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Response Time *2) [ms] ZHP[]BM[]-07[] ZHP[]BM[]-10[] ZHP[]BM[]-12[] ZHP[]BM[]-15[] 63 295 143 120 86 80 455 221 190 140 2) Response time means a period of time that the vacuum pressure reaches 57 kPa after the externally installed valve has been turned ON when the bellows type pad is used and the supply pressure is 0.35 MPa.

Applicable model P215420-07 For JT20 7 Dust cover P215432-07 For JT32 P215440-07 For JT40 Dimensions JT20 to 40 M, P D M E F C G A B H Standard Pneumatic: Up to 0.7 MPa [mm] Model Connection thread M A B C D E F G Width across flats H Maximum thread depth P Weight JT20 M8 x 1.25 19.2 8 11 (25.4) 23 10 13.6 22 9.5 22 g JT32 M10 x 1.25 23 10 13.4 (30.6) 28 12 16.3 27 11.5 38 g JT40 M14 x 1.5

Note) Made to Order Refer to page 743 for details. 1/4 standard Metric size Inch size 3/8 standard 3.2 01 03 05 07 09 11 13 23 04 06 08 10 12 1/8" 1/2 standard 5/32" 4 Caution 3/16" 6 With One-touch fittings 1/4" 8 Be sure to read this before handling the products.

Input process data Output process data Byte 2 : Process data is assigned to each port based on the process data mapping size setting Process data is assigned to each port based on the process data mapping size setting Byte 39 Byte 40 Port 1 status (PQI) Reserved (fixed value: 0) Byte 41 Port 2 status (PQI) Reserved (fixed value: 0) Byte 42 Port 3 status (PQI) Reserved (fixed value: 0) Byte 43

Reserved (fixed value: 0) 2 Port 1 process data Port 1 process data 3 4 Port 2 process data Port 2 process data 5 6 Port 3 process data Port 3 process data 7 8 Port 4 process data Port 4 process data 9 10 : (fixed value: 0) (fixed value: 0) 39 40 Port 1 status (PQI) Reserved (fixed value: 0) 41 Port 2 status (PQI) Reserved (fixed value: 0) 42 Port 3 status (PQI) Reserved (fixed value: 0) 43

MODEL / Series / Product Number EX500-GPN2 EX500-S103 EX500-DXP# Table of Contents Safety Instructions 3 Product Overview 9 System construction 9 EX500 GW unit Model Indication and How to Order 10 Summary of Product parts 10 Mounting and Installation 11 Installation 11 Wiring 12 LED Display 17 Hardware Configuration 18 Connection to SIEMENS PLC S7 19 Web server function 32 Specification 43

Bit (*) Bit (*) 1 0 I/O M 0 0 IN0 [0 and 4] 2 1 zone1 Z1 1 1 IN1 [1 and 5] 3 2 zone2 Z2 2 2 IN2 [2 and 6] 4 3 zone3 Z3 3 3 IN3 [3 and 7] (*) 10.9.2 LED 2 43 No.EX##-OMY0006CN 9. 9.1. IO SI Diagnostics type1Diagnostics type2 9.1.1.

Installation 14 Piping 16 Wiring 17 Outline of Settings [Measurement mode] 21 Flow Setting (set value only) of OUT1 OUT2 [3 step setting mode] 22 Default settings 22 Function Setting [Function selection mode] 24 Default settings 25 F0 Reference condition/Unit selection function 26 F1 Setting of OUT1 28 F2 Setting of OUT2 36 F3 Response time 41 F10 Display mode 42 F13 Reversed display mode 43

No.PF-OMP0001CN-F // PFMB7501 PFMB7102 PFMB7202 2 10 11 12 14 14 16 17 [] 21 OU1OUT2 {3 ] 22 22 [] 24 25 F0 26 F1 OUT1 28 F2 OUT2 36 F3 41 F10 42 F13 43 F20 44 F22 45 F30 46 F31 47 F80 OFF 48 F81 49 F90 50 F98 52 F99 53 54 58 59 61 62 62 65 67 -1No.PF-OMP0001CN-F (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems

Output OFF: Red (Linked to OUT1) Other parameter settings Item Page Default setting [F 3] Digital filter setting Page 43 0.00 s [F 5] FUNC terminal function setting 2 Page 44 Analogue output: 1 to 5 V/4 to 20 mA External input: Accumulated value reset [F10] Sub display setting Page 47 dEF [F14] Display with zero cut-off setting Page 49 1.0%F.S.

43 41 40 39 38 37 36 35 34 33 32 Item Flow measurement value (PD) Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Temperature measurement value (PD) Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Item Reservation Temp.

[F 2] OUT2 39 No.LFE*-OMY0008 [F3] [F 3] [RES] [F 3] 40 No.LFE*-OMY0008 [F10] OUT1 (OUT2 ) OUT1 (OUT2 ) () OFF [F10] [SUb] OFF OFF OFF OFF [F10] 41 No.LFE*-OMY0008 (20 L/min ) (=P_1 ) (=N_1 ) (=P1L ) (=P1H ) (=N1L ) (=N1H ) 42 No.LFE*-OMY0008 ( ( ( ( ) ) ) ) 9L3 (1.5S)6 (3S) 9L(9) () + 1 (0) 9L 3 (1.5S)6 (3S) 9L 6 0 [0] () + 1 () (=)(=) 1 / 43 No.LFE*-OMY0008 ( ( ( ( ) )

Set time: 0 secthis function is Disabled 0 to 9sec (2) Time Pump operation sustainable time 0sec By default HRS Series 5.4 Description of the Screen 5-43 DOC1001322 Chapter 5 Display and Setting of Various Functions About continuous pump operation function This function allows just the pump to continue operating after some alarms are activated.

31 Discharge pressure alarm (AL18/AL19/AL20) .5-32 5.4.8 CH2 setting screen .5-34 Temperature rise/drop alarm (AL14/AL15) setting .5-35 TEMP READY alarm (AL16) and TEMP READY function .5-36 Offset (TEMP OFFSET) function .5-38 Pump operation mode .5-39 Discharge pressure alarm (AL21/AL23/AL24/AL26) .5-40 Electric conductivity and alarm setting (AL27) .5-41 5.4.9 Function setting screen .5-43

function .5-30 Pump operation mode .5-32 Discharge pressure alarm (AL18/AL19/AL20) .5-34 Electric conductivity and alarm setting (AL28) .5-36 5.4.8 CH2 setting screen .5-37 Temperature rise/drop alarm (AL14/AL15) setting .5-38 TEMP READY alarm (AL16) and TEMP READY function .5-39 Offset (TEMP OFFSET) function .5-41 Pump operation mode .5-42 Discharge pressure alarm (AL21/AL23/AL24/AL26) .5-43

HRR Series 5.5 Advanced setting mode 5-43 HRX-OM-X084 Chapter 5 Display and Setting of Various Functions Table 5.5-1 List of alarms which allow to continue pump operation Display Alarms which allow to Alarm no.

HRR Series 5.5 Advanced setting mode 5-43 HRX-OM-X071 Chapter 5 Display and Setting of Various Functions Table 5.5-1 List of alarms for which isolated pump operation is available Display Alarms which allow to Alarm no.

(page 141) -142No.PF-OMA1007-B Air Management Hub Base type EXA1-20/30/40-PN/EN/EC-# Model A B C D E F EXA1-20 236.2 35 42 19.1 65.1 30.5 EXA1-30 236.2 43 53 13.6 65.1 30.5 EXA1-40 240.4 51 64.4 4.6 71 35.5 -143No.PF-OMA1007-B EXA1-60-PN/EN/EC-# -144No.PF-OMA1007-B Remote type EXA1-20/30/40-SA-# Model A B C D E F G EXA1-20 236.2 35 42 19.1 65.1 30.5 74.7 EXA1-30 236.2 43 53 13.6 65.1 30.5

When changing the allocation of signals, parameters for PD02 PD18 can be altered. 43 - 5.5.4 Allocation Examples for Position Control Mode (Pulse Input) (1) Example of Gain switch (CDP) Settings When changing pin CN1-4 from Servo-on (SON) to Gain switch (CDP).

Leakage from port shall be 38.5210 43 Internal Leakage test / 6 ANR or less. Label No defects shall be observed by view. 7 Indication 22 - Troubleshooting Table 12. Troubleshooting Failure Main cause Measure 1. Operation is not smooth. 1.