MHS

32DA MHSH3-40DA MHSH3-50DA MHSH3-63DA MHSH3-80DA mm 12 20 25 32 40 MPa 0.20.6 0.10.6 -1060 c.p.m. 60 30 mm 5 5 10 10 15 N 1 45 130 204 335 524 g 530 770 1,330 2,300 4,000 1) 0.5MPa MHSH3-32DB MHSH3-40DB MHSH3-50 DB MHSH3-63 DB MHSH3-80 DB mm 5 5 10 10 15 N 6~10 11~15 20~25 29~34 49~59 g 500 740 1,290 2,250 4,000 g 32 40 50 63 80 MHSHJ3-D 430 600 1,020 1,710 3,040 MHSHJ3-DA 550 800

LEJ-OM004xx

. *2 (4) S troke [mm] Standard Produced upon receipt of order 300 200 400 500 600 700 800 900 1000 1200 1500 Str o k e (m m ) Ty pe LEJS40 LEJS63 *2Strok es other than standard and produced up o n receipt o f order are available as special orders, so plea s e contact with our com pany . (9) Driver type *4 (7) Cable type *4 *5 *6 Com patible driv er P owe r supply v oltage [V ] Without cable

DOC1023126

Specification Table Battery-less absolute encoder type (Step motor 24 VDC) Model EQY25 EQY32 Storoke [mm] 30 to 400 30 to 500 Work load[kg] *1 Horizontal 8 26 40 70 30 50 90 100 Vertical 2 8 16 30 3 13 26 46 Pushing force [N] Note2),3),4) 36 to 76 63 to 122 126 to 238 232 to 452 50 to 118 80 to 189 156 to 370 296 to 707 to 300 30 to 900 18 to 700 9 to 450 5 to 225 30 to 900 24 to 800 12 to

Electric Actuator Slide table ／ High Precision Type High performance Battery-less absolute encoder

. -3- 1Specification High performance Battery-less absolute encoder LESYH*(D,R,L)G* LESYH LESYH LESYH LESYH LESYH LESYH LESYH Model 8*GA 8*GB 8*GC 16*GA 16*GB 25*GA 25*GB Stroke[mm] 50,75 50,100 50,100,150 Max.work load[kg] 2 8 12 Horizontal Vertical 1.5 3 6 6 12 10 20 note1)note3) Pushing Force 18~36 37~74 69~138 70~140 135~270 197~395 382~765 note1)note3) 20~800 10~400 5~200 20800 10400

High performance type Step Motor Controller (Servo/24 VDC)

controller are as follows Item Specifications Compatible motor Step Motor (Servo / 24 VDC) Power voltage: 24 VDC +/-10% Max. current consumption: 3A (Peak 5A) *2) Power supply *1) (for both of motor drive power control power, stop, lock brake release) Parallel input 11 inputs (photo-coupler isolation) Parallel output 13 outputs (photo-coupler isolation) Compatible encoder Incremental A/B phase (800

JXCx-OMY0008

Current consumption Compatible encoder Incremental A/B phase (800 pulse/rotation) Battery-less absolute encoder ( 4096 pulses/rotation) LED Details L/A1 Link/Activity1 L/A2 Link/Activity2 LED display PWR Power supply ALM Alarm status RUN EtherCAT communication status. ERR EtherCAT communication error status.

JXCx-OMY0006

Current consumption Compatible encoder Incremental A/B phase (800 pulse/rotation) Battery-less absolute encoder ( 4096 pulses/rotation) LED Details L/A1 Link/Act 1 L/A2 Link/Act 2 LED display PWR Power supply ALM Alarm status MS Controller status NS Communication status Locking With unlocking terminal Cable length Actuator cable: 20 m or less Cooling method Air-cooling type Operating temperature

JXCx-OMY0004

Current consumption Compatible encoder Incremental A/B phase (800 pulse/rotation) Battery-less absolute encoder ( 4096 pulses/rotation) LED Details PWR Power supply LED display ALM Alarm status SF Controller status BF PROFINET communication status.

JXCx-OMX0009

Item Specifications Compatible motor Step motor (servo 24 VDC) Power supply voltage: 24 VDC +/-10% Max. current consumption: 3A (Peak 5A) *3) (for both of motor drive power control power, stop, lock brake release) Power supply *1) *2) Compatible encoder Battery-less absolute encoder (resolution: 4096 pulses/rotation) Incremental A/B phase (800 pulse / rotaion) Serial communication RS485 Memory

JXCx-OMT0005CN

(DC24V) DC24V10% 100mA A/B 800 / EEPROM LED PWR LED ALM MS NS 20m 040 90%RH ) 50MDC500V 210g() 230g(DIN ) DeviceNet DeviceNet CT-27 Volume1Common Insustrial Protocol(CIP) Edition3.14 Volume3DeviceNet Adaption of CIP Edition 1.13 063 / Data Rate 125/250/500 kbps / Group 2 Only Server EDS 4122036Byte 4 Byte 41020Byte 4 Byte ID 07hSMC Corporation 43h(Generic Device) DDh

SFOD-OMT0005CN

(DC24V) : DC24V10% 130mA () A/B (800 /) EEPROM LED L/A1 1 L/A2 2 LED PWR ALM MS NS 20m 0 oC40 oC() 90%RH () 50M(DC500V) 210g() 230g(DIN ) [EtherNet/IP ] EtherNet/IP TM(CT-12) 10/100Mbps() Ethernet (CAT5 100BASE-TX) /() EDS 36 /36 IP 192.168.1.1254 DHCP ID 7h(SMC Corporation) 2Bh(Generic Device) D1h -12- 3.2 1 LED 2 P1P2 EtherNet/IP 3 IP IP X1X10X100 EtherNet

LECA6_C

(DC24V) DC24V10 (1) 3A 10A 2 3 11 () 13 () A/B 800 //Z RS485 Modbus EEPROM LED LED/1 I/O 5m 20m 0~40 90%RH ) -10~60 35%85 ()-FG 50MDC500V 150g() 170g(DIN ) 1 2 3UL ,UL1310 Class2 11 - 3.2. () SV1.00 ASL8500099 ()"SV1.00" ON/ ()/ 1 PWR LED() (LED()) () 2 ALM LED() ON/ 3 CN5 I/O (26 ) I/O PLC (11 COM 13 COM ) 4 CN4 I/O (8 ) 5 CN3 (16 ) 6 CN2 (4 ) (DC24V) 7 CN1

LECP6_C

(DC24V) DC24V10 (1) 3A 5A 2 (3) 11 () 13 () A/B (800 /) RS485 Modbus EEPROM LED LED/1 I/O 5m 20m 0~40 90%RH ) -10~60 90%RH ) ()FG 50MDC500V 150g() 170g(DIN ) 1 2 3UL UL1310 Class2 11 - 3.2. ( SV1.00 ARX8300073 ()"SV1.00" ON/ ()/ 1 PWR LED() (LED()) () 2 ALM LED() ON/ 3 CN5 I/O (26 ) I/O PLC (11 COM 13 COM ) 4 CN4 I/O (8 ) 5 CN3 (16 ) 6 CN2 (6 ) 7 CN1 5 (DC24V)

JXCx-OMT0062

Product Specifications 3.1 Specifications (1) Basic specifications Item Specifications Compatible motor Step Motor (Servo / 24 VDC) Power voltage: 24 VDC +/-10% Power supply *1) *2) Max. current consumption: 3A (Peak 5A) *3) (for both of motor drive power control power, stop, lock brake release) Compatible encoder Incremental A/B phase (800 pulse / rotation) Serial communication Conforming

JXCx-OMT0061CN

(P.59) 11 - 3. 3.1 (DC24V) DC24V10% 3A 5A A/B 800 / RS485 Modbus EEPROM LED PWR LED ALM L ERR CC-Link L RUN CC-Link 20m oC40 oC() 0 90%RH ) oC60 oC () -10 90%RH ) 2 4.9m/s IP20 50MDC500V 170g() 190g(DIN ) [CC-Link ] CC-Link Version 1.10 1 2 4 (/) 32 /32 4 /4 64 /64 8 /8 128 /128 16 /16 156k/625k/2.5M/5M/10Mbps NRZI (EIA RS485) HDLC 16+X 12+X 5+1) CRC(X

HRX-OM-M005

Table 7-1 Water Quality Standards Substance Facility water Circulating water spec. spec. pH (25C) 6.5 to 8.2 6.0 to 8.0 Electrical conductivity (25C) (s/cm) 100 to 800 0.5 to 300 Chloride ion (mgCl-/L) Max. 200 Max.50 Sulfate ion (mgSO42-/L) Max. 200 Max.50 Acid consumption (pH4.8) (mgCaCO3/L) Max. 100 Max.50 Total hardness (mgCaCO3/L) Max. 200 Max.70 Calcium hardness (mgCaCO3/L) Max. 150

CEx-OMP0016

ML2 + Sequence controller Conditions Piston speed Operating pressure 0.5MPa just 100 300 500 800 1000 before stop Brake releasing pressure 0.3MPa mms Load factor 25 Stopping accuracy mm 0.5 1.0 2.0 3.0 4.0 ML2 + CEU2 Piston speed just before stop 500 mms Stopping accuracy mm 0.5 36 Chapter 12: Manual Operating Procedure [Brake release] Supply brake releasing pressure of 0.30.5MPa from brake

HEAVY DUTY STOPPER CYLINDER

. =0.1 =0.2 50 400 280 63 530 365 80 800 565 NO mAmmax Confirmation of mmax : 200400 (=0.1) YES Calculate allowable mass of transferred object, m, at transfer speed v. m=278(kg) at v=20(m/min) is found on Figure-1-1. 200278 For allowable range of m, refer to Figure-1-* (P6).

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

(Servo / 24 VDC) Power voltage: 24 VDC +/-10% Max. current consumption: 3A (Peak 5A) *2) Power supply *1) (for both of motor drive power control power, stop, lock brake release) Parallel input 11 inputs (photo-coupler isolation) Parallel output 13 outputs (photo-coupler isolation) Battery-less absolute encoder (resolution: 4096 pulses/rotation) Compatible encoder Incremental A/B phase (800

POWER CLAMP CYLINDER

1500 1500 0.5MPa 0.5MPa 1000 1000 0.3MPa 0.3MPa 500 500 0 0 0 0.5 1 1.5 2 2.5 3 3.5 4 4.5 5 5.5 6 6.5 7 0 0.5 1 1.5 2 2.5 3 3.5 4 4.5 5 5.5 6 6.5 7 Shim Shim thickness (mm) thickness (mm) 0.3MPa 0.3MPa Recommended shim thickness Recommended shim thickness 0.5MPa 0.5MPa 0.7MPa 0.7MPa 9 - Arm length L300mm 1800 Peak clamping force position 1600 0.7MPa 1400 1200 Clamping force (N) 0.5MPa 1000 800