Series: 3 (JSY3000), Type: 10S (Side-Ported, Serial Interface, EX250), SI Unit: Q (DeviceNetâ„¢, Negative Common), Input Block Stations: None, Input Block Type: A (PNP Sensor Input, M12, 2 Inputs), Valve Stations: 8 Stations, P,E Port, SUP/EXH Assembly: B (Internal Pilot, Both Sides, 2 to 24 Stations), A,B Port Size: C6 (ø6 One-touch Fitting)

Series: 3 (JSY3000), Type: 10S (Side-Ported, Serial Interface, EX250), SI Unit: Q (DeviceNetâ„¢, Negative Common), Input Block Stations: None, Input Block Type: B (PNP Sensor Input, M12, 4 Inputs), Valve Stations: 8 Stations, P,E Port, SUP/EXH Assembly: B (Internal Pilot, Both Sides, 2 to 24 Stations), A,B Port Size: C6 (ø6 One-touch Fitting)

Series: 1 (JSY1000), Type: 10S (Side-Ported, Serial Interface, EX250), SI Unit: Q (DeviceNetâ„¢, Negative Common), Input Block Stations: 2 Stations, Input Block Type: C (PNP Sensor Input, M8, 4 Inputs), Valve Stations: 5 Stations, P,E Port, SUP/EXH Assembly: F (Internal Pilot, Built-in Silencer; Both Sides, 2 to 24 Stations), A,B Port Size: C4 (ø4 One-touch Fitting), Mounting: D (DIN Rail

Series: 3 (JSY3000), Type: 10S (Side-Ported, Serial Interface, EX250), SI Unit: Q (DeviceNetâ„¢, Negative Common), Input Block Stations: None, Input Block Type: A (PNP Sensor Input, M12, 2 Inputs), Valve Stations: 2 Stations, P,E Port, SUP/EXH Assembly: D (Internal Pilot, D Side, 2 to 10 Stations), A,B Port Size: C6 (ø6 One-touch Fitting), Mounting: D (DIN Rail Mounting)

Series: 3 (JSY3000), Type: 10S (Side-Ported, Serial Interface, EX250), SI Unit: Q (DeviceNetâ„¢, Negative Common), Input Block Stations: None, Input Block Type: A (PNP Sensor Input, M12, 2 Inputs), Valve Stations: 3 Stations, P,E Port, SUP/EXH Assembly: B (Internal Pilot, Both Sides, 2 to 24 Stations), A,B Port Size: C6 (ø6 One-touch Fitting), Mounting: D (DIN Rail Mounting)

Series: 3 (JSY3000), Type: 10S (Side-Ported, Serial Interface, EX250), SI Unit: Q (DeviceNetâ„¢, Negative Common), Input Block Stations: None, Input Block Type: A (PNP Sensor Input, M12, 2 Inputs), Valve Stations: 3 Stations, P,E Port, SUP/EXH Assembly: D (Internal Pilot, D Side, 2 to 10 Stations), A,B Port Size: C6 (ø6 One-touch Fitting), Mounting: D (DIN Rail Mounting)

Series: 3 (JSY3000), Type: 10S (Side-Ported, Serial Interface, EX250), SI Unit: Q (DeviceNetâ„¢, Negative Common), Input Block Stations: None, Input Block Type: A (PNP Sensor Input, M12, 2 Inputs), Valve Stations: 3 Stations, P,E Port, SUP/EXH Assembly: U (Internal Pilot, U Side, 2 to 10 Stations), A,B Port Size: C6 (ø6 One-touch Fitting), Mounting: D (DIN Rail Mounting)

Series: 5 (JSY5000), Type: 10S (Side-Ported, Serial Interface, EX250), SI Unit: Q (DeviceNetâ„¢, Negative Common), Input Block Stations: None, Input Block Type: A (PNP Sensor Input, M12, 2 Inputs), Valve Stations: 2 Stations, P,E Port, SUP/EXH Assembly: D (Internal Pilot, D Side, 2 to 10 Stations), A,B Port Size: C12 (ø12 One-touch Fitting), Mounting: D (DIN Rail Mounting)

Series: 3 (JSY3000), Type: 10S (Side-Ported, Serial Interface, EX250), SI Unit: Q (DeviceNetâ„¢, Negative Common), Input Block Stations: None, Input Block Type: A (PNP Sensor Input, M12, 2 Inputs), Valve Stations: 5 Stations, P,E Port, SUP/EXH Assembly: D (Internal Pilot, D Side, 2 to 10 Stations), A,B Port Size: C6 (ø6 One-touch Fitting)

Size/Valve Type: 7 (Size: 32A; Valve Type: N.C.), Body/Port/Orifice: Q (Body Material: CAC407; Port Size: 32A Flange, Orifice Dia.: 35), Voltage/Electrical Entry: E (230VAC; Grommet w/Surge Voltage Suppressor)

Electro-pneumatic Proportional Valve Series VEF/VEP 1

w e r t y u i o !

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

Construction 3 1 Component Parts Description Material No. q w e r t y u 4 Solenoid coil Body Fixed armature Armature Return spring Poppet Diaphragm assembly Resin Stainless Steel Stainless Steel Stainless Steel NBR NBR, Resin 2 5 6 7 4.3-5 Series VQ20/30 Dimensions/Series VQ20 In-line style/Grommet(G) VQ21A1-mGm-m Dotted line: Bracket mounting style (-F) 4.3-6 Series VQ20/30 For Dry Air,

NAME

Operation tinre @ntinuous (ShourVday) =1.Syears Clean Air for Clean Room Seruice Clean roorn Comgessed ait C Supa Mist Seoarator q/silem B/Blcrrviq air b partsdebning ODerry pcint: -58'F or less (Atnospheric p(essure), OEfficiency: Less than 100 particles 0.3 microns ol1 larger per cubic foot.

MXU

76 64.5 34 40 32 79.5 80 68.5 34 45 35 8-3-7 8 Series MXU Dimensions: MXU16 (mm) Stroke (mm) 5 10 15 20 25 30 TS Z S NS LS BS 65.5 66 52 24 24 20 65.5 66 52 24 24 20 75.5 76 62 34 35 30 75.5 76 62 34 35 30 85.5 86 72 40 45 40 90.5 91 77 40 50 45 8-3-8 9 Compact Slide Series MXU Construction MXU6 (6) MXU10 (10) MX MTS MY CY MG CX MXU16 (16) D-X With auto switch 20Data Component Parts No. q

Clean Regulator

y q 0 1000 2000 3000 4000 Flow rate L/min (ANR) Component parts Material No.

Precision Clean Regulator

2 1 Body Stainless steel 316L 2 Valve guide Stainless steel 316 ARM 3 Spacer PPS e !1 ARP 4 Bonnet PPS 5 Knob PBT IR-A i o Electroless nickel plated 6 Set nut ZDC 7 Valve spring Stainless steel 316 IR 8 Main valve Ceramics !

VCHR

9 12 Adjusting bolt Stainless steel q 13 Return spring Stainless steel @2 @3 14 Cushion Polyurethane elastomer !0 15 Poppet Polyurethane elastomer 16 Plate Steel + Electroless nickel plated @4 17 Spring Stainless steel !8 18 Guide ring Resin e 19 Guide ring Resin !

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

How to Order VFN212 02 N 5 F D Z CE marking NAMUR Interface Nil Q CE marked product Voltage Thread type 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC 7 240 VAC, 50/60 Hz Nil Rc (PT) F G (PF) N NPT Electrical entry Solenoid G Grommet E Grommet terminal T Conduit terminal D DIN terminal Nil Single solenoid D Double solenoid Manual

Electro-pneumatic Proportional Valve Series VEF/VEP

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Direct Operated Solenoid Valve Metal Seal Series VS4
10

Electrical entry q Description 01 02 03 01 02 03 01 02 03 Mounting bolt and gasket are not included. Platinum silver Body C: Conduit VS4010-CSSub-plate Platinum silver Aluminum die-casted w T: Conduit terminal VS4010-TSSpool/Sleeve Stainless steel e U: Grommet, D: DIN terminal VS4010-SReplacement Parts Part no. No.