ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

4 54 8 50 Up to 1000 32 40 20 G 1/4 14 M8 x 1.25 8 M16 x 1.5 17 32 16 106 4 6 5.1 37 244 66 46.5 24 5 69 63 Up to 1000 32 45 20 G 3/8 16 M8 x 1.25 8 M16 x 1.5 17 38.6 16 121 4 9 6.3 37 259 77 56.5 24 5 69 80 Up to 1000 40 45 25 G 3/8 16 M10 x 1.5 10 M20 x 1.5 22 38.4 17 128 4 11.5 6 46 300 99 72 30 86 100 Up to 1000 40 55 25 G 1/2 18 M10 x 1.5 10 M20 x 1.5 22 42.9 17 138 4 17 10 51 320

VDW

PAX PB Lined Up by Compact Design 28 2 Port 3 Port 17 20.5 28 20.5 VDW10 VDW20 VDW30 VDW200 VDW300 17-2-61 2 Series VDW Precautions Be sure to read before handling. Refer to page 17-6-3 for Safety Instructions and Solenoid Valve Precautions.

0.4

Refer to Semi-standard on page 56 for details. 16 SOL.B 18 17 14 16 15 SOL.A () () (+) (+) 12 Station 3 14 13 SOL.B Triangle mark indicator position 10 12 11 SOL.A () () (+) (+) 8 Station 4 9 10 SOL.B 6 8 7 SOL.A () () (+) (+) 19 Station 5 SOL.B 6 5 17 Note) When using the negative common specifications, use valves for negative common.

CLA

-600 20-600 :J2 35 86 11 5 '/, Y. 64 20 40 10 95 17 27 59 13 12 MaX 1 25 7 30 80 20 40 10 102 17 26 67 18 15 Ml0Xl .2S 25 52 14 11 3 21 30 72 23 17 M1 2X 175 30 52 14 124 21 31 76 25 19 M12X1.75 7 40 99 80 1 750 20750 37 40 102 129 'I.

HRX-OM-W002

18 19 13 15 10 16 17 24 11 14 9 8 6 3 9 3 3 7 5 2 2 5 2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 24 14 34 2B 1B 1A 3A 2A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11 3 9 8 6 2 22 25 26 27 22 2 2 7 7

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

11 27 25 60 27 30 6 19 8 14 1/4 3/8 3/8 1/2 1/2 Refer to p.3.4-18 for further information on rod end nuts and accessories. 58 13 17 up to 600 20 17 52 12 11 27 47.3 61 M8 X 1.25 M18 X 1.5 159 40 90 17 11 30 25 70 7 19 0 32 35 18 58 17 up to 600 20 17 64 10 11 27 54.8 M18 X 1.5 170 40 15.5 68.5 M10 X 1.25 98 17 14 31 25 7 19 0 85 32 35 18 71 21 up to 750 21 25 78 14 13 32 65.8 M22 X 1.5

VHK

C D E F G J K VHK R-01S-01S 13 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 13 17 19 22 VHK R-02S-02S 17 VHK R-03S-03S 19 VHK R-04S-04S 22 5-8-5

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

16.5 17 18 17 18 21 21 22 13.5 12.7 13.5 17 18 17 18 21 22 21 22 22.4 25.2 6.2 11.8 27.6 28.6 29.5 29.6 30.5 27.6 33.3 34.1 35.3 43.5 44.9 32.6 33.6 34.5 34.6 35.5 32.6 38.3 39.1 40.3 51 52.4 5.2 6.2 7.1 6.2 7.1 8.1 7.4 8.2 9.5 10.3 11.6 11.8 14.8 14.8 19.8 19.8 26.5 82 11.3 26.5 15-9-51 Flow Control Equipment Precautions Be sure to read before handling.

VHK

C D E F G J K 2(A) 1(P) 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-B2A 49 17 1 30 25 21.5 31 VHK-B2A 49 17 1 30 25 21.5 31 VHKlR-01S-01S 13 13 17 19 22 VHKlR-02S-02S 17 VHKlR-03S-03S 19 3.6-5 VHKlR-04S-04S 22

VQC

A 15 3 3 4 5 6 7 8 Station 5 16 17 18 19 20 SOL. B 16 SOL. A 4 Station 6 SOL. B 17 SOL. A Individual EXH spacer VVQ1000-R-1-C6 VVQ2000-R-1-C8 EXH block plate VVQ2000-19A DIN rail mounting bracket [-D] VVQ1000-57A VVQ2000-57A Silencer (EXH port) AN200-KM8 (For VQC1000) AN200-KM10 (For VQC2000) 5 Station 7 21 22 23 SOL. B 9 10 11 (-S) (-T) (-S) (-T) 18 SOL. A 6 Station 8 SOL.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

84 25 6 19 8 1/4 3/8 3/8 1/2 1/2 Refer to p.3.8-18 for further information on rod end nuts and accessories. 14 up to 600 11 52 20 13 40 12 17 17 58 27 47.3 61 M8 M18 X 1.5 159 35 32 70 7 11 19 30 17 90 0 25 18 up to 600 11 64 20 15.5 40 10 17 17 58 27 54.8 68.5 M10 X 1.25 M18 X 1.5 170 32 85 35 7 14 19 31 17 98 0 25 18 up to 750 102 13 78 25 18.5 52 14 21 21 71 32 65.8 80.5 M12 X 1.75 M22

LX

Terminal part no. 1 10 2 11 3 12 4 13 5 14 6 15 7 16 8 17 9 18 A mark is located on the connector number 1 side. 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 LJ1 LG1 LC1 LX LC6D/LC6C Switches View from the insertion side View from the wiring side Switches Home position switch: This switch indicates the home position. Connect this switch when returning to the origin point.

VHK

C D E F G J K VHK R-01S-01S 13 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 13 17 19 22 VHK R-02S-02S 17 VHK R-03S-03S 19 VHK R-04S-04S 22 5-8-5

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

21 32 AS221FG-02-06 AS221FG-N02-03 25.2 34.4 17 25.2 17.7 34.4 6 12.8 5/32" 10.4 16 18.5 29.4 34.9 39.9 17 34.4 R 1/4 32 AS221FG-02-08 AS221FG-N02-05 17.7 24.9 34.2 34 18.5 27.2 36.4 8 15.2 3/16" 11.4 16.5 NPT 1/4 AS221FG-02-10 AS221FG-N02-07 25.2 17.5 34.5 36 21 39.9 35.3 18.3 34.4 34.9 44.5 10 18.5 1/4" 13.2 29.4 17 34 18.5 AS321FG-02-06 AS221FG-N02-09 18.2 27.2 36.4 60 17 27.8 39.3 6

CHKD/CHKG

x 4 45 21 106 17 26 depth 17.5 146 3/8 36 15 36 Note 1) Body dimensions are the same with or without auto switches.

HRX-OM-X084

5.5.1 Switch to advanced setting mode . 5-17 5.5.2 Display contents of monitor menu . 5-17 5.5.3 Display contents of the standard setting menu . 5-19 5.5.4 Alarm setting menu . 5-33 5.5.5 Communication setting menu . 5-46 5.5.6 Reset menu . 5-54 5.5.7 Information Monitor Menu. 5-58 5.5.8 Alarm History menu . 5-62 Chapter 6 Option . 6-1 6.1 Option DMElectric conductivity control function

CJ2

Please delete the unnecessary parts. 15 17 7.5 21 14.5 4.5 66 122 18 20 7.5 21 14.5 5.5 67 123 1.3-17 Series CJ2W Foot (L) Bore size Stroke CJ2WL Bore size Stroke With air cushion: CJ2WL A Material: Iron Part No. Bore d C B H 6 10 16 6.4 8.1 9.2 5.5 7 8 2.4 3.2 4 M3 X 0.5 NTJ-006A M4 X 0.7 NTJ-010A M5 X 0.8 NTJ-015A Refer to p.1.3-12 for details of the mounting nut.

CS1

59 35 16 90 14 47 36 43 29 25 64 M30 X 1.5 Lube Non-lube Air-hydro 1/2 M14 X 1.5 36 to 1000 75 31 15 161 128 50 17 59 35 16 90 14 47 36 43 32 28 72 M30 X 1.5 3/4 M16 X 1.5 40 to 1200 80 36 18.5 17 182 144 56 53 20 40 90 59 43 14 39 36 32 80 M36 X 1.5 3/4 M18 X 1.5 50 to 1200 41 90 115 18.5 20 204 162 17 63 60 23 45 70 48 39 44 40 100 M40 X 1.5 Lube Non-lube 3/4 1 M20 X 1.5 50 to 1200 90

Table of Contents

Optional filtration rate is required, indicate like 17-. Ex.) When requiring stainless steel and 40 m; 17-40 3 The bowl of series AL is used. 4 This symbol indicates the port size. Flow rate (/min (ANR)) 1 4 1 6 8 Rc 1 4 NPT 1 4 G 14-3-13 2 Series AF800/900 Construction Component Parts Material AF800 AF900 No.

Fieldbus System

inputs/ 8 inputs/ 8 inputs/ 8 outputs 8 outputs IP67 IP67 IP67 IP40 IP40 Input device Output device Others Proximate sensor Photoelectric switch Limit switch Solenoid valve Others Indicator light Relay Buzzer Flow switch Auto switch Pressure switch 1 SI Unit Unit to connect various Fieldbus with the EX600 system Series EX600 Series SY Series SV Series S0700 Series VQC P. 9 P. 11, 12 P. 17