HRX-OM-W069

load current DC5V 10mA Output voltage range 0V to +10V CH1 Circulating fluid Maximum output current 10mA discharge temperature Analog output signal 1,2 CH2 Circulating fluid discharge temperature Maximum accuracy 1.0%F.S. or less CH2 Circulating fluid electric conductivity DC24V output voltage DC24V10% 200mA MAX 1 (It can not be used for inductive load.) 1 : The total load current must be 800

HRX-OM-Y120

to +10V CH1 Circulating fluid Maximum output current 10mA discharge temperature CH1 Circulating fluid Analog output signal 1,2 electric conductivity 3 CH2 Circulating fluid Maximum accuracy 1.0%F.S. or less discharge temperature CH2 Circulating fluid electric conductivity DC24V output voltage DC24V10% 200mA MAX 1 (It can not be used for inductive load.) 1 : The total load current must be 800

HRX-OM-X010

Table 7-1 Water Quality Standards for Fresh Water (Tap Water) Substance Facility water Circulating water spec. spec. pH (25 deg C) 6.5 to 8.2 6.0 to 8.0 Electrical conductivity (25 deg C) (s/cm) *Circulating fluid 1 to 500 100 to 800 0.5 to 300 Chloride ion (mgCl-/L) Max. 200 Max.50 Sulfate ion (mgSO42-/L) Max.200 Max.50 Acid consumption (pH4.8) (mgCaCO3/L) Max.100 Max.50 Total hardness (

HEC_W-E

Table 3-1 Quality standard for fresh water (tap water) Item Standard value pH25oC 6.5 to 8.2 Electric conductivity (25oC) (S/cm) 100 to 800 Chloride ion (mgCl-/L) 200 or less 2-/L) 200 or less Sulphate ion (mgSO4 Acid consumption (pH4.8) (mgCaCO3/L) 100 or less Total hardness (mgCaCO3/L) 200 or less Calcium hardness (mgCaCO3/L) 150 or less Quality item Ion silica (mgSiO2/L) 50 or less Iron

A-HEC-OM-J004

Table 4-1 Quality standard for fresh water (tap water) Item Standard value pH25oC 6.5 to 8.2 Electric conductivity (25oC) (s/cm) 100 to 800 Chloride ion (mgCl-/L) 200 or less 2-/L) 200 or less Sulphate ion (mgSO4 Acid consumption (pH4.8) (mgCaCO3/L) 100 or less Total hardness (mgCaCO3/L) 200 or less Calcium hardness (mgCaCO3/L) 150 or less Quality item Ion silica (mgSiO2/L) 50 or less Iron

XLDV Series

Specifications Model XLDV-25 XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100 XLDV-160 Flange (valve) size 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 Operating pressure Pa Atmospheric pressure to 1 x 10-6 Main pumping 14 45 80 160 200 300 800 Conductance l/s Note 1 Initial pumping 0.53 28 2.511 48 418 6.531.5 6.531.5 Internal 1.3

XLGR Series

Fluid Vacuum of inert gas Ambient temperature: 20 oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa Atmospheric pressure to 1 x 10-5 Main exhaust valve 200 300 800 Conductance l/s Note 1 Bypass valve MAX31.5Viscosity / Theoretical value Internal 1.3 x 10-9 for the standard material (FKM) at ambient temperature, excluding gas permeation Leakage Pam3/s External 1.3 x 10-

7ND9071en

Device needs to be rebooted after change 400 16 5 5.5 9.5 (14") 5 9.5 450 18 6 7.5 (16") 500 20 6 4.5 600 24 5.5 650 26 7 700 28 7 750 30 6 800 32 900 36 5.5 1) Seat supported 2) Trunnion 3) Soft seated R-valve 4) Low Cv Finetrol 5.5.12 Language selection, LANG Select between three languages EnG, GEr or FrE using the + and keys. To conclude press the ?

HRX-OM-W032

Table 7-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulphate ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70 or

RS2H-OM0045P

. :0.1 D 50 : : mmax 1 RS2H mmax : mmax (Kg) =0.1 =0.2 NO 50 400 280 mAm max 63 530 365 YES 80 800 565 V m mmax=0.1 200<400 mP6 -1-* -1-1V=20m/minm=278(Kg) 200278 NO mA m YES FA=mAg FA 2000.19.8 196(N) FAmAg(N) (g: :9.8m/S 2) P F -2-1P=0.5(MPaF=766(N)766(N) 196776 P7 -2-1 NO FA F RS2H50 YES v [m/min] m [kg] -1 5 - -1-1.(RS2H50) -1-2.(RS2H63 -1-3.

MHS

32DA MHSH3-40DA MHSH3-50DA MHSH3-63DA MHSH3-80DA mm 12 20 25 32 40 MPa 0.20.6 0.10.6 -1060 c.p.m. 60 30 mm 5 5 10 10 15 N 1 45 130 204 335 524 g 530 770 1,330 2,300 4,000 1) 0.5MPa MHSH3-32DB MHSH3-40DB MHSH3-50 DB MHSH3-63 DB MHSH3-80 DB mm 5 5 10 10 15 N 6~10 11~15 20~25 29~34 49~59 g 500 740 1,290 2,250 4,000 g 32 40 50 63 80 MHSHJ3-D 430 600 1,020 1,710 3,040 MHSHJ3-DA 550 800

LEJ-OM004xx

. *2 (4) S troke [mm] Standard Produced upon receipt of order 300 200 400 500 600 700 800 900 1000 1200 1500 Str o k e (m m ) Ty pe LEJS40 LEJS63 *2Strok es other than standard and produced up o n receipt o f order are available as special orders, so plea s e contact with our com pany . (9) Driver type *4 (7) Cable type *4 *5 *6 Com patible driv er P owe r supply v oltage [V ] Without cable

DOC1023126

Specification Table Battery-less absolute encoder type (Step motor 24 VDC) Model EQY25 EQY32 Storoke [mm] 30 to 400 30 to 500 Work load[kg] *1 Horizontal 8 26 40 70 30 50 90 100 Vertical 2 8 16 30 3 13 26 46 Pushing force [N] Note2),3),4) 36 to 76 63 to 122 126 to 238 232 to 452 50 to 118 80 to 189 156 to 370 296 to 707 to 300 30 to 900 18 to 700 9 to 450 5 to 225 30 to 900 24 to 800 12 to

Electric Actuator Slide table ／ High Precision Type High performance Battery-less absolute encoder

. -3- 1Specification High performance Battery-less absolute encoder LESYH*(D,R,L)G* LESYH LESYH LESYH LESYH LESYH LESYH LESYH Model 8*GA 8*GB 8*GC 16*GA 16*GB 25*GA 25*GB Stroke[mm] 50,75 50,100 50,100,150 Max.work load[kg] 2 8 12 Horizontal Vertical 1.5 3 6 6 12 10 20 note1)note3) Pushing Force 18~36 37~74 69~138 70~140 135~270 197~395 382~765 note1)note3) 20~800 10~400 5~200 20800 10400

High performance type Step Motor Controller (Servo/24 VDC)

controller are as follows Item Specifications Compatible motor Step Motor (Servo / 24 VDC) Power voltage: 24 VDC +/-10% Max. current consumption: 3A (Peak 5A) *2) Power supply *1) (for both of motor drive power control power, stop, lock brake release) Parallel input 11 inputs (photo-coupler isolation) Parallel output 13 outputs (photo-coupler isolation) Compatible encoder Incremental A/B phase (800

JXCx-OMY0008

Current consumption Compatible encoder Incremental A/B phase (800 pulse/rotation) Battery-less absolute encoder ( 4096 pulses/rotation) LED Details L/A1 Link/Activity1 L/A2 Link/Activity2 LED display PWR Power supply ALM Alarm status RUN EtherCAT communication status. ERR EtherCAT communication error status.

JXCx-OMY0006

Current consumption Compatible encoder Incremental A/B phase (800 pulse/rotation) Battery-less absolute encoder ( 4096 pulses/rotation) LED Details L/A1 Link/Act 1 L/A2 Link/Act 2 LED display PWR Power supply ALM Alarm status MS Controller status NS Communication status Locking With unlocking terminal Cable length Actuator cable: 20 m or less Cooling method Air-cooling type Operating temperature

JXCx-OMY0004

Current consumption Compatible encoder Incremental A/B phase (800 pulse/rotation) Battery-less absolute encoder ( 4096 pulses/rotation) LED Details PWR Power supply LED display ALM Alarm status SF Controller status BF PROFINET communication status.

JXCx-OMX0009

Item Specifications Compatible motor Step motor (servo 24 VDC) Power supply voltage: 24 VDC +/-10% Max. current consumption: 3A (Peak 5A) *3) (for both of motor drive power control power, stop, lock brake release) Power supply *1) *2) Compatible encoder Battery-less absolute encoder (resolution: 4096 pulses/rotation) Incremental A/B phase (800 pulse / rotaion) Serial communication RS485 Memory

JXCx-OMT0005CN

(DC24V) DC24V10% 100mA A/B 800 / EEPROM LED PWR LED ALM MS NS 20m 040 90%RH ) 50MDC500V 210g() 230g(DIN ) DeviceNet DeviceNet CT-27 Volume1Common Insustrial Protocol(CIP) Edition3.14 Volume3DeviceNet Adaption of CIP Edition 1.13 063 / Data Rate 125/250/500 kbps / Group 2 Only Server EDS 4122036Byte 4 Byte 41020Byte 4 Byte ID 07hSMC Corporation 43h(Generic Device) DDh