IDX-OM-W094

. 10-1 10.3 . 10-2 10.4 . 10-2 11 R . 11-1 11.1 . 11-1 11.2 . 11-1 11.3 . 11-2 12 T . 12-1 12.1 . 12-1 12.2 . 12-1 12.3 . 12-2 12.4 . 12-3 12.5 . 12-4 13 V . 13-1 13.1 . 13-1 13.2 . 13-1 13.3 . 13-2 14 . 14-1 14.1 . 14-1 IDFA60/70/80/90 Series IDX-OM-W094 1 1.1 z z z z z z z z z () 6.2 z 1.1.1 3 IDFA60/70/80/90 Series 1-1 IDX-OM-W094 1.2 6 1.2.1 1.2.2 50

Clean Exhaust Filter

A One-touch fittings KP series B Dimensions (mm) Model A B C SFE4G 6 68.5 16.5 SFE5H 8 79 20.5 SFE7J 10 89 24 Bracket SFE-BR3 14 5 3.4 (15.5) 12.5 5.4 5.4 14 24 (20) SFE-BR4/5/7 B C (J) H D (F) G A E E Dimensions (mm) Model A B C D E F G H J SFE-BR4 30 16 7 4.5 7.5 (24.5) 17 15.5 (19.5) SFE-BR5 30 10 8.2 4.5 8.1 (29) 20 18 (23) SFE-BR7 34 14 7.35 4.5 9.8 (35) 24 20 (27.3) ( ): Reference dimensions

l

With auto switch Basic/CS1BQ (mm) Bore (mm) 125 140 160 Stroke range (mm) S A H AL ZZ lB lC D E F G J K KA M MM N P 1/ 2 to 1000 98 50 110 47 235 145 115 36 90 43 16 M14 X 1.5 15 31 27 M30 X 1.5 35 1/ 2 to 1000 98 50 110 47 235 161 128 36 90 43 16 M14 X 1.5 15 31 27 M30 X 1.5 35 3/ 4 256.5 to 1200 106 56 120 53 182 144 40 90 43 18.5 M16 X 1.5 17 36 30.5 M36 X 1.5 39 CS1BQ125SCS1125, #1 CS1BQ140SCS1140

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel 304 M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel plated

KK/KK13

/I.D. mm 8/5 9/6 10/6.5 12/8 12.5/8.5 16/11 Symbol 01 02 03 04 06 Symbol 50 60 65 80 85 110 Symbol 04 06 08 10 12 16 Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 Tubing O.D. mm 4 6 8 10 12 16 Construction Description Material Plug Description Material Socket Note Note Electroless nickel plated No. 1 14 15 No. 1 2 3 4 5 6 7

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

VFRA3000

1 5 Port Air Operated Valve Series VFRA3000 How to Order SA 02 VFRA3 11 2 VA SA Thread type (Including pilot port) Function VA Nil Rc 2 position single 1 2 3 4 3 position exhaust center F N T 2 position double G NPT NPTF 3 position closed center VM Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258

2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30

Blue DC() -26 Analog output type 1 to 5V (2.5% F .S.) Output impedance: 1k Bring the pressure back to atmospheric pressure and try using the zero out function. Residual pressure error Brown DC(+) Black OUT (Analog output) + 12 to 24VDC Load Blue DC() Supply pressure exceeds the maximum regulating pressure. -28 Analog output type 4 to 20mA (2.5% F .S.)

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

S Couplers Series KK/KK13

/I.D. mm 8/5 9/6 10/6.5 12/8 12.5/8.5 16/11 Symbol 01 02 03 04 06 Symbol 50 60 65 80 85 110 Symbol 04 06 08 10 12 16 Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 Tubing O.D. mm 4 6 8 10 12 16 Construction Description Material Plug Description Material Socket Note Note Electroless nickel plated No. 1 14 15 No. 1 2 3 4 5 6 7

The ZSE40A(F) is also CE, UL/CSA and RoHS compliant.High precision digital pressure switch w/2-color display , IP65 and RoHS compliant , Capable of copying up to 10 switches simultaneously , 3-step setting , Space saving design w/several piping and mounting variations, SWITCH ASSEMBLY, VACUUM SERIES, ZSE40/50/60 VACUUM SWITCH, JC, ZSE40/50/60 1/8 PORTED, 0.17196 lb

ZL3-OM00801

N06 NPT3/4 5/16(inch) N04 2xNPT1/2 6) 5 DC24V *1G JIS B0202 ISO1603 ISO1179 8) Z 7 L L 0.3(m) 11) A NPN LO B PNP M M 0.3(m) MO 12) 9) M SI (kPa) D P (:psi) E 10) 14 GN (G) B G *7ZL212 27mm ZL212 (2 /1 , 4 ) E (2 ) F (2 ) V (1 ) 13 G 2m) W (2m) 5 No.ZL3-OM00801-A 2. 2.1 (1/P) (2/V) ZL3 ZL6 (3/E) // / (G) (2/V) 2.2 ZL6 1 ZL6 (ZL6-SC1-A) 2), 6 No.ZL3-OM00801-A 3. 3.1

IDX-OM-U010

Coefficient factors Inlet air temperature (oC) 35 40 45 50 55 60 65 70 75 80 1.58 1.46 1.09 1.00 0.79 0.64 0.55 0.51 0.49 0.47 Inlet air pressure (MPa) 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 to 1.6 0.67 0.79 0.88 0.91 1.00 1.02 1.04 1.09 Ambient temperature (oC) 20 25 30 35 40 45 1.19 1.13 1.06 1.00 0.90 0.77 Calculation example: The air flow capacity when the dew point of IDFC60 is set to 10 oC

The ZSE40A(F) is also CE, UL/CSA and RoHS compliant.High precision digital pressure switch w/2-color display , IP65 and RoHS compliant , Capable of copying up to 10 switches simultaneously , 3-step setting , Space saving design w/several piping and mounting variations, SWITCH ASSEMBLY, VACUUM SERIES, ZSE40/50/60 VACUUM SWITCH, JD, ZSE40/50/60 1/8 PORTED, 0.29252 lb

The ZSE40A(F) is also CE, UL/CSA and RoHS compliant.High precision digital pressure switch w/2-color display , IP65 and RoHS compliant , Capable of copying up to 10 switches simultaneously , 3-step setting , Space saving design w/several piping and mounting variations, SWITCH, VACUUM SERIES, ZSE40/50/60 VACUUM SWITCH, JD, ZSE40/50/60 1/8 PORTED, 0.29252 lb

The ZSE40A(F) is also CE, UL/CSA and RoHS compliant.High precision digital pressure switch w/2-color display , IP65 and RoHS compliant , Capable of copying up to 10 switches simultaneously , 3-step setting , Space saving design w/several piping and mounting variations, VACUUM SWITCH, VACUUM SERIES, ZSE40/50/60 VACUUM SWITCH, JD, ZSE40/50/60 1/8 PORTED, 0.2332 lb

The ZSE40A(F) is also CE, UL/CSA and RoHS compliant.High precision digital pressure switch w/2-color display , IP65 and RoHS compliant , Capable of copying up to 10 switches simultaneously , 3-step setting , Space saving design w/several piping and mounting variations, VACUUM SWITCH, HIGH PRECI *LQA, VACUUM SERIES, ZSE40/50/60 VACUUM SWITCH, 1C, ZSE40/50/60 OTHER SIZE RATING, .44000

The ZSE40A(F) is also CE, UL/CSA and RoHS compliant.High precision digital pressure switch w/2-color display , IP65 and RoHS compliant , Capable of copying up to 10 switches simultaneously , 3-step setting , Space saving design w/several piping and mounting variations, VACUUM SWITCH, HIGH PRECISION, VACUUM SERIES, ZSE40/50/60 VACUUM SWITCH, JD, ZSE40/50/60 1/8 PORTED, 0.264 lb

The ZSE40A(F) is also CE, UL/CSA and RoHS compliant.High precision digital pressure switch w/2-color display , IP65 and RoHS compliant , Capable of copying up to 10 switches simultaneously , 3-step setting , Space saving design w/several piping and mounting variations, VACUUM SWITCH, HIGH PRECISION, VACUUM SERIES, ZSE40/50/60 VACUUM SWITCH, 1X, ZSE40/50/60 OTHER SIZE RATING, 0.24967

The ZSE40A(F) is also CE, UL/CSA and RoHS compliant.High precision digital pressure switch w/2-color display , IP65 and RoHS compliant , Capable of copying up to 10 switches simultaneously , 3-step setting , Space saving design w/several piping and mounting variations, VACUUM SWITCH *LQA, VACUUM SERIES, ZSE40/50/60 VACUUM SWITCH, JC, ZSE40/50/60 1/8 PORTED, 0.3872 lb