PF2D Series Digital Flow Switch For Deionized Water and Chemical Liquids

For Deionized Water and Chemical Liquids Digital Flow Switch PF2D Series RoHS How to Order Remote Type Sensor Unit PF2D5 13 20 1 C Flow rate range Option (Refer to page 391.) 04 20 40 None e-con connector x 1 pc. Nil C 0.4 to 4 L/min 1.8 to 20 L/min 4 to 40 L/min The cable and connector are shipped unassembled.

Air Operated Type Integral Fitting Type (Hyper Fittings) Series LVC How to Order Valves (Single Type) LVC LVA LVC 2 0 06 S LVH Option Body class Nil None LVD 1 With flow rate adjustment Body class Orifice dia. Symbol 2 With bypass ø4 2 2 Valve type LQ2

Symbol Body class 2 3, 4, 5, 6 3, 4, 5, 6 Thread type M5 Rc 1/8 NPT 1/8 Nil N Variations Model LVC20 LVC30 LVC40 LVC60 LVC50 Orifice diameter 4 8 10 22 16 Tubing O.D. Inch sizes Metric 3, 4, 6 6, 8, 10 10, 12 19, 25 12, 19 03 05 07 11 13 19 25 1/8 3/16 1/4 3/8 1/2 3/4 1 Inch Valve type Symbol Type 1/4, 3/8 3/8, 1/2 3/4, 1 1/2, 3/4 1/8, 3/16, 1/4 Basic type N.C. PB PA PA N.O.

LVQ

Double acting Double acting 03 04 06 08 10 12 19 25 3 4 6 8 10 12 19 25 With flow rate adjustment PA N.C. B A N.C. Double acting With bypass PA PA N.C. PB B A B A Inch sizes Double acting 03 05 07 11 13 19 25 1/8 3/16 1/4 3/8 1/2 3/4 1 N.C. Double acting N.C. With flow rate adjustment & bypass PA B A N.C. N.C. With indicator PA Basic size With reducer N.C.

Compact Cylinder with Air Cushion Series RQ

8 23 7 58.5 31.5 14 9 Rc 1/8 28 7 66 35 14 11 Rc 1/4 31.5 8 80 41 19 Refer to page 9 for details on rod end nut and accessories.

Vacuum Ejector with Solid State Timer, Series ZMA

Example) Manifold model: ZZMA04-SR (1 pc.) Ejector model: ZMA073H-K5-T14C (3 pcs.) ZH073H-J5LZ (1 pc.)

Safety Speed Control Valve (SSC Valve) Series ASS 1

bracket 1 3 5 6 AK 8 3 B 3 4 1 Port size ASS Applicable series Port size 01 02 03 04 06 10 Type 1 8 ASS100/110 ASS300/310 ASS300/310 ASS500 ASS500/600 ASS600 ASR PAT.PEND 1 4 00 10 Meter-out control type Meter-in control type Meter-in type is available only for ASS110 and ASS310. 8 3 ASF 1 2 3 4 1 JIS Symbol Thread type Nil N F Rc NPT G Meter-out control Meter-in control Caution Be sure

Safety Speed Control Valve (SSC Valve) Series ASS

1 3 5 6 AK 8 3 B 3 4 1 Port size ASS Applicable series Port size 01 02 03 04 06 10 Type 1 8 ASS100/110 ASS300/310 ASS300/310 ASS500 ASS500/600 ASS600 ASR PAT.PEND 1 4 00 10 Meter-out control type Meter-in control type Meter-in type is available only for ASS110 and ASS310. 8 3 ASF 1 2 3 4 1 JIS Symbol Thread type Rc NPT G Nil N F Meter-in control Meter-out control Caution Be sure to read

E-ITV-STD-RF-A

I TV 0 3 Preset i nput t ypeI TV 0 4 Pow er suppl y 24VD C I TV 0 04 Brow n 1215VD C I TV 0 14 + Bl ue Pow er suppl y Fi g. 1 Rel at i on bet w een preset pressure and sw i t ch S1 W hi t e Preset pressure P_1 P_2 P_3 P_4 Bl ack S2 S1 O FF O N O FF O N S2 O FF O FF O N O N 5 W i ri ng di agram M oni t or out put CAU TI O N W hen t he m oni t or out put i s not bei ng used, prevent i

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

1 !6 !

PF3WBCSR.eng

Otherwise it can cause failure or malfunction of the system. 1 L+ Brown 18 to 30 VDC 2 N.C.

Flame Resistant (Equivalent to UL-94 Standard V-0) Flat Head Screwdriver Adjustable Speed Controller with One-touch Fitting AS  2  1F-W2D Series

With One-touch fitting Port size 01 1/8 02 1/4 03 3/8 04 1/2 Thread type G G thread 1

IR1000-A/2000-A/3000-A

AR425 to 935 ARX q Body size 1 2 3 Symbol Description AMR w Set pressure range 0 0.005 to 0.2 MPa V V 0.01 to 0.2 MPa V 1 0.01 to 0.4 MPa V V V 2 0.01 to 0.8 MPa V V V + ARM ARP IR-A IR-A e Exhaust direction 0 Bottom exhaust V V V 1 Front exhaust V 2 Rear exhaust V + IR IRV r Pipe thread type Nil Rc V V V N NPT V V V F G V V V + VEX 01 1/8 V 02 1/4 V V 03 3/8 V 04 1/2 V + SRH

IR1200-A/2200-A/3200-A

AR425 to 935 ARX q Body size 1 2 3 Symbol Description AMR w Set pressure range 0 0.02 to 0.2 MPa V V V 1 0.02 to 0.4 MPa V V V 2 0.02 to 0.8 MPa V V V + ARM ARP e Exhaust direction 0 Bottom exhaust V V V 1 Front exhaust V 2 Rear exhaust V + IR-A IR-A IR r Pipe thread type Nil Rc V V V N NPT V V V F G V V V + IRV VEX 01 1/8 V 02 1/4 V V 03 3/8 V 04 1/2 V + SRH t Port size SRP a

ITV-E

0 2 I nput si gnal 010VD C I TV 0 3 Preset i nput t ypeI TV 0 4 Pow er suppl y 24VD C I TV 0 04 Brow n 1215VD C I TV 0 14 + Bl ue Pow er suppl y Fi g. 1 Rel at i on bet w een preset pressure and sw i t ch S1 W hi t e Preset pressure P_1 P_2 P_3 P_4 Bl ack S2 S1 O FF O N O FF O N S2 O FF O FF O N O N 5 W i ri ng di agram M oni t or out put CAU TI O N W hen t he m oni t or out put i

Exhaust Cleaner for Clean Rooms AMP Series

4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5

O

0 2 I nput si gnal 010VD C I TV 0 3 Preset i nput t ypeI TV 0 4 Pow er suppl y 24VD C I TV 0 04 Brow n 1215VD C I TV 0 14 + Bl ue Pow er suppl y Fi g. 1 Rel at i on bet w een preset pressure and sw i t ch S1 W hi t e Preset pressure P_1 P_2 P_3 P_4 Bl ack S2 S1 O FF O N O FF O N S2 O FF O FF O N O N 5 W i ri ng di agram M oni t or out put CAU TI O N W hen t he m oni t or out put i

O

0 2 I nput si gnal 010VD C I TV 0 3 Preset i nput t ypeI TV 0 4 Pow er suppl y 24VD C I TV 0 04 Brow n 1215VD C I TV 0 14 + Bl ue Pow er suppl y Fi g. 1 Rel at i on bet w een preset pressure and sw i t ch S1 W hi t e Preset pressure P_1 P_2 P_3 P_4 Bl ack S2 S1 O FF O N O FF O N S2 O FF O FF O N O N 5 W i ri ng di agram M oni t or out put CAU TI O N W hen t he m oni t or out put i

AS

Note) Inch size Metric size KE 23 01 1 8" 3.2 4 6 8 10 12 5 32" Control type 04 06 08 10 12 03 05 07 09 11 13 3 16" Meter-out Meter-in 0 1 AS-FG 1 4" 5 16" AS-FP 3 8" 1 2" With One-touch fitting AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 630. Use 1/8" tube.

Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series * 1

*1 Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series 2(A) Symbol How to Order (P)1 3(R) *1 CE compliant AV 00 20 02 B B 1 D q w e r t y u i o A Electrical entry Grommet DIN terminal AC V DC V V V q Body size 20 30 40 50 Symbol Description w Thread type Nil Rc V V V V N NPT V V V V F G V V V V + 02 1/4 V 03 3/8 V 04 1/2 V 06 3/4 V 10 1 V + e Port size 1(P), 2(A) a Mounting Nil

How to Order 90-SV Series Single Valve/Sub-plate Type IP67 Compliant

Single Valve/Sub-plate Type IP67 Compliant How to Order 90-SV Series 90 SV W1 00 1 2 5 U D Series compatible with secondary batteries Thread type Nil F N T Rc G NPT NPTF 90 Material restriction Series 2 4 90-SV2000 90-SV4000 Port size Type of actuation Port size Without sub-plate Symbol Nil 02 03 04 Applicable series 2 position single (A) 4 (B) 2 90-SV2000 90-SV4000 90-SV4000 1/4 3/8 1/2