VP300/500/700

Sub-plate gasket VP300-2-1P (Rc 1/8) VP300-2-2P (Rc 1/4) VP500-2-1P (Rc 1/4) VP500-2-2P (Rc 3/8) VP700-2-1P (Rc 3/8) VP700-2-2P (Rc 1/2) Mounting Screw Tightening Torques M3: 0.6 Nm M4: 1.4 Nm M5: 2.9 Nm VP300-17-1 VP344 SF4--50 VP500-17-1 VP544 VP700-17-1 VP744 How to Order Sub-plate VP 00 2 1 Series Port size Thread type VP744 3/8 1/2 VP544 1/4 3/8 VP344 1/8 1/4 3 5 7 P F N T VP344 VP544

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

1 @1 !8 !5 w !9 !0 !7 u !7 w @1 !9 !3 @3 !2 !0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

HEC-OM-S008

CONTENTS 1 Preparation for Communication . 1-1 2 Specifications of Communication Method . 2-1 3 Communication Format (same as current HEC series) . 3-1 3.1 Control code used for communication . 3-1 3.2 Command code list . 3-1 3.3 Communication procedures and format . 3-2 3.4 Calculation of Check Sum . 3-4 4 Details of Communication Format . 4-1 4.1 Temperature setting (without writing FRAM

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

M5 x 0.8 34 92 9 13 45 17.7 47 15 3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M10 x 1 M5 x 0.8 37 117 10 12 60 25 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 M10 x 1.5 15 M6 x 1 M10 x 1 Rc 1/8 40 127 11.5 14 65 25 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5 M12 x 1.75 18 M8 x 1.25 M14 x 1.5 Rc 1/8 46 152 14.5 15 75 31.4 66 26.5 5H9 5.5 M8 x 1.25 12 55 45 5H9

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

PAX PB Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 17-5-53 12 Series LVD Special Tools How to order fitting jigs LQ G

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

DXT083-13-1 Qty. 1 pc. Hexagon socket head screw DXT083-19-1 2 pcs.

3 Port Solenoid Valve

S070A-80A-1 S070B-80A-1 S070M-80A-1 Valve model S070B S070C Mounting screw No. AXT632-106A-1 AXT632-106A-2 Note) Each of the above part numbers is for two screws, which are to be ordered by 10 units. Order is accepted in 10 units.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

ATEX Compliant 5 Port Solenoid Valve Series 52-SY II 2G Ex ia IIC T4...T5 II 2G Ex ia IIC T6 Gb Ta10C to 50C Gb Ta10C to 45C 0344 How to order 01 F 3 52 SY L 1 5 2 0 Bracket ATEX category 2 Without bracket With foot bracket Note 1) Nil F1 F2 With side bracket Series Note 1) 2 position single solenoid valve only.

Fluoropolymer Tubing Variations

(mm) TIL19 3/4" 3/4" x 5/8" 19.05 TIL25 1" 1" x 7/8" 25.4 TL0403 4 x 3 4 TL0604 6 x 4 6 TL0806 8 x 6 8 TL1008 10 x 8 10 TL1210 12 x 10 12 TL1916 19 x 16 19 TIL01 1/8" TILB01 1/8" 1/8" x 1/16" 3.18 TIL05 3/16" 3/16" x 1/8" 4.75 TIL07 1/4" 1/4" x 5/32" 6.35 TIL11 3/8" 3/8" x 1/4" 9.53 TIL13 1/2" 1/2" x 3/8" 12.7 1/8" x 0.086" Basic diameter 3.18 +0.2 0.1 +0.2 0.1 1.6 0.15 1 0.1 Tolerance

VQ

AXT661-1 VG Cover Locking slotted style (Option) Hook Pin VP TURN PUSH TURN Lead wire: 0.2 to 0.33mm 2 (Max. covering O.D.: 1.7mm) Groove 1 0 0 1 0 1 Lever VQ Socket Part No. DXT170-71-1 OFF ON VQZ It can be locked in the ON state by turning the manual override to the right, setting the E mark to 1 and pushing it.

5 Port Solenoid Valve Series SQ1000/2000

How to Order Applicable Valves B C6 SQ 1 3 5 1 Y 1 Series SQ1000 C H G B A D F E A A A A B A B 2.PUSH 2.PUSH 1.TURN 1.TURN D Coil voltage Type of actuation A 5 24VDC 2 position single 2 position double (latching/double solenoid) 3 position closed center 3 position exhaust center 3 position pressure center Dual 3 port valve N.C. + N.C. Dual 3 port valve N.O. + N.O.

70pvvna

Piping diameter VNA211A, CCVLO2 1/2B (13 mm) Skip valve VNA311A 3/4B (19 mm) VNA411A 1B (25 mm) Speed controller Stop valve 17-4-5 2 Series VNA How to Order Seal material Thread type Bracket (Valve size: 1/2/3/4.) A B C NBR seals FKM seals EPR seals Nil F N T Rc G NPT NPTF Nil B None With bracket (VN-16) :Valve size Note 1) Valve size 1 comes with NV1-A16 (with thread).

Booster Regulator Series VBA1110 to 4200 1

position 4-5.5 mounting hole Handle Operated Type VBA2100-03, VBA4100-04 Pressure gauge (Option) IN port OUT port 4-12 mounting hole E D Silencer (Option) EXH port: 1 position EXH port: 1 position D 73 116 O 39 56 A 300 404 B 170 207.5 C 53 96 E 118 150 F 98 130 G 46 62.8 H 43 62 I 60.5 90 J 18 17 K 15 15 L N Rc 1/16 Rc 1/8 M 31 40 Model Port size Rc 3/8 Rc 1/2 VBA2100-03 VBA4100-04 20 14

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I '-1 'N . ,." " H1 H2 01 02 03 l1 M odel ~ T1 T2 ' ~ f . 9 4 ' 3 ~9 . 2~q .. ~ " 6 8" 41,-'1; " W }?'.." 48.7' 42.6, 10.9 46.4 2B,2 " . . '118:'7 ~7 .3 .70~ .2M .. Ii' .. , . t ~ .230 42.2 25.8 38.9 ' 39.5 33.9 44.7 28.2 35. 1 10.5 17 ~ 35 A SP330F-N01-07S 1/4" NPT1 /8 10-32UNF ASP330F-N01 -09$ 5/16" ~ 14.2 118 15.8 15 .2 :.g 1/2' 8 NP'W~ " ~ NE?'T, lta ".,I:SP'43oFi!

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): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil

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(3-position): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B)

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil

Hydraulic Filters

indication switch (CB-H) Blanking cap Suction Filter with Case FH99 Series Micromesh 74, 105, 149 Negative pressure 1/2, 3/4, 1, 1 1/4, 1 1/2, 2, 2 1/2, 3, 3 1/2, 4 502 Differential pressure indicator (CB-H) Differential pressure indication switch (CB-H) Air breezer Cap Suction Guard FHG Series Micromesh 74, 105, 149 Negative pressure 1/2, 3/4, 1, 1 1/4, 1 1/2, 2, 2 1/2, 3 506 Differential

LEKF-OMZ0035

Part name Qty (1) Electric Actuator / LEF Series 1 (2) Driver / LECS Series 1 (in case with driver) (3) Motor cable 1 (in case with cable) (4) Encoder cable (5) Lock cable (6) I/O Connector 1 (in case with I/O connector) (2) Driver *2 1 (3) Motor cable (4) Encoder cable (5) Lock cable 24VDC Host controller, (1) Electric Actuator etc (6) I/O connector 2 *1 This picture is LECSA *2 The shape

S070

S070A-80A-1 S070B-80A-1 S070M-80A-1 Valve model S070B S070C Mounting screw no. AXT632-106A-1 AXT632-106A-2 Note) Each of the above part numbers is for two screws, which are to be ordered by 10 units. Order is accepted in 10 units.