Direct Operated Precision Regulator Modular Style Series ARP3000 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ARX21-01 ARX21-02 0.35 0.35 IR 0.30 0.30 Outlet pressure (MPa) Outlet pressure (MPa) VEX 0.25 0.25 0.20 0.20 AMR 0.15 0.15 ITV 0.10 0.10 IC 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 VBA Flow rate (

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

IF30-06 50 44 3/4 Middle 0.85 to 2.36 9 18 IS 60 53 3/4 Short 1.04 to 2.83 11 22 60 55 1 Short 0.56 to 1.67 10 20 ZSM 100 90 1 1/4 Short 0.57 to 1.67 17 34 PF2 160 140 1 1/2 Short 0.63 to 1.95 26 52 140 125 2 Middle 0.34 to 1.06 23 45 IF IF31-10 280 250 2 1/2 Middle 0.41 to 1.29 45 90 Data 250 220 3 Middle 0.26 to 0.81 40 80 550 480 4 Long 0.33 to 1.05 85 170 Long 1,000 870 5 0.37 to 1.24 150

LVQ

/8) N M C A B D (mm) LVQ0-S Dimensions (N.C. valve) A B C D E F G H J K L M N P Q R Model LVQ20-S LVQ30-S LVQ40-S LVQ50-S LVQ60-S 25.5 46 31.5 58 33.6 56.5 12 77 21.8 37 5 7 15 31.3 21 25.3 23.5 47 29.5 59 45.4 77 16.5 95 32 50 6 7 20 37.2 25 31.2 23.5 47 29.5 59 45.4 82.5 22 109 37.5 55.5 6 7 20 37.2 25 31.2 35 70 41 82 75 127 25 141 50.2 78.2 10 7 20 50.8 38.5 45 35 70 41 82 75 137 32 150

VCA

pressure (MPa) 2.0 Body material Al Seal material HNBR Valve specifications Ambient temperature (C) 20 to 60 Fluid temperature (C) 10 to 60 (No freezing) VC Enclosure Dusttight, low jetproof (equivalent to IP65) VDW Environment Location without corrosive or explosive gases Valve leakage cm3/min (ANR) 0.2 or less VQ Mounting orientation Unrestricted (2) Vibration/Impact resistance (m/s2) 30/150

VCL

Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com C E A (U) VX3 D G C B VXA L1 L2 L3 16 VN LVC D side U side Stations 1 2 3 4 5 n LVA LVH LVD LVQ 21 5.5 16 OUT port n-1/4 n-1/8 : Thread type LQ H H P = J (Pitch) 2 LVN L Dimension (mm) TI/ TIL n (stations) Model Dimensions 3 5 6 7 8 9 10 2 4 PA L1 103.5 138 172.5 207 241.5 276 310.5 345 69 VV2CL2 L2 115.5 150

VCS

Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com E C D G VX3 Q SMC SMC C A B VXA 16 L1 L2 L3 VN LVC 1 Stations D side U side 2 3 4 5 n LVA LVH LVD LVQ 21 5.5 LQ H H P = J 2 N-1/4 N-1/8 : Thread type LVN (pitch) TI/ TIL L Dimension (mm) PA n (stations) Model Dimensions 2 3 4 5 6 7 8 9 10 PAX L1 69 103.5 138 172.5 207 241.5 276 310.5 345 VV2CS2 L2 81 115.5 150

VNC

Type Port size: 65F, 80F Electrical entry hole: G1/2 Manual override (Non-locking) 4 x 2-18 mouting hole (80F: 8 x 2-18) Model Applicable flange 65 80 H F E D C B A 1 4 1 4 405.5 441.5 VNC81 -65F VNC91 -80F 65 80 140 150 204 235 175 185 305.5 341.5 210 240 17-4-26 7 Series VNC Coolant Valve: Air Operated/External Pilot Solenoid Precautions Be sure to read before handling.

VVXA21/22

0.5 1.0 2.2 230 150 VXA3135-00 VXA3235-00 VXA3245-00 3 230 4 Note) Add the V type (VXA31) 80 g, (VXA32) 130 g Refer to Glossary on page 17-3-15 for details of max. operating pressure differential and max. system pressure.

VXP21/22/23

Conduit: C DIN terminal: D VXA VN LVC LVA LVH Cable 6 to 12 LVD LVQ LQ LVN TI/ TIL Conduit terminal: T PA PAX PB Model Grommet Electrical entry Conduit Conduit terminal DIN terminal Q N M N M N M M N Q L K J H F E D C B A P Applicable thread Pc Normally open Normally closed VXP2270 VXP2380 VXP2390 VXP2272 1 43.5 46.5 52 51.5 54.5 59 53 60 71 67.5 72 81 48 50 50 95 97 97 62 64 64 125 132 150

SMC Electronic Switch Series Variations

ZSE4 ISE4 ZSE5 ISE5 Detection nozzle: 1.0 Piping: 6 X 4 tubing Supply pressure: 0.1MPa Detection distance: 100m ZSE6 ISE6 Detection nozzle: 1.0 Piping: 6 X 4 tubing 5m Supply pressure: 0.2MPa ZSE3 ISE3 4.0 2.5 Set value 50m 300m 100m 200m GS 2.0 3.5 PS Response time (sec) 1.5 3.0 ISA 1.0 2.5 ZSE1 ISE1 Response time (sec) Piping length 0.5 ZSE2 ISE2 2.0 10m 8m ZSP 50 150 0 1.5 100 200 250

Vacuum Equipment

ZFB 13-10-4 IN/OUT straight piping One-touch fittings for easy installation and removal Lightweight molded resin parts Cartridge type element replacement Air Suction Filter In-line Type with One-touch Fittings Series ZFC 13-10-7 13-1-2 2 A variety of models accommodate a wide range of applications Pad type: Flat, Flat with ribs, Deep, Bellows Pad diameter: 2 to 125, Made to Order = 150

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Current output 4~20mA2.5% F.S. or less Repeatability 0.2% F.S. 2digit or less 0.2% F.S. 1digit or less response time 2.5ms or less (With anti-chattering function:20ms, 160ms and 640ms selection) Hysteresis Hysteresis mode and window comparator mode selection Port size R1/8 (with M5 female) Enclosure IP40 43 Vacuum Regulator Series IRV 60 l/min (ANR) Note) 100 l/min (ANR) Note) 150 l/min (

Vacuum System Peripherals:

Voltage type 0 to 5 VDC Voltage type 0 to 10 VDC Preset input 20 Output pressure (kPa) Nil B Without bracket Flat bracket L-bracket 30 40 C Option 50 Monitor output Thread type Port size Option 60 2 1/4 0 Without (In the case of preset input) Analog output 1 to 5 VDC Switch output/NPN output Switch output/PNP output Analog output 4 to 20 mA DC 70 Nil Rc NPT NPTF G 1 80 N 2 T 90 3 50 100 150

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

0.5 MPa Max. oparating pressure 7.2mm2 (Cv0.4/3) C6 C10 14.4mm2(Cv0.8/4.3) Effective area (Cv/Effective orifice) 9mm2 (Cv0.5/3.4) C8 C12 17.5 mm2(Cv1/4.8) 13.8 6 Body orifice Valve Solenoid Response time (1) 20ms or less 5ms or less 30cps 100cps Max.oparating frequency (2) 10 to 50 C Ambient and fluid temperature VQ20 Not required Lubrication Locking style (Slotted) (3) Manual override 150

VCA

2.0 Body material Al Valve specifications Coil specifications Seal material HNBR Ambient temperature C 20 to 60 Fluid temperature C 10 to 60 (with no freezing) Enclosure Dust proof, Splash proof (equivalent to IP65) Environment Location without corrosive or explosive gases Valve leakage cm/ min (ANR) 0.2 or less Mounting orientation Unrestricted Vibration/Impact resistance m/s Note 2) 30/150

Series VCS

Seal material PTFE (FKM) Ambient temperature 20 to 100C (-4 to 212F) 184C (363F) or less (PTFE), 120C (248F) or less (FKM) Note 1) Fluid temperature Enclosure Dust proof, Splash proof (equivalent to IP65) Environment Location without corrosive or explosive gases Valve leakage cm/ min 300 (PTFE), 0.1 (FKM) with air Mounting orientation Unrestricted Vibration/Impact resistance m/s Note 2) 30/150

VCW

W (44) Z (X) (V) T R (Y) T 25 IN port 2-3/8 l=280 l=300 2.5 (N) E A (U) S Q D G C C B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 16 OUT port n-1/4 n-1/8 H H P=J (Pitch) 2 : Thread type L dimensions (mm) n (stations) Model Dimension 2 3 4 6 9 7 5 8 10 L1 69 103.5 138 207 310.5 241.5 172.5 276 345 VV2CW2 L2 81 115.5 150 219 322.5 253.5 184.5 288 357 L3 93 127.5 162 231 334.5 265.5

VQ

pressure 0.28mm2 (Cv 0.016) 0.14mm2 (Cv 0.008) 1 2 SY Effective area 2 3 0.36mm2 (Cv 0.02 ) 0.20mm2 (Cv 0.011) Response time (1) ON: 3.5ms, OFF: 2ms ON: 3.5ms, OFF: 2.5ms SYJ Valve Solenoid Valve Solenoid 10 to 50C (2) Ambient and fluid temperature VK Not required Lubrication Non-locking push/Locking slotted (3) Manual override VZ Free Mounting operation VT Shock/Vibration resistance (4) 150

VQ4000

Dust-tight, Jet-proof Enclosure: Enclosure: Optional IP65 rating Optional IP65 rating Cylinder operation speed Cylinder bore size mm Valve width mm Cv Rubber seal (Metal seal) Cylinder speed mm/s Individual wiring style 40 50 63 80 100 125 140 150 kit (Connector) C 300 24.5 2.2 (2.0) 450 600 750 Pressure: 0.5MPa, Load rate: 50% Note) Cylinder speed varies according to piping construction

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

Pressure: 0.5MPa Pressure: 0.5MPa speed Effective area Load ratio: 50% Load ratio: 50% (mm/s) mm2 Cylinder stroke: 60mm Cylinder stroke: 300mm (Cv) 6 10 16 20 25 32 40 150 300 VQD1151U M5 X 0.8 (Large flow 1.5 450 capacity) (0.08) 600 Characteristic values mentioned in the catalog are typical values and are not to be guaranteed. 750 1.13-1 Series VQD1000 Precautions Be sure to read before