-- NCM seies

a) .250 \-24 0.50 .624 .621 0.25 0.86 0.38 it-l6 .251 .zfi 0.75 0.25 o.34 It.oo o.75 o.62 o.12 # 1 8 o.75 1-?

Micro Mist Separator

Refer to the section [12. Dimensions] (P28) for necessary space. (5) Install vertically so that outlet of drain is downward.

Floating Joint

Model Wrench size (Bowl) Tightening torque Wrench size (Socket) Tightening torque JT20 Width: 22 mm 12 Nm Width: 10 mm 8 to 12 Nm JT32 Width: 27 mm 24 Nm Width: 12 mm 15 to 24 Nm JT40 Width: 36 mm 68 Nm Width: 17 mm 40 to 68 Nm 4. Use a cylinder with a built-in cushion mechanism.

PS-OMH0005CN

2 / / / 2 n_n / LoC() 4 UnL LoC 4 LoC UnL 5F.S.(2.5F.S.) 1 12341 2 2 2 -27No.PS-OMH0005CN-D (2030 ) -28No.PS-OMH0005CN-D PSE200 ( ) 1 ON ON OFF Yes No 2 OFF ON 1 OFF 3 4 5 OFF 6 -29No.PS-OMH0005CN-D 7 Yes No 8 8 9 10 11 12 13 14 15 16 -30No.PS-OMH0005CN-D No.

PFxx-OMS0001CN

OUT1 [CoL] [] , ON OFF ON OFF [F 1] OUT1 -36No.PF-OMS0001CN-A [F 2] OUT2 OUT2 (29 )(30 ) OUT2()[---] <>OUT2 [F 2] [oUt2][]() OUT2 [---] [oU2] [] [2ot] [] 38 39 40 41 -37No.PF-OMS0001CN-A a.

High Vacuum L Type Valve

SUS304) 7 11 XL-OMV0017 5-2.Dimensions C E C E E (KF flange) (K flange) Fd Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLF-16-2 40 108 38 20 30 17 44 XLF-25-2 50 121 48 27 12 40 26 44 XLF-40-2 65 171 66 39 11 55 41 67 XLF-50-2 70 185 79 46 11 75 52 72 XLF-63-2 88 212 100 55 11 87 95 70 76 XLF-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMV0017 6.

XL-OMV0002

5. 200 1680 100 100,160[ ]18 12 Assy O XLC-16,XLC-25,XLC-40,XLC-50,XLC-63,XLC-8 200 XLC-100,XLC-160 100 FKM 110 Pa 11 XL-OMV0002 . 6-1. 1 1 Assy Assy Assy 12 XL-OMV0002 6-2. 1 2 3 3 2 1 4 162540 50,63,80,100,160 O O O O 50 4 5 6 3 3 2 1 4 2 1 Nm 4 0.7 XLC-16 1.5 -25 2.5 -40 6 -50 6 -63 15 -80 20 -100 25 -160 O O O O , O , 13 XL-OMV0002 6-3.O 1 2 3 4 5 3 2 1 4 162540

Pressure Sensor

No.PS-OME0004-G PRODUCT NAME Pressure Sensor MODEL / Series / Product Number PSE53# Table of Contents Safety Instructions 2 Model Identification and how to order 8 Definition and terminology 8 Mounting and Installation 9 Wiring 9 Troubleshooting 11 Specification 12 Specifications 12 Dimensions 14 -1No.PS-OME0004-G Safety Instructions These safety instructions are intended to prevent hazardous

E-MY2_E_D

. / (420) 5-414 24611 NORWAY / (47) 67 12 90 20 DENMARK / (45) 70 25 29 00 POLAND / (48) 22-548 50 85 FINLAND / (358) 9-859 580 PORTUGAL / (351) 2 610 89 22 FRANCE / (33) 1-64 76 1000 SPAIN / (34) 945-18 4100 GERMANY / (49) 6103 4020 SWEDEN / (46) 8-603 0700 GREECE / (30) 1342 6076 SWITZERLAND / (41) 52-396 3131 HUNGARY / (36) 1-371 1343 TURKEY / (90) 212 221 1512 IRELAND / (353) 1-403 9000

CYV

TB W Counter bore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60

TCU

-1-N-X6 TCU1065l-2-N-X6 L X 3.8 + 200 L X 5 + 200 6 4 N X 12 2 3 to 66 1 3 to 35 37 67 N X 12 TCU0604l -2-N-X6 TCU1208l-1-N-X6 12 8 L X 2.5 + 200 L X 3 + 200 37 N X 18 3 3 to 44 67 N X 24 2 3 to 30 TCU0604l -3-N-X6 TCU1208l-2-N-X6 B (Black), W (White), R (Red), BU (Blue), Y (Yellow), G (Green), C (Clear), YR (Orange) l 2.4-5

Lubricator

Disassembly Drawing 31-32 12. Dimensions 33 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

IR1000/2000/3000

12 Series IR1000/2000/3000 Made to Order Specifications: Please contact SMC regarding detailed dimensions, specifications, and delivery times.

TL/TIL

/16" x 1/8" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" 1" x 7/8" Basic diameter 4 6 8 10 12 19 3.18 4.75 6.35 9.53 12.7 19.05 25.4 3.18 O.D.

TL/TIL

" x 1/8" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" 1" x 7/8" Basic diameter 4 6 8 10 12 19 3.18 4.75 6.35 9.53 12.7 19.05 25.4 3.18 O.D.

SYJ3000

For manifold type 31, S31, 32, S32 Body option 5 port 3: Common exhaust type for main and pilot valve 0: Pilot valve individual exhaust for the pilot valve (With gasket and screws) D: Push-turn locking slotted type M5: With M5 port sub-plate For sub-plate, manifold type 41, S41, 46, S46 R port P, E port R port P, E port Electrical entry 24, 12, 6, 5, 3 VDC 100,110, 200, 220 VAC 24, 12, 6,

Series

For manifold type 31, S31, 32, S32 5 port (With gasket and screws) D: Push-turn locking slotted type M5: With M5 port sub-plate For sub-plate, manifold type 41, S41, 46, S46 Electrical entry 24, 12 VDC 6, 5, 3 VDC 24, 12, 6, 5, 3 VDC 100, 110, 200, 220 VAC E: Push-turn locking lever type Grommet L plug connector M plug connector M8 connector WO: Without connector cable M: With lead wire (

How to Order

Coil type Nil Standard With power saving circuit (24, 12 VDC only) T For sub-plate type, type 41, S41, 42, S42 manifold Power saving circuit is not available for W type.

10-SYJ3000

, S41, 46, S46 manifold (24, 12 VDC only) Power saving circuit is not available for W type.

FH34/44/54/64

With relief valve None 0 1 Port size Flange SSA 15 (1/2B) 20 (3/4B) 25 (1B) 32 (1 1/4B) 40 (1 1/2B) 50 (2B) 65 (2 1/2B) 80 (3B) Threaded Rc 3/8 1/2 3/4 1 1 1/4 1 1/2 Symbol 03 04 06 08 10 12 16 20 24 Replacement Element Part No.