Air Slide Table Series MXJ

6 !8 q w !0 MXH o MXU MXS u MXQ i MXF !1 MXW @2 @1 @4 @3 !7 MXJ e t !5 @7 @6 @8 @5 With stroke adjuster MXP Axial piping type MXY MTS !2 Without stroke adjuster. With adjuster on extension end y Description No. Material Component Parts With Magnet, Rail Note Description No.

Miniature Guide Rod Cylinder Series MGJ

6 w i !4 !3 y u r !1 q t !2 !5 e !1 No.

CEx-OMQ0011

. 2. 2. 2. 50% 50% 50% 50% ( ( ( ( 6 6 6 6 ) ) ) ) 1. 1. 1. 1. () 2. 2. 2. 2. 3. 3. 3. 3. 3. 3. 3. 3. 4. 4. 4. 4

IDX-OM-V022

Troubleshooting . 6-1 6.1 TROUBLESHOOTING . 6-1 6.2 RESET THE THERMAL RELAY AND HIGH PRESSURE SWITCH. 6-4 IDF60/70/80/90 Series IDX-OM-V022 Contents Chapter 7 Documents . 7-1 7.1 SPECIFICATIONS . 7-1 7.2 REFRIGERANT AND GWP VALUE . 7-2 7.3 DIMENSIONS . 7-3 7.4 ELECTRIC CIRCUIT . 7-4 7.5 AIR/ REFRIGERANT CIRCUIT . 7-6 Chapter 8 Option A . 8-1 8.1 SAFETY INSTRUCTIONS FOR USE . 8-1 8.2 SPECIFICATIONS

IDX-OM-V024

Read carefully the Chapter 6 Troubleshooting before taking actions. Do not start the product in any trouble.

IDX-OM-U010

Read carefully the Chapter 6 Troubleshooting before taking actions. Do not start the product in any trouble.

IDX-OM-V020

Read carefully the Chapter 6 Troubleshooting before taking actions. Do not start the product in any trouble.

FILTER REGULATOR

S T U AW20-B 30 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 AW30-B 41 40 45.8 6.5 8 53 2.3 31.1 38.5 19 7 AW40-B 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 AW40-06-B 50 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 AW60-B 70 66 65.8 11 13 90 3.2 Dimension:B of auto-drain and optional bowl assembly Optional D C Standard 8 6 2 6 8 C 6C J 2J 6J 8J CJ 6CJ W 6W 2 6 C 6C 2 8 AW20-B 87.4 87.6 87.6 87.6 91.4 93.9

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

6 r t !3 w q e !5 !0 !1 !

Low Profile Slide Table Series MXF

6 t !3 !4 !2 r w e !0 o !9 !8 i !5 u !7 q !

E-P HYREG

0.7 MPa) Note 6) The supply pressure must be under the maximum operating pressure.

In-line Air Filter

) 11.2 Applicable tubing O.D. (3.2, 4, 1/8", 5/32") IN 18.2 8.5 33 2 x Mounting hole for M3 countersunk head screw 10 60.5 11.5 17.5 25 18 ZFC5 (4, 6, 5/32", 1/4") 19 Applicable tubing O.D. (4, 6, 5/32", 1/4") IN 33.4 20 30 18 53.9 23 4.5 6.4 15.7 13.6 24.6 6 ZFC Series Dimensions ZFC7 (6, 8, 1/4", 5/16") 23.6 Applicable tubing O.D. (6, 8, 1/4", 5/16") IN 39.8 24 34 20 68.3 27.3 4.5 8.7 19.3

MXU

M4 x 0.7 2.5 6 Axial Mounting (Body tapped) l Model MXU6 MXU10 MXU16 Bolt Maximum tightening torque (Nm) M3 x 0.5 1.1 5 M4 x 0.7 2.5 6 M4 x 0.7 2.5 6 Operating Direction with Different Pressure Ports OUT port (2 on both sides) OUT port l Model MXU6 MXU10 MXU16 Bolt Maximum tightening torque (Nm) M3 x 0.5 1.1 4.8 M4 x 0.7 2.5 6 IN port OUT port (2 on both sides) M4 x 0.7 2.5 6 8-3-5 6 Series

MXU

M4 x 0.7 2.5 6 Axial Mounting (Body tapped) l Model MXU6 MXU10 MXU16 Bolt Maximum tightening torque (Nm) M3 x 0.5 1.1 5 M4 x 0.7 2.5 6 M4 x 0.7 2.5 6 Operating Direction with Different Pressure Ports OUT port (2 on both sides) OUT port l Model MXU6 MXU10 MXU16 Bolt Maximum tightening torque (Nm) M3 x 0.5 1.1 4.8 M4 x 0.7 2.5 6 IN port OUT port (2 on both sides) M4 x 0.7 2.5 6 8-3-5 6 Series

3 Port Solenoid Valve

Rated voltage For DC 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC B: Locking slotted For AC (50/60 Hz) 1 2 3 4 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] Electrical entry 24 V, 12 V, 6 V, 5 V, 3 VDC/100 V, 110 V, 200 V, 220 VAC Grommet L plug connector M plug connector Indicator light and surge voltage suppressor G: 300 mm lead wire L: With 300 mm lead wire M: With 300 mm lead wire

In-line Air Filter

Unlocked state Locked state Procedure 2 Rotating Procedure 7 Procedure 3 Product no. display Procedure 6 Case Element Procedure 4 Procedure 5 Cover Protrusion on the cover 3 In-line Air Filter Series ZFC Dimensions ZFC5 (4, 6) 19 Applicable tubing O.D. (4, 6) IN 33.4 20 30 18 53.9 23 4.5 4.5 4.5 6.4 15.7 13.5 24.7 23.6 ZFC7 (6, 8, 1/4", 5/16") Applicable tubing O.D. (6, 8, 1/4", 5/16") IN

IDX-OM-W093

(REFRIGERANT) IDF60-20) W R 0001 (2018 4 ) W R 0001 2018 2019 2020 2021 W X y Z 1 2 3 4 o P Q R o 1 Z 12 A Z IDF60/70/80/90 Series 1-5 IDX-OM-W093 1.3 HFC 1-5 IDF60/70/80/90 Series 1-6 IDX-OM-W093 1.4 / 1 1.5 () IDF60/70/80/90 Series 1-7 IDX-OM-W093 IDF60/70/80/90 Series 1-8 IDX-OM-W093 2 2.1 IN OUT (ONOFF ) 6-4 6-4 IDF60,70,80,90-20 IDF60,70,80,90-30 AC200V AC200V L1 L2

Fluoropolymer Piping Equipment

Page 4 6 8 10 12 19 1/8" 3/16" 1/4" 3/8" 1/2" Material: Super PFA LQHB LQHB TL TIL TL TIL TL Metric Size TLM TILM TLM TILM P.948 TD TID TD TID TIL Inch Size TH TIH TH TIH Material: PFA 2, 3, 4, 6, 8, 10, 12, 16, 19, 25 TLM Metric Size From page 949 1/8", 3/16", 1/4", 3/8", 1/2", 3/4" 1", 1 1/4" TILM Inch Size 4 6 8 10 12 1/8" 3/16" 1/4" 3/8" 1/2" 4 6 8 10 12 1/8" 3/16" 1/4" 3/8" 1/2" 3/4"

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

1 q i !2 e !

Compressed Air Preparation Filter

Inlet pressure 0.3 MPa 6 4 6 Inlet pressure 0.5 MPa Inlet pressure 0.5 MPa Inlet pressure 0.5 MPa 4 4 2 2 2 Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa 0 0 0 0 5 6 7 8 1 2 3 4 0 2 4 6 8 1 3 5 7 9 10 12 14 11 13 15 16 2 1 3 4 5 6 7 8 9 10 11 12 0 Air flow rate [m3/min (ANR)] Air flow rate [m3/min (ANR)] Air flow rate [m3/min (ANR)] 7 Compressed Air Preparation Filter