Type: Speed Controller, Body Material: [Resin] Resin, Control Method: Meter-Out, Format: [Elbows] Plug-In Type, Environment, Applications: Standard, Knob Type: Resin, Lock Nut Option: Round Shape Lock Nut, Joint Type: Others, Applicable Tube O.D. mm(mm): 4, Body Size: M5 Standard

Body Size: M5 Standard, Control: Meter-in, Rod and Applicable Tubing O.D.: ø4 - ø4, Lock Nut: Round Lock Nut

Body Size: 10 (M5 Standard), Control: 0 (Meter-out), Rod and Applicable Tubing O.D.: ø4 - ø4, Lock Nut: J (Round Lock Nut)

Body Size: 10 (M5 Standard), Control: 1 (Meter-in), Rod and Applicable Tubing O.D.: ø4 - ø4, Lock Nut: J (Round Lock Nut)

Air Slide Table

ZZ MXQ 20-mm2 With end lock (20) Pilot port 2 x M5 x 0.8 Q 5 J 10 0.5 9.5 3 72 16.2 Dimensions [mm] 53 3 Model J Q MXQ20-10Zm2 91.5 10 MXQ20-20Zm2 MXQ20-30Zm2 101.5 MXQ20-40Zm2 111.5 MXQ20-50Zm2 127.5 MXQ20-75Zm2 161.5 MXQ20-100Zm2 234.5 MXQ20-10Z2 3 38 10 5 J 61 MXQ20-125Zm2 259.5 MXQ20-150Zm2 284.5 * Dimensions other than those listed above are the same as those for the standard type.

Table of Contents

Applicable shaft types: J, K, T Applicable shaft types: J, K, T (mm) (mm) Q1 Q2 L2 + (3 x P) L2 = L2 + (3 x P) K axis (T axis) J axis Shaft type Shaft type J K T J K T Size Size Q1 = M L1 = L1 + (3 x P) L2 = 10 10 Not available Not available 15 15 M3 M3 20 20 M3, M4 M3, M4 30 30 M3, M4, M5 M3, M4, M5 Q2 = M Q2 = M 40 40 M3, M4, M5 M3, M4, M5 Symbol: A37 Symbol: A38 The long shaft can be

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(Long shaft side) Description Applicable size 10 15 Applicable size 10 Symbol Symbol Description Shaft type Shaft type 20 30 40 15 20 30 40 XA39 Shaft through-hole Shaft through-hole Shaft through-hole Shaft-end female thread Shaft-end female thread Stepped round shaft Middle-cut chamfer Machined keyway XA31 XA33 XA37 XA45 XA47 S, Y J, K, T J, K, T J, K, T J, K, T S, Y K, T J S, Y K, T

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft types: J, K, T Applicable shaft types: J, K, T (mm) (mm) Q1 Q2 L2 + (3 x P) L2 = L2 + (3 x P) K axis (T axis) J axis Shaft type Shaft type J K T J K T Size Size Q1 = M L1 = L1 + (3 x P) L2 = 10 10 Not available Not available 15 15 M3 M3 20 20 M3, M4 M3, M4 30 30 M3, M4, M5 M3, M4, M5 Q2 = M Q2 = M 40 40 M3, M4, M5 M3, M4, M5 Symbol: A37 Symbol: A38 The long shaft can be

Rotary Actuator/Vane Type

range between 0 to 110 W, S, J, K, T, Y XC7 Reversed shaft W, J XC30 Fluorine grease W, S, J, K, T, Y X5 For M5 port (90/180) W, S, J, K, T, Y Rotation time adjustment range s/90 Note 1) 0.03 to 0.3 0.04 to 0.3 0.07 to 0.5 Allowable kinetic energy [J] 0.0003 0.0012 0.0033 0.02 0.04 Shaft load [N] Allowable radial load 15 15 25 30 60 Allowable thrust load 10 10 20 25 40 Port location Side

CRB2/CRBU2/CRB1

sizes 10 15 Applicable sizes 10 Shaft types Description Shaft types S, Y J, K, T J, K, T J, K, T J, K, T Symbol Symbol 20 30 40 15 20 30 40 XA39 Shaft through hole Shaft through hole Shaft through hole S, Y K, T J S, Y K, T J XA31 XA33 XA37 XA45 XA47 Shaft-end female threads Shaft-end female threads Stepped round shaft Middle-cut chamfer Machined keyway XA40 XA41 XA42 Shaft through hole

Table of Contents

BB Q M NB G H AD I NA 3-UA thread depth 6 UB P .C.D.R (Mounting thread) BD MHSL3-100D MHSL3-125D 10 10 10 10 40 40 40 40 5 6.4 5 6.4 12 5 13 10 90 7 15 90 (mm) G 86 112 FZ 10 12 FY 54 68 FX 59 74 EC 41 48 EO 65 80 DO 103 132 DC 79 100 BA 134 166 CA 18 24 CB 44.5 54 BC 134.6 166.6 BD 56 66 AD 78 102 K 15 21 AC 6 8 J 38 52 AA 135 175 AB 129 167 H 31 43 Model MHSL3-100D MHSL3-125D BB 184 234

ISO Cylinder

0.03 J 0.04 J 0.09 J 0.27 J 0.4 J Air cushion 0.17 J 0.19 J 0.4 J 0.66 J 0.97 J Standard Strokes Air cushion Bore size [mm] Standard stroke [mm]*2*4 Max. stroke*3 [mm] 8*1 10, 25, 40, 50, 80, 100 100 10 12 10, 25, 40, 50, 80, 100, 125, 160, 200 200 16 20 10, 25, 40, 50, 80, 100, 125, 160, 200, 250, 300 500 25 Refer to pages 101 to 111 for cylinders with auto switches. *1 Not available with

Made to Order

CXS25 0.1 1.0 0.5 0.05 0.0 10 50 100 200 300 500 1000 1500 0 20 40 60 80 100 120 Stroke (mm) Cylinder speed Vp (mm/s) Dimensions J I K (mm) I 3.25 5 6 7 7 9 J 6.5 10 12 14 14 18 K 7 7 7 10 10 12 N M3 x 0.5 through-hole M3 x 0.5 through-hole M3 x 0.5 through-hole M4 x 0.7 thread depth 6 M5 x 0.8 thread depth 7.5 M5 x 0.8 thread depth 8 Bore size (mm) 6 10 15 20 25 32 -X -X 2-N 1747 Made to

Battery-less

With motor cover: LEYG16DmE -mC A B C H Dimensions (Size 16) U 35 Motor cover direction H D1 42.3 D2 42.3 D3 55.1 D4 47 A + Stroke Y X2 Cable length 250 With lock/motor cover: LEYG16DmE -mW A B C Motor Cover Direction Cable length 350 D1 D2 J J J J J J J J 22.2 30.3 30.3 22.2 22.2 30.3 30.3 22.2 22.2 30.3 30.3 22.2 22.2 30.3 30.3 22.2 30.3 22.2 J 30.3 22.2 J 30.3 22.2 J 22.2 30.3 J 22.2

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

) Symbol Description Applicable size 10 15 20 30 40 Description Shaft type Applicable size 10 15 20 30 40 Shaft type Symbol XA39 Shaft through-hole Shaft through-hole Shaft through-hole S, Y K, T J S, Y K, T J Y K J J XA31 XA33 XA37 XA45 XA47 XA48 XA51 S, Y J, K, T J, K, T J, K, T J, K, T S, Y J, K, T Shaft-end female thread Shaft-end female thread Stepped round shaft Middle-cut chamfer

High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 A XLS Series Dimensions XLS/Without control power supply D Lead wire AWG20, O.D.: 2.63 mm E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT

LX

/Without Motor Brake Series LXS Dimensions/LXSH2BD Scale: 25% F G x I 5H9 +0.030 0 depth 5 +0.030 0 depth 5 D-5.1 through 5H9 10 7.5 E-M5 thread depth 10 Refer to Cross section C-C, bottom view. 6 LJ1 LG1 LC1 LX LC6D/LC6C Switches 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 13 15 Stroke + 127 3.5 (5) 0.5 46.5 2-

2 Phase Stepper Motor/Without Motor Brake Series LXS

E-M5 thread depth 10 6 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch U N x P 20 5 N C 1 0.2 (5.1) 10 5.8

Possible to transfer a workpiece at low-speed.

, 15, 20, 30, 40 MRQ K J XA39 XA40 XA41 XA45 K K K XA46 Y Y Y Y Y 20, 30, 40 Y J K K, T K, T K 10, 15, 20, 30, 40 K K K K, T K Z X X, Z J J J, Z Z J 20, 30, 40 Z J 10, 15, 20, 30, 40 T J Reversed shaft, Change of double shaft length X 20, 30, 40 Reversed shaft, Change of double shaft length Combination Chart of Made to Order Chart 4.

Rotary Actuator

V V V J* Z* J* J, Z* J* -XA56 Change of double shaft length (Both with four chamfers) V V V Z* -XA57 Change of double shaft length (Without keyway, With hour chamfers) V V V J* -XA58 Reversed shaft, Change of shaft length (With four chamfers, Without keyway) V V V V T* J* -XA59 Reversed shaft, Change of shaft length (With four chamfers) V V X* MRQ Combination Chart of