) (H1) C B A E J B (F) Dimensions (mm) A B C D

PSxx-OMT0001CN

8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4

Compact Cylinder

Rod end nut material: Carbon steel Surface treatment: Nickel plated 8 Series CQU Compact Cylinder: Plate Type Double Acting, Single Rod Auto Switch Proper Mounting Position (Stroke End Detection) and Its Mounting Height D-M9 D-M9W D-M9AL D-A9 D-M9V D-M9WV D-M9AVL D-A9V B A A C Hs A B Hv (mm) D-A9V D-A9 D-M9 D-M9W D-M9AL D-M9V D-M9WV D-M9AVL A B A B Size Hv A B C A B Hs 23 Hv C Hs 20.5 20

HRX-OM-R039

. 8-7 8.4.2 HRSE018-A-10-(T) . 8-7 8.4.3 HRSE012-A-20/23-(T) . 8-7 8.4.4 HRSE018-A-20/23-(T) . 8-8 8.4.5 HRSE024-A-20/23-(T) . 8-8 8.5 Pump capacity . 8-9 8.5.1 HRSE012/018-A-10 . 8-9 8.5.2 HRSE012/018/024-A-20/23 . 8-9 8.5.3 OPTION-T (HRSE012/018-A-10-T). 8-10 8.5.4 OPTION-T (HRSE012/018/024-A-20/23-T) . 8-10 8.6 Sample DoC.

Digital Flow Switch ( compatible)

data) a: Inclination b: Intercept [Inclination and intercept to the unit specification] Series Unit Flow range Inclination a Intercept b 4 L 0.125 0 L/min 16 L 0.25 0 40 L 0.5 0 PF2MC7 4 L 0.004415 0 cfm 16 L 0.0088275 0 40 L 0.0176575 0 [Calculation example] (1) Conversion from the process data to the flow measurement value (For PF2MC7 series, unit L/min, flow range 1000 L and PD = 2500

AC Servo Motor Driver (SSCNET Type)

H A B T Lead 24 16 8 30 20 10 27 42 Parameter *1,*2 Para.

MIW/MIS

D-F9WV D-F8 Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E 18.5 31 6.5 20.5 41 8.5 20.5 33 4.5 17 20.5 31 4.5 15 20.5 41 4.5 15 20.5 51 4.5 35 22.5 43 6.5 27 22.5 33 6.5 17 22.5 43 6.5 27 22.5 53 6.5 37 MIW12-12D MIW20-20D 6 4 4 2 18.5 29 6.5 20.5 31 8.5 MIS12-10D MIS20-10D 4 2 6 4 2.5 4 18.5 39 6.5 20.5 41 8.5 MIS12-20D MIS20-20D 6 4

PSxx-OMR0001CN

8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

ZZ + Stroke Allowable angle displacement of E to B is 1.5.

Transfer

C D Side support B MY-SB 2 x J A B C D A 61 70 87 B 75 84 105 C D E F G H J Part no.

3 Port Solenoid Valve Series VQ100 1

(Normally open) 1 2 Note) B Option Note) Latching manual override: push-locking type only.

3 Port Solenoid Valve Series VQ100

(Normally open) 1 2 Note) B Option Note) Latching manual override: push-locking type only.

3 Port Solenoid Valve Series VQ100 1

(Normally open) 1 2 Note) B Option Note) Latching manual override: push-locking type only.

Digital Flow Switch (Integrated display type)

(2) Conversion formula from the flow gauge measurement value to the process data: (PD) = (Pr b) / a Pr: Flow measurement value and pressure set value PD: Flow measurement value (process data) a: Inclination b: Intercept [Inclination and intercept to the unit specification] Series Unit Flow range Inclination a Intercept b 1 L 0.00025 0 2 L 0.0005 0 5 L 0.00125 0 L/min 10 L 0.0025 0 25 L 0.00625

S Couplers Series KK/KKH/KK13

3 Gasket M-5G2 T Electroless nickel plated KK3/4/6 i q u !3 !7 !1 r !6 t y !2 e !4 !5 !4 !5 !

VFR3000-OMJ0001

D,Y DIN +No.1 NO.2 T 68mm E 2.32.8mm D,Y 4.57mm ET 1.25-31.25-3S1.25Y-3N1.25Y-3S (D Y ) DIN DIN DIN DIN DIN +COM,-COM 0.51.5mm 2 810mm 1.25Y-3L1.25-3.5S1.25-4M 1.25-3,1.25-3S,1.25Y-3N,1.25Y-3S ( ( ( ( ) ) ) ) A-B+B-+COM-COM 1.25-31.25-3S1.25Y-3N1.25Y-3S G DC ++(-) DIN 2 1 SOLA 1 A B B + SOLB 2 3 COM B (COM) A DC AC A B + + + + A B 70 8 VFR3000-OMJ0001-A VFR3000 VFR3000 VFR3000

Digital Flow Switch ( compatible)

data) a: Inclination b: Intercept [Inclination and intercept to the unit specification] Series Unit Flow range Inclination a Intercept b 4 L 0.125 0 L/min 16 L 0.25 0 40 L 0.5 0 PFMC7 4 L 0.004415 0 cfm 16 L 0.0088275 0 40 L 0.0176575 0 [Calculation example] (1) Conversion from the process data to the flow measurement value (For PFMC7 series, unit L/min, flow range 1000 L and PD = 2500)

HRX-OM-W060

(B contact). Contact output signal 5selects Signal type and N.O. (A contact ) or N.C. (B contact). Contact output signal 6selects Signal type and N.O. (A contact) or N.C. (B contact).