SMC Corporation of America
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Drivers for LJ1, LG1, LX Dimensions 5.2 Driver 150 168 160 5.2 20 A 105 3 Driver dimensions For LJ1, LG1 Driver input/output signal list (CN-1/F connector) Signal description Control signal power supply Servo ON input Alarm clear input Counter clear input Gain switching input Pin no. 12 13 14 19 20 21 22 23 24 25 26 Symbol IM COM GND OZ+ OZ CZ CW+ CW CCW+ CCW FG Signal description Torque

r40) 1 4 2 (36) 1 2 6 (321 1 m (30 s) o24 r6t Millimaters in Parentheses Millimetsrs in Parenthess N\rzM450-N01-00 M5 xo.8 F O F 3.53 lbs (1 6 Ko) P.T. 0.04 in. (1.0 mm) A ts IJ E r G H K M N P R 5 T U X 3 7 2 94 5) 3.58 (91) 0.50 128 1 5 0 (38) 0 8 9 '22 5) 1 0 5 267 1 4 2 (36) 0.54 0 6 7 (17\ 0 9 2 23 a' 0 5 1 (13) 0 1 2 (3) 0 7 9 (20) 0 1 9 (4 8) 2 9 5 (75) 0 5 5 (14) o70 't7 8) 008 (21

(Applicable to all models) (Ex.)A731 D-A731 Ac ces s sorie sl Part s Li st 056 (e^6) 075 (3/4) 106 0n/16) 150 (1-1/2') 2OO (2') 25O (2-1t2',) 300 (3') 400 (4"' Jam Nd JM.O1 JM-02 JM-03 JM.O4 JM.O5 JM-05 JM-08 JM-10 Single Rod Clevis RCS-015 BCS-02 RCS-03 RCS-04 HCS-o5 RCS-05 RCS-08 RCS-10 Double Rod Clevis RDS-o15 RDS-02 RDS-03 RDS-04 RDS-05 RDS{5 RDS.08 RDS-10 w/ dn(l). rcteinino rin6{21

Recommended Valve PA3000 PA5000 VQZ140 (exhaust center) VQZ240 (exhaust center) Refer to page 21 for further details. 6 Series PA3000/5000 Process Pump Air Operated Type 1l/min = 0.035SCFM 1m = 3.28ft 1MPa = 145psi Performance Curves/Air Operated Type PA313 Flow rate characteristics PA513 Flow rate characteristics 50 50 Cycle 7Hz Cycle 5Hz Cycle 3Hz (no change when SUP=0.2, 0.3MPa) Cycle

Port size (nominal size B) 1.5MPa 5 to 60C 99% 1/8, 1/4, 3/8 1/4, 3/8, 1/2 Ambient and fluid temperature Dehumidification rate 0.38 0.55 Weight (kg) Note) Maximum flow rate at pressure 0.7MPa 2 years, or when pressure drop reaches 0.1MPa Element life Note) With auto drain is 0.15MPa 21 Related Products Related Products (Refer to the individual product catalogs for further details.)

B 35 40.5 QA 6 8 QB 13 16 QV 33 38.5 A 47 58 Bore size (mm) 40 50 21 Adjustable Mounting Height Type Series RSG Rod End Configuration Lever Type with Integrated Shock Absorber Variable energy absorbing type/Flange mounting These drawings (2 items) show the piston rod extended.

) (mm) Width across corners I 85 103 132 H 128 144.5 171.5 FX 73 90 110 FZ 93 114 138 GA 16 24 24 CT 8 10 10 CZ 36 45 45 D 32 40 50 E 64 77 98 FT 20 25 25 O A 221 243.5 299.5 B 93 99 128 CD 20 20 25 L 45 54 56 N 9 11 13 QA 10 12.5 12.5 QB 7 8.5 10 GB 16 24 35 Stroke 30 30 40 Bore size (mm) 50 63 80 14 depth 5 18 depth 6 20 depth 6 P (Piping port) TN NPT 1/8 NPT 1/4 NPT 1/4 R 40 47 54 S 21

temperature regulation Flow control of N2 gas to prevent detection camera shimmering and lead frame oxidation Features 2 For Air For Air Digital Flow Switch Series PFA How to order Integrated display type PFA7 10 01 27 Unit specification Flow rate range With unit switching function Fixed SI unit Note) Nil M 1 to 10l/min 5 to 50l/min 10 to 100l/min 20 to 200l/min 50 to 500l/min 10 50 11 21

JS20, 32, 40, 63 M M U U D J F H B E G P A Rod end nut (mm) 30 Description H B C D d: Nominal thread size d Nut for JS10 M4 x 0.7 3.2 7 8.1 6.8 Nut for JS16 M5 x 0.8 4 8 9.2 7.8 Nut for JS20 M8 x 1.25 5 13 15 12.5 D C Nut for JS32 M10 x 1.25 6 17 19.6 16.5 Nut for JS40 M14 x 1.5 8 22 25.4 21 H B Nut for JS63 M18 x 1.5 11 27 31.2 26 (mm) Max. tension and compression N Allowable eccentricity

See pages 31-39 for more information on SMC'S LC6 series drivers, Seiles uff EleGriGlcMflors 0inrmh$l$till$swm LXFH5B (30Omm) ft hlor-T;+ -r-I "kl T slot dimensions (21 ) J I shows the location ai which origjn poinl swirch opetales.

steel Black zinc chromated Stopper nut 3 Resin Nut 14 Aluminum alloy LX Bumper bolt Coupling 4 Bearing steel 15 Nickel plated Bumper Resin Bearing 5 16 Aluminum alloy Resin Motor cover Body 17 6 Anodized Tension ring Mounting plate Mild steel Stainless steel 7 Nickel plated 18 Ball bushing Cable cap 8 19 Bearing steel Plug Guide rod Chrome plated 20 9 Magnet Aluminum alloy Tube Anodized 21

L dimension 53.3 50.1 46.9 43.8 40.6 37.4 34.3 31.1 28 24.8 Weight (g) A 19 18 17 16 15 14 13 12 11 10 No. 335.5 323 310.5 298 285.5 273 260.5 248 235.5 223 L dimension 84.9 81.7 78.6 75.4 72.2 69.1 65.9 62.7 59.6 56.4 Weight (g) Series For SY3000 (8) A 16 22 25 25 C 51 80.8 97 98 Model AN203-KM8 AN200-KM10 AN300-KM10 AN300-KM12 Effective area 14mm2 B 26 54 70 70 29 28 27 26 25 24 23 22 21

(max. 16 stations) L n 1 67 84.5 112.5 123 2 78.5 96 125 135.5 3 90 107.5 137.5 148 4 101.5 119 150 160.5 5 113 130.5 150 160.5 6 124.5 142 162.5 173 7 136 153.5 175 185.5 8 147.5 165 187.5 198 9 159 176.5 200 210.5 10 170.5 188 212.5 223 11 182 199.5 225 235.5 12 193.5 211 237.5 248 13 205 222.5 250 260.5 14 216.5 234 262.5 273 15 228 245.5 275 285.5 16 239.5 257 287.5 298 L1 L2 L3 L4 21

Note 2) Solenoid valves Model Initial exhaust valve Main exhaust valve Example XLDV-25 SY114 SY114-1GS XLDV-40, 50, 63, 80 SY114 SYJ314 SYJ314-1GS XLDV 21 Series XLD, XLDV High Vacuum Angle Valve Specifications Model XLD(V)-50 XLD(V)-63 XLD(V)-80 XLD(V)-25 XLD(V)-40 Valve type Normally closed (spring return & seal) [both main & initial exhaust valves] Fluid Non-corrosive gas for aluminum

W (44) Z (X) (V) T R (Y) T 25 IN port 2-3/8 l=280 l=300 2.5 (N) E A (U) S Q D G C C B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 16 OUT port n-1/4 n-1/8 H H P=J (Pitch) 2 : Thread type L dimensions (mm) n (stations) Model Dimension 2 3 4 6 9 7 5 8 10 L1 69 103.5 138 207 310.5 241.5 172.5 276 345 VV2CW2 L2 81 115.5 150 219 322.5 253.5 184.5 288 357 L3 93 127.5 162 231 334.5 265.5

across flats 3 3 C C 2 2 A A B B Dimensions A Dimensions A (mm) (mm) B C D F Y B C D F Model Model ZPT10F-B5-A8 ZPT20F-B5-A10 10 12 10 12.5 37.5 20 22 1.5 12.5 15.5 48.5 ZPT13F-B5-A8 ZPT25F-B5-A10 13 15 25 28 10.5 13 38 ZPT16F-B5-A8 ZPT32F-B5-A10 2 13 16 49 16 18 32 35 ZPT 40/50 F-B5-A14 (Without Buffer/Male Thread) M14 x 1 Width across flats 19 M5 x 0.8 5 5 20 D 5 F Width across flats 21

A side: Orange (for supply valve) B side: Green (for release valve) Release flow adjustment needle (With light/surge voltage suppressor) 33.3 4.4 Pressure setting trimmer Pilot valve exhaust port Hysteresis setting trimmer (M3: Port PE) Silencer (AN203-KM8) 57.1 62.1 47.5 39.7 29.5 21 33.6 23.5 10 Vacuum port (5.25) (13.5) 3.75 (8.25) 6 One-touch fitting Port V Supply port 16.75 88 19 Button

20 l/min (ANR) Pressure Characteristics (Representative values) ARG20 ARG30 ARG40 0.25 0.25 0.25 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) Set point Set point Set point 0.2 0.2 0.2 0.15 0.15 0.15 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure (MPa) Inlet pressure (MPa) Inlet pressure (MPa) 21

Box 3385 Al-Amir Majed Street, Jeddah-21471, Saudi Arabia TEL: 02-6761574 FAX: 02-6708173 15-18-21

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 14-14-6 to 14-148 for Precautions on every series. Please use the adsorbent set (refer to page 14-19-1 for Accessory/Replacement Parts) when replacing the adsorbent. HA 2.