11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16 +0.030 0 10 9.5 4 Section AA Mounting base side B D +0.030 0 Q QL depth 1.5 3 11-/22-MXP10-20 Without magnet and switch rail Max. 2.5 2-M2 x 0.4 depth 3 8 2.5 4.7 15 15 L 6-M3 x 0.5 depth 4 2-M3 x 0.5 depth 3.5 (mm) G H J K L M N Q QL S V W Z Model 8 32 52.4 20 20 21 6.5 32 14 10 44 40 60 11-/22-MXP10-10 20 50 82.4 36 36 39 7.5 50 20 20 74 65 90 11-/22-MXP10-20 102 Precision air slide table
6 #3 Magnet Return guide Resin Electroless nickel plated Rare earth !7 #4 Magnet holder End cap Resin Steel !8 #5 O-ring Stud Steel NBR Heat treatment !9 #6 Replacement Parts Contents Kit no. Bore size (mm) 6 MXY6-PS Set consists of 2 pieces of above 8 MXY8-PS !0, !
The addresses up to 32 stations ( without repeater ) or 126 stations ( with repeater ) can be set per segment.
4 2 5 A 10 x 8 3/4" x 5/8" 5 1 5 B 19 x 16 1/2" x 3/8" 5 2 6 A 12 x 10 1" x 7/8" SMC 6 1 6 B 25 x 22 3/4" x 5/8" 6 2 19 x 16 : Basic size : With reducer Note) Please select an isometric fitting with the same size as the fitting at the flow sensor.
CAUTION 184 49 Valve seat side (XGT222, 223, and 224 common) Cassette type Full MESK/XGT224 305 50 85 36 (mm) A B C D Valve type Model XGT221-32 XGT221-46236 XGT222-32 XGT222-46236 XGT223-46236 XGT224-46236 222 32 235 45 Non-cassette type 236 46 249 59 222 32 Cassette type Standard 236 46 236 46 Cassette type Half MESK !
Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base). Valve width is 7mm. 3 port solenoid valve, direct operated
(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel 304 M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel plated
Conduit terminal: VP3145-T A B DIN terminal: VP3145-D A B [105] 76 Light (For TL, TZ) 30 31.3 Max.12 G1/2 Applicable cable 6 to 12 Light position (For DL, DZ) G1/2 [196] NO NO 190.6 194 181.5 166 PE PE 26 26 83 83 32 32 36 36 80 80 [ ]: With indicator light (TL, TZ) 1310 Large Size 3 Port Solenoid Valve VP3165 Series Dimensions: VP3165 Grommet: VP3165-G A B 113 87.4 54 30 71 101 G1/2 1
6 Series IDUS/IDFS Option Specification Refer to pages 1 and 5 for "How to Order" of options.
CLR OFF Address 64 (No.1) 32 (No.2) 16 (No.3) 8 (No.4) 4 (No.5) 2 (No.6) 1 (No.7) HOLD Output is held when a communication error occurs. ON 0 OFF OFF OFF OFF OFF OFF OFF 1 OFF OFF OFF OFF OFF OFF ON : HOLD/CLR setting is made available per one point by parameter setting.
+0.030 0 10 9.5 4 Section AA B D Mounting base side +0.030 0 Q QL depth 1.5 3 11-/22-MXP10-20 Without magnet and switch rail Max. 2.5 2 x M2 x 0.4 depth 3 8 2.5 4.7 15 15 L 6 x M3 x 0.5 depth 4 2 x M3 x 0.5 depth 3.5 (mm) G H J K L M N Q QL S V W Z Model 11-/22-MXP10-10 8 32 52.4 20 20 21 6.5 32 14 10 44 40 60 11-/22-MXP10-20 20 50 82.4 36 36 39 7.5 50 20 20 74 65 90 835 MXP/MXPJ6 1122Air
Other tube sizes Tube size Number of (O.D.) connection Part No. 10 6 IN-254-52 12 6 IN-254-53 68
Trial Operation (SigmaWin+) . 29 5.1 Communications setting for PC . 29 5.2 JOG Operation . 32 5.3 Program JOG Operation . 34 6. The recommended the parameter for each actuator . 37 6.1 The recommended value of the parameter [LEF] . 37 6.2 The recommended value of the parameter [LEJ] . 38 6.3 The recommended value of the parameter [LEY] . 39 7.
Refer to the drawing below. : Factory default setting is 32. Source/PNP (negative common) Output type 32 outputs (selected from 16 or 32 outputs) Number of outputs Output No. assignment The Output number is assigned by the SI unit.
Contents Bore size (mm) Series CBG1N20-PS 20 25 32 40 CBG1N20-PS CBG1N25-PS CBG1N32-PS CBG1N40-PS Above no. @5, @6, @7, @8. And a grease pack. CBG1N Rubber bumper type CBG1N25-PS Locking at head or rod end CBG1N32-PS CBG1A20-PS 20 25 32 40 CBG1A20-PS CBG1A25-PS CBG1A32-PS CBG1A40-PS Above no. @5, @6, @7, @8, $0, $1. And a grease pack.
Designation Description 1 Tx+ Transmit Data + 2 TxTransmit Data 3 Rx+ Receive Data + 4 5 6 RxReceive Data 7 8 BUS IN: RJ45 8-pin socket No. Designation Description 1 Tx+ Transmit Data + 2 TxTransmit Data 3 Rx+ Receive Data + 4 5 6 RxReceive Data 7 8 Use only plugs conforming to FCC standards. Shielded Ethernet cable is recommended.
6 t Zinc chromated w Electroless nickel plated Black zinc chromated Accessory Accessory IN 2 Series ARJ310 Dimensions ARJ310-01 ARJ310F-01 Approx. 31 Approx. 56 Approx. 56 Approx. 35 32 22 M12 x 1 Panel fitting dimensions 12.5/Panel thickness: 4 or less Approx. 27 19 2 2 -5.5 Approx. 57.2 8.5 Approx. 82.5 15 Applicable tube O.D. 4, 6, 5/32, 1/4 Port size Rc, NPT 1/8 2 2 1 1 Pressure gauge
Valve model VCW2 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW4 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 mounting screws (for mounting bracket) are included
Bracket thickness is approx. 1.6mm Model Piping port size A B C D E F G H I J K L LFE13 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 LFE38 1 120 90 55 32 73 100 106 41 6 1.6 115 106 Model M N O P Q R S T U Bracket weight LFE13 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 Approx. 45g LFE14 48 39 4.6
([n1L]) [P1H] or [n1H] ([n1H]) (33 ) 30 No.LFE*-OMY0008 c. ()/() ( [n1AH]) ( [n1dH]) () 31 No.LFE*-OMY0008 ( ) 3 6 3 1 3 6 6 1 1 1 32 No.LFE*-OMY0008 4. 4. 4. 4. (OUT1)( ON ON ON ON OFF OFF OFF OFF ON ON ON ON OFF OFF OFF OFF 5. 5. 5. 5.