Air Cylinder

1 !7 ! With auto switch 10, 16 r e o u i w y t !6 !5 !3 !4 !0 !2 !1 !7 ! With auto switch Single acting, Spring extend 6 r o u i e w y t !6 !5 !8 !1 !0 !2 !4 !3 !7 ! ! With auto switch 10, 16 r o u i e w y t !6 !5 !0 !2 !3 !4 !7 !8 !1 ! With auto switch Component Parts No.

Cylinder with Lock

1 !3 io@1!4w@2 !8q@3$1@5@8$2#8#5@7#1@4@9#7 #0$0 !5!6 er uy t !9 #4@6!7!2 #6 #3#2#9 $3 80, 100 Component Parts Component Parts No. Description Material Qty.

HRX-OM-Z002

for use . 1-6 1.5.2 Personal protective equipment . 1-6 1.6 EMERGENCY MEASURES . 1-7 1.7 WASTE DISPOSAL . 1-7 1.7.1 Disposal of refrigerant and compressor oil. 1-7 1.7.2 Disposal of the product . 1-7 1.8 SAFETY DATA SHEETSDS . 1-8 Chapter 2 Names and Functions of Parts . 2-1 2.1 NAME OF EACH PART . 2-1 2.1.1 HRLE050-A-20-(In case of Air-cooled refrigeration) . 2-1 2.1.2 HRLE050-W-20-(In

JXCx-OMY0004

Turn ON when transmitting numerical data to the controller. (7, 8, 9) 4 0 Start flag 1-7. (Unused) Set always OFF(0) 5 0-1. Movement mode 1: ABS (Absolute) 2: INC (Relative) (7, 10) 2-7.

Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gom serles zPR

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

Note 3)The actual mounting position should be adjusted after confirming the auto switch performance. 5 5 3 5 5 3 5.5 5 4.5 2.5 5.5 5 4.5 2.5 1 3 3 1 3 3 1 3.5 3.5 2.5 0.5 3.5 3.5 2.5 0.5 1 3 1 5 5 3 5 5 3 5.5 5 4.5 2.5 5.5 5 4.5 2.5 1 7 7 5 1 7 7 5 7.5 7 6.5 4.5 7.5 7 6.5 4.5 MHS-16D MHS-20D MHS-25D MHSL3-16D MHSL3-20D MHSL3-25D MHS-32D MHS-

Basic Type/Direct Mount Type

LD 3.5 4.3 5.4 5.4 7 7 8.6 8.6 T 17.5 19 20.5 21.5 24 26 30 32 X 15 18 22 28 35 40 50 60 M 4 5 5 6 7 8 10 10 TC 14 17 20 22.5 28 33 42 48 Y 39.5 54.5 64 72 79 93 113 121 MM M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 W 20 25 40 40 50 60 60 70 Z 76 94 107 117 130 148 176 188 N 4.5 6 7 6.5 8.5 11 15 16 WP 13 16 19 21.5 27 32 41 47 WS 8 7 7 7 7 7 10 10 PW 26 32 38

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(Stations 1 to 2) 4 setsValve part no. (Stations 3 to 6) 1 setValve part no. (Station 7) 1 setBlanking plate part no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(Stations 1 to 2) 4 setsValve part no. (Stations 3 to 6) 1 setValve part no. (Station 7) 1 setBlanking plate part no.

Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gomp serles zPR

Electric Slide Tables

7 i y r w e #0 @9 @7 @8 @2 @0 u D A A D C-C D-D B-B @5 @4 !9 !1 !5 #1 q C B C B !4 !2 !0 !8 @1 !6 t o @3 @6 !3 Component Parts No. Description Material Note 1 2 3 4 5 6 7 8 9 No.

Rotary Table/Rack & Pinion Style Series MSQ

7 !8 u @0 q @1 !2 !1 CRQ2 !8 !7 MSQ MSZ CRQ2X MSQX MRQ MSQAA (High precision type) !9 e r Component Parts Note Anodized Anodized Chromated No.

MXS

1 !2 !3 !4 !5 !6 !7 !8 !

HRX-OM-K003

Daily inspection . 7-2 7.2.2 Quarterly inspection . 7-3 7.3 Storage . 7-3 7.3.1 Draining of circulating fluid out of tank . 7-4 7.3.2 Draining of facility water . 7-5 7.4 Periodic Replacement Parts . 7-6 Chapter 8 Appendix . 8-1 8.1 Specification . 8-1 8.1.1 System specification . 8-1 8.1.2 Communication specification. 8-4 8.1.3 Alarm signal selection . 8-6 8.2 Outer Dimensions . 8-7 8.3

Table of Contents

7 9 9 9 11 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 10 10 10 10 10 10 10 10 10 1 8 1 4 3 8 AMG150 , , 1 4 3 8 , AMG250 1 2 3 8 1 2 , AMG350 3 4 1 2 3 4 , AMG450 1 1 1 1 AMG550 AMG650 3 4 1 2 , , 14-20-6 5 Water Separator Series AMG Dimensions AMG850

5 Port Solenoid Valve, Series VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

JXCx-OMY0008

Alarm was generated in order of (1) -> (5) 6030h (1) 0-7 Alarm 1 6030h (2) 0-7 Alarm 2 Alarm 1 (Latest) (1) (2) (3) (4) (5) 6030h Alarm 2 0 (1) (2) (3) (4) (3) 0-7 Alarm 3 Alarm 3 0 0 (1) (2) (3) Alarm 4 0 0 0 (1) (2) (1) to (5) in the table indicate the alarm codes which are generated. 6030h Refer to 15.2.

K35-OMW0030

Switch No. 0 (Default) 1 2 3 4 5 6 7 8 9 Slower (Speeds up gradually.) Faster 6-4-1.

HRX-OM-R039

6.1 Alarm Display . 6-1 HRS Series HRX-OM-R039 Contents 6.2 Alarm buzzer stop . 6-2 6.3 Troubleshooting . 6-3 6.4 Other Errors . 6-4 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Control of Circulating Fluid Quality . 7-1 7.2 Inspection and Cleaning . 7-2 7.2.1 Daily check . 7-2 7.2.2 Monthly check . 7-3 7.2.3 Inspection every 3 months . 7-4 7.2.4 Inspection for winter season. 7-4

Programless controller (with stroke study) Step motor (servo 24 VDC)

3 B 15m *1 4 Cable color Terminal Vcc B-4 no GND A-4 C 20m *1 Terminal no Brown 12 A B-5 12 Black 13 A A-5 13 Red 7 B B-6 *1) Produced upon receipt of order. 7 Block 6 B A-6 6 Only Robotic type cable can Orange 9 9 Black 8 signal Terminal no be selected. 8 3 Lock B-1 3 Lock A-1 Red 4 Sensor B-3 4 Black 5 Sensor A-3 5 Brown 1 Electric actuator side Controller side 1 Blue