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() () UP SET DOWN OUT1OUT2 ON UP ON/OFF SET DOWN ON/OFF -12No.PF-OMN0011CN-C F F.S.(1~5V F.S.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] A 1-5V 1-5V 4-20mA (Hysteresis) ON OFF 90% () Ka (copy function) () 10 L/min 10 L Sa ON OFF ON OFF , , 2 5 10 L/min 5 ,10550 L ON-OFF 1 L/min ,10 11 12 1 L/min -13No.PF-OMN0011CN-C SI SI Ta ON-OFF Na ON 0 Ha -14No.PF-OMN0011CN-C M38 L(2 ) (ZS

32 0.35 NCDRB1BW10 0.55 0.73 0.35 0.02 0.39 50 0.94 0.12 1.14 0.75 0.98 0 5-40 M5 (10-32NOM) -0.00015 -0.0014 (0.2) M3 -0.00045 3/16 0.47 NCDRB1BW15 0.71 0.73 0.39 0.02 0.59 50 1.14 0.16 1.34 0.94 0.98 0 5-40 M5 (10-32NOM) -0.01 -0.0017 (0.2) M3 -0.00017 15/64 9/16 NCDRB1BW20 0.79 0.98 0.39 0.02 0.79 50 1.42 0.18 1.65 1.32 1.00 0 8-32UNC 10-32UNF -0.00015 -0.0016 (0.28) -0.00045 5/16 5/8

Please consult with SMC regarding other voltages. 3/4 (20A) Orifice size Electrical entry Class 3 Class 2 Orifice size (mm) 2 3 4 5 7 10 Class 4 Symbol 2 3 4 5 7 10 G Grommet C Conduit Refer to the below table for orifice and port size combinations.

26.1 mm Can Can copy copy to up to to up to 10 10 switches simultaneously. switches simultaneously. Can copy to up to 10 switches simultaneously. The settings of the master pressure switch (source of copy) can be copied to the slave pressure switches.

Fan 5 to 10 years DC power supply 5 to 10 years Abnormal voltage is generated and the display goes off due to insufficient capacity of electrolytic capacitor. 167 Series HEB Specific Product Precautions 1 Be sure to read this before handling. Refer to back page 1 for Safety Instructions andback pages 2 to 5 for Temperature Control Equipment Precautions.

Mounting, Operation P.10 1) Operating air P.10 2) Precaution on design P.11 3) Mounting P.13 4) Operating environment P.13 5) Piping P.14 6) Cushion P.15 7) Speed control P.16 8) Direction control P.16 4. Maintenance P.17 1) Inspection P.17 2) Overhaul P.18 3) Disassembly P.18 4) Assembly P.19 5) Expendable supplies P.20 6) Replacement procedure of seal P.21 7) Inspection P.22 5.

V]1[V]4[V](1F.S.4[V]10.04[V]) a 1-5V 1-5V 4-20mA (HYS) ON OFF 63% ka () sa 10 L/min 10 L ON OFF ON () OFF () 2 5 5 10 L/min 10550L 14 No.LFE*-OMY0008 sa ON-OFF () 1 L/min 10 11 12 1 L/min () 0 ta (SI )SI LFE ON-OFF () [S/cm](/ 100200S/cm na ON 0 ha 15 No.LFE*-OMY0008 2MPa(69 ) IN ()IN (68 ) DC(-)/ + 2 2 2 20mm 0mm 0mm 0mm 2 2 2 20mm 0mm 0mm 0mm 5 5 5 50mm 0mm

10 10 5 5 5 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 1 0 1 2 3 4 5 6 8 9 10 11 13 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 7 12 Distance from cylinder shaft center: L0 (cm) Distance from cylinder shaft center: L0 (cm) Distance from cylinder shaft center: L0 (cm) 50 63 1000 1000 Recommended driving force: Fn(N) Recommended driving force: Fn(N) 500 400 500 200 300 300 200 Usable range 100 100

HOW TO ORDER 7 5. OPTIONAL BRACKET ASSEMBLY 8 6. TROUBLESHOOTING 9 7. CONSTRUCTION / PARTS LIST 10 8. SPECIFICATIONS OF BOWL ASSEMBLY 11-19 9. REPLACEMENT PROCEDURE 20-27 10. DISASSEMBLY DRAWING 28-29 11. DIMENSIONS 30 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

BORE B D GA'GA K MM N P x LD LH H zz h 1 3 8 (35) 2.76 2.05 t52l 0 7 9 l:20) 1.57 1.39 (10) 0.67 M8x1.25 J.2A t7l M18rl 5 1 . 1 4 3 5 4 l90l 1.06 lz7) 1 5 1 o3) 3 5 4 ls0J 2.24 (58) 1188) 2.05 (52) '11.21 2.60 (66) s T o 7 7 2 (196) 1 3 8 (35) 3.35 (85) 2.52 079 (20) 1 5 7 1.39 (10) 0.67 M10x1.25 i.2a l7l M18x1 5 1.22 (31) 3 8 6 l93l 1.34 (341 1.63 (16) 0.45 1 1 1 . 5 ) 1 9 7 t50l 6 5 4 t1661

In the case of -X80, VF3240(Pilot valve) will be mounted. 4-10-10

007'e) 5 14.2) > lnigrtace rggulator/Egulatior to B I{ABBF4O50.NO.E.i lPlug.in typl NAnBF4O50.N0.B.2 (l{on plug.in typel ( > :B(H block disc IntErlace speed control wFs4ooo-2oA.l (Plug-in typ) wFs4ooo-2oA-2 (Non plug-in type) 6 5 B 5 d bet 1.65 F/-.-r r r R < i 5 'gauge nipple siz may vary slightly Series NVFR400[:Base Mounted T]pe @ o Manifold block Parts List No.

Operating Range The figure shows the mounting example for the D-M9(V)/ M9W(V)/ M9A(V)/ A9(V) Auto switch model Bore size (mm) 32 40 50 63 80 100 D-M9/ M9V D-M9W/ M9WV D-M9A/ M9AV 4 4.5 4.5 4.5 5 6 D-Y59/ Y69 D-Y7P/ Y7PV D-Y7W/ Y7WV D-Y7BA 5.5 5.5 7 7.5 6.5 5.5 D-F5/ J59 D-F5W/ J59W D-F5BA/ F5NT D-F59F 3.5 4 4 4.5 4.5 4.5 D-G39/ K39 9 9 9 10 10 11 D-P3DWA 3 4.5 4.5 5 5 5.5 D-P4DW 4 4 4 4.5

JXC-OMT0034CN (GW)(CC-Link) / LEC-GMJ2 1. . 4 2. . 6 2.1 . 6 2.2 . 6 2.3 . 7 2.4 () . 8 (1) . 8 (2). 8 (3)(LEC) . 8 (4). 8 (5) . 8 (6) . 9 (7) . 9 3. . 10 3.1 . 10 3.2 . 12 3.3 . 13 (1)(LECGMJ2) . 13 (2)DIN (LECGMJ2D) . 13 3.4 . 14 (1) . 14 (2) . 14 4. . 15 4.1 (STATION NO.,B RATE) . 15 4.2 (CN2SW) . 16 4.3 (LEC) . 17 5. . 19 5.1 CN4 . 19 5.2 CN3 . 19 5.3 CN1CONT . 19 5.4 CN2PC

Product specifications P.4 1) Specifications P.4 2) Max. stroke P.5 3) Max. usable stroke by the side load given to the cylinder P.6 4) The relation between cylinder size and max. stroke by the mounting style P.8 5) Theoretical output P.10 6) Kinetic energy absorbed by cushion mechanism P.10 7) Application of 2nd class pressure vessel regulation due to operating liquid P.11 8) How to order

5 !1 !9 #4 #8 E @7 o !0 i @8 !8 !6 $2 #2 !3 #3 !7 !2 @5 @4 r @3 e @6 @1 @2 #1 t y $1 u w q E' Section E-E' CYV32 t !9 $0 @1 @2 y @4 @3 u @6 #9 @5 Description Material Note Parts list Description Material Note No. No.

Orifice size (mm) 2 3 4 5 7 10 Symbol 2 3 4 5 7 10 Class 3 Class 2 Class 4 Electrical entry G Grommet C Conduit Refer to the table below for orifice and port size combinations.

This will allow for incremental spacing to prevent harmful large initial surge. 10 XL-OMS0001-B 5. Construction and Dimensions 5-1.