INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

Response Time/Weight Response time [ms](at 0.5 MPa) Model Pressure specifications Weight [g] Without light/surge voltage suppressor With light/surge voltage suppressor AC VP517Y Standard (0.2 to 0.7 MPa) 27 32 44 222 (With bracket: 257) High-pressure type (0.2 to 1.0 MPa) 41 48 44 VP717Y Standard (0.2 to 0.7 MPa) 41 48 50 413 (With bracket: 468) High-pressure type (0.2 to 1.0 MPa) 67 76 50

VCL

M5 8 81.5 1/4, 3/8 VCL31 24 25 59 46 57 60 54.5 48.5 101 57 68 104 30 50 36.5 13.5 15 32 25 23 M5 8 86 1/2 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 107 22 45 41 11 17 36 22.5 23 M5 8 90 1/4, 3/8 VCL41 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 30 50 41 13.5 17 36 25 23 M5 8 94 1/2 26 26.5 70 48 68 62 65.5 50.5 103 68 70 119 35 60 41 17.5 17 36 30 28.2 M5 8 102 3/4 Note) For class

Series VCL

19 M5 8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57 68 30 50 84 36.5 13.5 15 32 25 23 M5 8 1/2 107 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 22 45 89 41 11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 111.5 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 30 50 93.5 41 13.5 17 36 25 23 M5 8 1/2 119 26 26.5 70 48 68 62 65.5 50.5 103 68 70 35 60 101 41 17.5 17 36 30 28.2 M5 8 3/4 Note) For class

Modular Type Regulator Series AR

Description AR10, 20 AR25 to 40 (-60) AR50, 60 Body Bonnet Platinum silver Black Zinc die-cast Aluminum die-cast Aluminum die-cast Polyacetal 1 2 Replacement parts Part no. No.

IZT40/41/42

Refer to the how to order above. 1 Only bar is ordered, 41 cannot be selected. 19

XMD/XYD Series

55 41 84 20 15 XYD-50 178 128 79 2 53 75 52 95 20 17.5 XYD-63 209 163 100 3 61 87 95 70 121 20 19.5 XYD-80 268 193 117 3 80 114 110 83 144 20 26.5 10 XL-OMP0003-A 7.

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

IN4 IN3 IN2 IN1 IN0 Step No OUT5 OUT4 OUT3 OUT2 OUT1 OUT0 32 1 0 0 0 0 0 32 1 0 0 0 0 0 33 1 0 0 0 0 1 33 1 0 0 0 0 1 34 1 0 0 0 1 0 34 1 0 0 0 1 0 35 1 0 0 0 1 1 35 1 0 0 0 1 1 36 1 0 0 1 0 0 36 1 0 0 1 0 0 37 1 0 0 1 0 1 37 1 0 0 1 0 1 38 1 0 0 1 1 0 38 1 0 0 1 1 0 39 1 0 0 1 1 1 39 1 0 0 1 1 1 40 1 0 1 0 0 0 40 1 0 1 0 0 0 41 1 0 1 0 0 1 41 1 0 1 0 0 1 42 1 0 1 0 1 0 42 1 0 1 0 1 0 43

Stainless Steel 316

M Weight (g) A D L D Applicable tubing (inch) 10 2.5 22 8.6 4 KQGS03-32 10-32UNF 25 18 5/32 M 2.78 12 20.9 11 4.1 KQGS03-N01S NPT1/8 A A L 2.5 22.8 13 4 KQGS07-32 10-32UNF 13 25.8 21.7 13 18.8 9.9 KQGS07-N01S 1/4 NPT1/8 4.76 Connection thread 20 20 10 KQGS07-N02S NPT1/4 H 5.56 14 30.5 26.4 17 17.2 KQGS09-N01S NPT1/8 (In case of R) 28.5 22.7 18 20.9 KQGS09-N02S 5/16 NPT1/4 D 23.3 Applicable

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

-) 20-ARP20(K) 20-ARP30(K) 20-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G46-4-l01-X3 G46-4-l02-X3 0.4 MPa Pressure gauge G46-2-l01-X3 G46-2-l02-X3 Round type Note 2) 0.2 MPa G46-7-l01-X3 G46-7-l02-X3 0.7 MPa Clean Room Compliant, Copper-free, Fluorine-free (21-) 21-ARP20(K) 21-ARP30(K) 21-ARP40(K) Model Bracket

Thermoelectric Bath

FC-3283 25 15 0 70 20 20 0 10 20 30 40 50 60 70 80 0 20 40 60 80 100 120 140 160 180 Time (minute) Time (minute) Pressure Loss in FacilityWater Circuit The values shown on the performance chart are not guaranteed, but typical.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Connection Female Thread: Rc, NPT, NPTF Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 60 3 to 5 1/4 30 to 60 8 to 12 3/8 15 to 45 14 to 16 1/2 15 to 30 20 to 22 Connection thread size Proper tightening torque [Nm] NPT, R1/8 3 to 5 NPT, R1/4 8 to 12 NPT, R3/8 15 to 20 NPT, R1/2 20 to 25 Connection Female Thread: G Chamfered area for female

VXZ

The apparent power in parentheses is for VXZ2232. 50 66(60) 20 60 57(51) 15 AC VXZ22 DC 50 93 25 60 79 20 AC VXZ23 DC JIS Symbol OUT IN 17-3-63 Applicable Fluids Check List Refer to pages 17-3-62 and -63 for models and specifications. Refer to pages 17-3-62 and -63 for models and specifications.

Process Pump

Air consumption (L/min [ANR]) SUP = 0.7 MPa 40 35 30 SUP = 0.5 MPa 25 20 SUP = 0.35 MPa Caution 15 SUP = 0.2 MPa 10 1.

5.0 MPa Pilot Operated 2/3 Port Solenoid Valve & Check Valve Series VCH

DIN terminal gasket CR 21 DIN connector 229 Series VCH40 Dimensions VCH41 (N.C.) 1 (56) 41 62 50 17 (44) G1/2 128.5 Applicable cable O.D. 6 to 12 111 1(IN) 2(OUT) 22 Hexagon width across flats 38 98 2 x G3/4 x 16.3 2 x G1 x 19.1 56 VCH42 (N.O.) 1 (56) 41 17 62 50 (44) G1/2 139 Applicable cable O.D. 6 to 12 121.5 1(IN) 2(OUT) 22 Hexagon width across flats 38 98 2 x G3/4 x 16.3 2 x G1 x 19.1

Digital Pressure Switch

(Writing time: 10,000 times, Data duration: 20 years after power off) A pressure sensor of stainless steel diaphragm is used for this switch.

KS/KX

Specifications Fluid Air 1.0 MPa 100 kPa 3.0 MPa 5 to 60C (No freezing) JIS B 0203 (Taper thread for piping), JIS B 0209, class 2 (Metric coarse thread) Maximum operating pressure Operating vacuum pressure Proof pressure Ambient and fluid temperature Thread Rotating Torque/Allowable Number of Rotations Applicable tubing O.D. 8 0.014 6.7 20 4 0.006 8.4 25 6 0.012 8.4 20 10 0.020 5 16.7 12

Speed Controller with

Metric size Inch size Air 1.5 MPa (1.05 MPa Note 1)) 1 MPa (0.7 MPa Note 1)) 0.1 MPa 5 to 60C (No freezing) Applicable cylinder bore size (mm) 2 3.2 4 6 8 10 12 1/2" 3/8" 5/16" 5/32" 1/4" 1/8" AS1002F AS2002F AS2052F AS3002F AS4002F 6, 10, 16, 20 Note) 20, 25, 32 20, 25, 32, 40 40, 50, 63 63, 80, 100 Note 2) Nylon, Soft nylon, Polyurethane Applicable tube material Note 1) In case of AS1002F

JXCx-OMT0032CN

6.1 . 20 6.2 . 20 6.3 . 21 1 - . 22 7.CN3 . 23 8.CN1IF(CONT) . 24 8.1 . 24 8.2 . 26 9.CN2TB/PC . 27 9.1 . 27 10.LED . 28 10.1 LED . 28 10.2IFLED . 28 11. . 29 11.1 . 29 11.2 . 29 11.3 . 29 11.4 . 31 12. . 32 12.1 . 32 12.2 IF(IN Data) . 38 12.3 (IN Data) . 38 12.4(OUT Data) . 40 13.

VCB

19 M5 8 24 76 46 66.5 101 66.5 68 99 VCB31 30 50 86 1/2 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101 71 68 104 22 45 90 1/4, 3/8 41 11 17 36 22.5 23 M5 8 26 84 48 74.5 103 74.5 70 107 VCB41 30 50 94 1/2 41 13.5 17 36 25 23 M5 8 26 88 48 78.5 103 78.5 70 111.5 35 60 102 3/4 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 17-2-27

AIR FILTER

DIMENSIONS Bracket Accessory Port size Maintenance space Drain Model Standard specifications M5 1/81/4 1/43/8 1/43/81/2 3/4 3/41 1 J AF10-A 25 59.9 7 12.5 25 12.5 AF20-A 40 87.6 9.8 20 25 20 AF30-A 53 115.1 14 26.7 30 35 26.7 AF40-A 70 147.1 18 35.5 38.4 40 35.5 AF40-06-A 75 149.1 20 35.5 38.4 40 35.5 AF50-A 90 220.1 24 45 30 45 AF60-A 95 234.1 24 47.5 30 47.5 Model Bracket mount dimensions