SMC Corporation of America
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absorbers Intemal shock absorbers ' M S O P / B 1 , 2 . 3 & 7 o n y .

Metal bowl with level gauge With bowl guard Nylon bowl with bowl guard Nil 1 10 11 2 6 8 C 6C Note 3) Note 3) Note 3) Note 3) Note 3) Note 3) Note 3) Note 3) Note 3) Note 3) Note 3) Note 3) a Bowl Note 2) Semi-standard + Without drain cock With drain cock Drain cock with barb fitting: For 6 x 4 nylon tube b Nil 3 3W Lubricant exhaust port + Nil R Flow direction Flow direction: Left to right

A B Effective orifice(mm2 Weight (g) ) M-5ALN-4 M-5ALU-3, -4 C D M-5ALN-4 M-5ALN-6 M-5ALU-3 M-5ALU-4 M-5ALU-6 1.8 2.5 1.6 1.8 2.5 5 7 4.5 5 7 1.4 2.4 1.1 1.4 2.4 9 11 8.5 9.3 11.3 13 15 12.5 13.3 15.3 4.0 4.4 4.0 4.1 4.5 M-5ALN-6 M-5ALU-6 Barb elbow for nylon tube: M-5ALHN-4, -6 Barb elbow for soft tube: M-5ALHU-3, -4, -6 C D Part No.

Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ The auto switch is shipped together, but not assembled.

FE 1057 Hz0.75 mm p-p 2 57150 Hz49 m/s XYZ 2 ( 2 XYZ 3 () 147 m/s CE UL(CSA)RoHS 300 g 1 -25No.EX-OMS0026CN -26No.EX-OMS0026CN EX600-ED D DIN 2 DIN (SY ) 2 M12(5 ) 3 DIN (SY ) 3 7/8 (5 ) EX600-ED2EX600-ED3No. 1 / 2 3 DIN DIN 4 FE 5 () -27No.EX-OMS0026CN (1)EX600-ED21 24 V() 2 0 V() 3 24 V() 4 0 V() 5 FE (2)EX600-ED31 0 V() 2 0 V() 3 FE 4 24 V() 5 24 V() 2 SI IP67 -28No.EX-OMS0026CN

wire CL Connector type, with 3 m lead wire CN Connector type, without connector Nil Grommet type, with 0.5 m lead wire Diaphragm: ZSM1 05 07 0.5 mm 0.7 mm Solid state: ZSE1 10 1.0 mm 13 1.3 mm Body style Symbol Valve Application L Grommet type, with 3 m lead wire 1 3 For single unit With valve Vacuum switch model For manifold, common SUP Nil E14 Without switch 5 For manifold, individual SUP

max Model CYV15 1 CYV32 5 (Nm) M1 M2 Model CYV15 CYV32 M1 0.3 3 M2 0.6 4 M3 0.3 3 m m Static Moment Moment generated by the work piece weight even when the cylinder is stopped Pitch moment M1 = m x g x (L + B) x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYV15 CYV32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m: Load mass

3 m L (Example) A54L 5 m Z (Example) A54Z Since there are other applicable auto switches than listed, refer to page 9-6-22 for details.

3 m L (Example) A54L 5 m Z (Example) A54Z Since there are other applicable auto switches than listed, refer to page 9-6-22 for details.

[101 to 101 kPa] 0 1 2 3 Option Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Nil Without cable Sensor cable (3 m) M5 Port size L M5 x 0.8 Option Sensor cable (3 m) + Connector (1 pc.)

Auto switch specifications Load voltage Lead wire length (m) Indicator light Type Special function Wiring (output) Electrical entry Auto switch model Applicable load 0.5 (Nil) 3 (L) 5 (Z) None (N) DC AC 3 wire (NPN equiv.)

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10.5 M3 x 0.5 10 M5 x 0.8 11.5 M4 x 0.7 16 M6 x 1.0 13.5 M5 x 0.8 20 M8 x 1.25 16.5 M6 x 1.0 25 M10 x 1.25 22.5 M8 x 1.25 28 M14 x 1.5 Clevis pin part numbers d m m l Dd9 t L t Applicable bore size (mm) Applicable snap ring Part no.

Mr=W (L3 + C) = 10 (.05 + 0.014) =0.64 [N m] W Mr 2 =Mr/Mr max. =0.64/12 =0.053 Mr: Mr max. value is from at Va=300mm/s L3+C Mey=1/3 We (L2 + B) From V = 1.4 Va We = W V = 4/100 10 1.4 300 = 168 [N] Mey = 1/3 168 (0.5 + 0.037) = 4.9 [N m] 3 = Mey/Mey max. = 4.9 / 14.3 = 0.343 (3) Dynamic moment Examine Mey.

Case/Cover material: Aluminum alloy Strainer with other nominal filtration (1,2,5,10,20,40,70,100 m) The filtration other than the standard filtration accuracy, 120 m, is available with the clean gas strainer.

Solid sphere Position of rotational axis: Through the sphere's diameter I = m x 12 a I = m x 5 2r 3. Thin rectangular plate (rectangular parallelopiped) 8. Thin round plate Position of rotational axis: Through the plate's diameter Position of rotational axis: Through the plate's center of gravity I = m x 4 r I = m x 12 a 9. Load at the end of lever 4.

Load mass Allowable moment MY1H/m MY1H/M MY1H/M MY1H/M 2 1 3 40 50 50 40 50 40 50 4 40 5 30 30 30 30 20 20 20 20 MY1H40 MY1H32 MY1H40 MY1H32 10 10 10 MY1H40 MY1H40 MY1H40 MY1H40 MY1H32 MY1H40 MY1H32 MY1H32 MY1H32 MY1H32 5 4 MY1H25 MY1H25 10 MY1H40 MY1H40 Load mass kg Moment Nm Moment Nm Moment Nm 5 4 5 4 MY1H32 MY1H32 MY1H25 MY1H25 MY1H25 3 MY1H25 MY1H25 MY1H20 MY1H20 3 3 2 MY1H25 MY1H25

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 10.5 M5 x 0.8 M3 x 0.5 16 11.5 M6 x 1.0 M4 x 0.7 20 13.5 M8 x 1.25 M5 x 0.8 25 16.5 M10 x 1.25 M6 x 1.0 28 22.5 M14 x 1.5 M8 x 1.25 Clevis pin d Dd9 m m l t L t Applicable bore (mm) Applicable snap ring Part no.

3 w q e RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

2.4 Operation display panel . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate and facility water source) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical wiring . 3-9 3.3.3 Preparation