XL-OMV0002

154 55 11 134 130 102 139 58 9 XLC-160 138 339 200 65 11 190 180 153 124 62 12.5 10 XL-OMV0002 5. 200 1680 100 100,160[ ]18 12 Assy O XLC-16,XLC-25,XLC-40,XLC-50,XLC-63,XLC-8 200 XLC-100,XLC-160 100 FKM 110 Pa 11 XL-OMV0002 . 6-1. 1 1 Assy Assy Assy 12 XL-OMV0002 6-2. 1 2 3 3 2 1 4 162540 50,63,80,100,160 O O O O 50 4 5 6 3 3 2 1 4 2 1 Nm 4 0.7 XLC-16 1.5 -25 2.5 -40 6 -50 6

S070

With the 0.1 W specification, the vibration and impact resistance is 10/50 m/s2 or less. Note 3) With the low vacuum specification, the operating pressure range is 1.33 102 Pa to the maximum operating pressure.

Pressure switch for energy-saving control ejector with N.O. type valve

(such as static electricity. (2) Check if the power supply voltage System error is in the range 24 VDC 10%. (Er0, 4, 6, 7, 8 or 9) is displayed. (2) Supply power in the range 24 VDC 10%. HHH is 6 displayed. (1) Reset applied pressure (1) Check that the pressure is not to a level within the set pressure range.

ZQ

Maximum suction flow (l/min(ANR)) Air consumption (l/min(ANR)) Maximum vacuum pressure (kPa) Maximum vacuum pressure (kPa) Maximum vacuum pressure -80 -80 60 -60 -60 50 40 -40 -40 30 Air consumption 20 -20 -20 10 Maximum suction flow Suction flow (l/min(ANR)) 25 20 15 10 5 0 0.1 0 0.2 0.3 0.4 0.5 0.6 Supply pressure (MPa) 13-9-3 4 Series ZQ Specifications Ejector Weight Switch and suction

Rotary Table

16.9 20 10 2 190 22.8 50 10 18.8 20 10 3 190 24.4 47 10 20.4 15 10 7 190 28.7 31 10 24.7 15 10 Operating range m: The value in which the auto switch operating range Lm is converted to axis rotating value.

Compact Vacuum Ejector Series ZQ

XT53440 05 Number of stations 05 06 12 1 station 2 station 8 station 10

Digital pressure switch for energy-saving control ejector

(such as static electricity. (2) Check if the power supply voltage System error is in the range 24 VDC 10%. (Er0, 4, 6, 7, 8 or 9) is displayed. (2) Supply power in the range 24 VDC 10%. HHH is 6 displayed. (1) Reset applied pressure (1) Check that the pressure is not to a level within the set pressure range.

PSE530/200

Internal data error. 16-3-10 10 Series PSE530/200 Multi-channel Controller/Pressure Sensor Operation 1: Initial Setting 1 Channel selection MPa kPa OUT1 OUT2 CH 1 2 3 4 CH2 CH3 CH4 CH1 PRESSURE ZSE ISE SET PSE SET button and hold for 2 seconds or longer.

Return Filter FH100 Series

Petroleum, Water-glycol, Emulsion: NBR; Phosphoric ester: FKM FH FH HOW Model/Rated Flow Rate Model Port size (Rc) Rated flow rate (L/min) Micromesh Paper FH100-06 FH100-08 FH100-10 FH100-12 FH100-16 FH100-20 FH100-24 3/4 60 50 1 100 80 1 1/4 150 120 1 1/2 200 160 2 300 260 2 1/2 550 450 3 700 600 Description Part no.

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

10 3 5 3 SY5000 2 position single, double 3 position Max. operating frequency Hz Valve effective area mm (Cv factor) SY3000 SY5000 Non-locking push type Slotted locking type, Knob locking type Note 2) Manual override 2 to 10 stations: W = 26n + 172 11 to 16 stations: W = 26n + 199 2 to 10 stations: W = 54n + 227 11 to 16 stations: W = 54n + 264 Note 3) SY3000 Weight W (g) n: Stations (D-sub

SYJA3000

-M3 X 0.5 (Piping port) 33 36 (Non-locking) Manual override B P R R 7 7 SlA 36 2 35 7 13.5 28.5 15 A 21 R2 P R1 VlA 13 1 (Bleed port) 11 10 4 15 10 10 5-M5 X 0.8 (Piping port) 8.2 14 14 15 Bracket VM/VR VH 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 10 9 36 7.1 2-M3 X 0.5 (Pilot port) 10 1.8 4 A B (Mounting holes) 3.2 21.5 1.5 22 7 8.2 2.5 (Mounting holes for manifold

I/O Configurator (NFC version)

Based on the example of Diagnostic allocation of the Operation Manual (page 50).

I/O Configurator (NFC version)

Based on the example of Diagnostic allocation of the Operation Manual (page 50).

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

ML1C25 4.90 4.90 10 3 12 20 14.7 ML1C32 9.80 9.80 16 5 19 32 29.4 ML1C40 19.6 19.6 25 8 30 50 58.8 Caution on Design ML1C/M1 Allowable moment and load Weight Maximum Allowable moment and Maximum load weight varies depending on mounting orientation, piston speed, etc. Therefore use the cylinder within the range shown in the graph corresponding to operating conditions.

AR Series Modular Type Regulator

AW-A Optional specifications Model AR10-A AR20-A AR25-A AR30-A AR40-A AR40-06-A Bracket assembly Note 1) AR12P-270AS AR22P-270AS AR27P-270AS AR32P-270AS AR42P-270AS AR42P-270AS Set nut AR12P-260S AR22P-260S AR22P-260S AR32P-260S AR42P-260S AR42P-260S AC-B AF-A Note 2) Round type Standard G27-10-R1 G36-10-l01 G46-10-l01 0.02 to 0.2 MPa setting G27-10-R1 Note 3) G36-4-l01 G46-4-l01 Pressure

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

ML1C25 4.90 4.90 10 3 12 20 14.7 ML1C32 9.80 9.80 16 5 19 32 29.4 ML1C40 19.6 19.6 25 8 30 50 58.8 Caution on Design ML1C/M1 Allowable moment and load Weight Maximum Allowable moment and Maximum load weight varies depending on mounting orientation, piston speed, etc. Therefore use the cylinder within the range shown in the graph corresponding to operating conditions.

5 Port Air Operated Valve Series VFA3000 1

VR VH Body ported single solenoid Foot bracket VFA3122 F 02 VHS Body ported For 30 type manifold VFA3 1 0 3 02 Base mounted For 40 type manifold VFA3 1 0 4 02 Port size For 50 type manifold VFA3 1 50 W/o sub-plate (Pilot port: Rc) Nil W/o sub-plate (Pilot port: Other than Rc) Thread type for pilot port 00 For 60, 61,70, 71 manifold VFA3 1 0 6 02 02 03 1 4 3 8 Nil 00F 00N 00T Rc G NPT NPTF

Trimmer Auto Switch Series D-
7K/D-R
K

10 30 to 10 22.5 to 10 Angular gripper 180 opening/closing 88 to 5 54 to 6 58 to 5 41 to 5 30 to 4 Air cylinder Compact guide cylinder MGP 3.5 5 4.5 4.5 5.5 5.5 5.5 5.5 5.5 6 CA2 Air cylinder 4 4 6 6 6 Sensor unit D-F7K Air cylinder (mm) Model Bore size (mm) 12 4.5 16 20 25 32 40 50 63 80 100 125 7.5 140 7.5 160 CQ2 CM2 Compact cylinder 5.5 5.5 5 5.5 5.5 5.5 6 5.5 6 7.5 Air cylinder 3.5

AC Servo Motor Driver (MECHATROLINK-III type)

5 20 10 5 (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

Direct acting guide Series LXF 0.03 Ball screw 3 100 50 Series LXP 6 Ball bushing guide 100 Ball screw 0.03 50 5 100 Series LXS 50 10 High rigidity direct acting guide 100 Ball screw 0.03 50 5 100 5 Simplified Selection Flow Chart Series LX Standard stroke (mm) and 25 50 75 100 125 150 175 200 Model Motor Manufacturer Maximum speed (mm/s) Phases LXFH5SB LXFH5BC LXFH5BD LXFH5SA