100

10 0 90 Vacuum pressure reached 80 kPa Vacuum pressure in tank [kPa] 80 Vacuum pressure [kPa] 66 kPa 70 60 53 kPa 50 40 kPa 40 26 kPa 30 20 13 kPa 10 0 Suction flow rate [L/min (ANR)] 10 0 20 30 40 50 60 70 80 90 100 1 10 Time to reach vacuum [s] 1 0 2 3 4 5 6 7 8 9 10 11 12 Vacuum Break Flow Rate Characteristics*1 (Representative value) *1 Silencer exhaust specification The graph shows

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

L dimension 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VZ 285.5 21 273 No.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Connection thread size Wrench tightening angle after hand-tightening [deg] Proper tightening torque [Nm] G1/8 10 to 20 3 to 4 G1/4 15 to 35 4 to 5 G3/8 15 to 35 8 to 9 G1/2 15 to 35 14 to 15 600 AS-FS Series Specific Product Precautions 3 Be sure to read this before handling the products.

Title not found

Bore 1/32 1/16 1/8 1/4 3/8 1/2 3/4 1 1 6 15 37 1-1/8 5 12 28 85 1-1/2 3 7 16 50 2 4 9 28 70 2-1/2 6 18 45 72 3 4 12 30 48 3-1/4 3 10 24 37 79 4 7 17 28 60 5 4 11 18 40 82 6 3 7 12 26 55 8 4 7 15 32 10 4 9 20 12 3 6 14 NOTE: These values are an approximate speed, under average conditions, where the force required is 50% of available 80-100 PSI inlet pressure, the directional valve internal

Title not found

Bore 1/32 1/16 1/8 1/4 3/8 1/2 3/4 1 1 6 15 37 1-1/8 5 12 28 85 1-1/2 3 7 16 50 2 4 9 28 70 2-1/2 6 18 45 72 3 4 12 30 48 3-1/4 3 10 24 37 79 4 7 17 28 60 5 4 11 18 40 82 6 3 7 12 26 55 8 4 7 15 32 10 4 9 20 12 3 6 14 NOTE: These values are an approximate speed, under average conditions, where the force required is 50% of available 80-100 PSI inlet pressure, the directional valve internal

Ejector Valve Unit Series ZYY/ZYX 1

20 40 40 40 40 Suction flow rate Suction flow rate 10 10 20 20 20 20 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 10 20 0 0 0 5 10 15 20 25 Supply pressure (MPa) Suction flow rate (l/min(ANR)) Supply

MXU

Stroke 5 10 15 20 25 30 5 mm 10 mm 15 mm 20 mm 25 mm 30 mm Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

MXU

, 10, 16 Standard stroke (mm) 5, 10, 15, 20, 25, 30 Refer to Minimum Stroke for Auto Switch Mounting on page 8-3-10.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Series ANB1 38 dB (A) 30 m Page 5-10-9 Exhaust cleaner Ensures clean plant air, reduces noise pollution by over 35 dB (A), and removes over 99.9% of all oil mist. 99.9% Series AMC Page 5-10-11 35 dB (A) 0.3 m Page 5-10-13 Precautions/Specific Product Precautions Exhaust Cleaner for Vaccum (Series AMV) Exhaust Cleaner for Clean Room (Series AMP) Page 5-10-15 Related Products 5-10-1 2 Silencer

1

14.5 12 13 15.5 8 14 0 0.1 2 21 5 M4 x 0.7 depth 7 Width across flats 6 length 3.5 M8 x 1.25 24 20 8 6.5 M4 x 0.7 25 17.5 15 17 16.5 10 14 0 0.1 2 24 6 M5 x 0.8 depth 7.5 Width across flats 8 length 3.5 M10 x 1.25 27 25 8 6.5 M5 x 0.8 32 17.5 15 17 20 10 18 0 0.1 2 24 6 M5 x 0.8 depth 8 Width across flats 8 length 3.5 M10 x 1.25 34.5 32 12 6.5 M5 x 0.8 40 23.5 20.5 22 24 14 24 0 0.1 2 30

48

Nil TN TF 20 (16 x 2) 20, 30, 50 100, 150 38 27.5 8 7.5 3 22 12.5 7.5 11 83 11 3 11 14 M4 x 0.7 10 M4 x 0.7 25 (20 x 2) 39.5 28 10 8.5 3 26 12 7.5 11 93 13 4.5 13 17 M5 x 0.8 12.5 M5 x 0.8 32 (25 x 2) 25, 50, 100 150, 200 44.5 30 12 11.5 3 32 15 7.5 13 109 16 8 16 21 M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size

Precision Cylinder Series MTS

N Backlash Manual unlocking Theoretical Output 12 16 20 40 Rear end only 125 211 29 53 82 329 1mm Non-locking type only Standard Strokes (N) Operating pressure (MPa) Bore size (mm) Operating direction Piston area (mm) Bore size (mm) Standard stroke (mm) 0.2 10 8 23 17 40 30 63 47 98 72 161 121 251 188 0.4 20 15 45 34 80 60 126 94 196 143 322 241 502 377 0.3 15 11 34 25 60 45 94 71 147 107

Guide Cylinder Series MGG

25MGGM 32Stroke Stroke Stroke 1.2 2.2 2 (Slide bearing type) (Slide bearing type) (Slide bearing type) 2 1 1.5 500st 400st Deflection Y (mm) 600st Deflection Y (mm) 1.5 Deflection Y (mm) st: Stroke (mm) st: Stroke (mm) st: Stroke (mm) 500st 300st 400st 1 1 0.5 400st 300st 200st 300st 0.5 0.5 200st 100st 200st 100st 100st 75st 75st 0 0 0 0 0 0 10 20 30 40 50 20 40 60 80 100 10 20 30 40 50

ML2B

(Nm) ML2B/M1 (Pitch moment) ML2B/M2 (Roll moment) ML2B/M3 (Yaw moment) Pitch moment M1/M1e 10 20 40 Roll moment M2 1.2 2.4 4.8 Yaw moment M3/M3e 3.0 6.0 12 MI W S 40 Model 20 30 YES 20 5 4 3 10 ML2B25 ML2B32 ML2B40 CEP1 If speed or load changes, stopping time may vary and positioning accuracy may be compromised.

ML2B

74 94 EA 10 12 15 h 3.5 4.5 4.5 Applicable cylinder ML2B25 ML2B32 ML2B40 10-13-15 13 Series ML2B Dimensions Side support A MY-SA 2-G F E 2-H C D A B Side support B MY-SB 2-J C D A B (mm) A 61 70 87 B 75 84 105 C D E F G H J Part no.

Suction cups with flange

-7A-X2 25 28 15 ZPG25C-7A-X2 25 28 1.8 ZPG32U-7A-X2 32 35 20 24.5 4.5 ZPG32C-7A-X2 32 35 20 24.5 2.3 ModelZPG20UT-7A-X2 ModelZPGB-7A-X2 (Suction cup formThin flat type) (Suction cup formBellows type) Dimensions Model A B D E F G H Y ZPG10B-7A-X2 10 12 5.5 13.5 21.5 26 5.5 13 ZPG13B-7A-X2 13 15 8.7 19 24 28.5 7.5 ZPG16B-7A-X2 16 18 10 21 25.5 30 8.5 ZPG20B-7A-X2 20 22 12.6 25 29 33.5 15 10.5

80

15.5 30.15 VDW2 M5, 1/8 4 33 14 39 20 17 36.2 2 x J thread depth K VCH VDW VDW Body material Stainless Steel SX10 2 x 3.4 Mounting hole W Y Grommet VQ LVM X U D 300 Q F Full wave rectifier (AC type) [mm] C R E G Mounting method Model Port size P A B B1 C D E F J K M VDW1 M5 12 20 10 42.4 15 6 11 M2.5 4 11 VDW2 M5, 1/8 15 22 11 51.7 20 8 13.5 M3 5 15 B B1 2 x P Port size A Mounting bracket

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

area (mm2) 1.5 2 3.5 4.5 7 6.5 10 14 16 21 Note) Flow rate values are measured at 0.5 MPa and 20C. 15-9-49

Modular F.R.L. Unit

Description Model AC10B AC20B AC25B AC30B AC40B AC40B-06 AC50B AC55B AC60B Round G27-10-R1 G36-10-01 G36-10-01 G36-10-01 G46-10-02 G46-10-02 G46-10-02 G46-10-02 G46-10-02 Pressure gauge Note 1) Square Note 2) embedded type 1.0MPa GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS Attachments Accessories G27-10-R1 Note 3) G36-2-01 G36-2-01 G36-2-01 G46-2-02 G46-2-02 G46

PC Wiring System Series PCW

8 14 12 16 34 20 18 24 22 26 30 28 32 36 40 38 Input/output connector (CS0) 3 1 5 9 7 13 11 15 19 17 23 21 33 25 29 27 31 35 39 37 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Power supply terminal block 108 109 110 111 112 113 114 115 100 101 102 103 104 105 106 107 2 6 4 8 10 12 14 16 18 20 Input/output connector (CS1) 1 5 3 7 11 9 15 13 17 19 Green Red F E D C B A 9 8 7 6 5 4 3 2 1 0 1 1 2 3