MHZ

D-Y7P D-Y69 D-Y7PV D-Y7W D-M9V D-F9WV D-Y7WV D-M9 D-F9BAL D-F9W Model MHS 4 8 1 6.5 3 1.5 Open Closed Open Closed Open Closed Open Closed MHZJ2-10 With dust cover No setting No setting MHC MHZJ2-16 No setting No setting MHT MHZJ2-20 MHY MHZJ2-25 MHW Note) There is no auto switch protrusion from the body's end surface.

MHZ

Long Stroke Type: MHZL2 Standard Type: MHZ2 MHZ2 6 6 D 7 X MHZL2 Bore size D 7 X Action MHZ2 10 to 40 Bore size D 7 X D Double acting Action Assist type Finger position/option Standard type D Double acting Closing direction assist 7 Assist type Finger position/option Standard type Nil Basic type Opening direction assist Closing direction assist Narrow type 12 7 1 Side tapped mounting Nil

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

n 150 + 50 (n 2) n = 2, 4, 6, 8 Same side 110 + 50 (n 2) n = 2, 4, 6, 8 150 1 15 110 2 (Different sides, Same side), 1 105 110 115 15 D-Z7/Z80 D-Y59/Y7P D-Y7W 15 + 40 n = 2, 4, 6, 8 (n 2) 2 115 + 40 n = 4, 8, 12, 16 (n 4) (n 4) (n 4) 2 105 + 40 n = 4, 8, 12, 16 2 110 + 40 n = 4, 8, 12, 16 n 2 2 (Different sides, Same side), 1 90 95 100 10 D-Y69/Y7PV D-Y7WV 10 + 30 n = 2, 4, 6, 8 (n

smcmaintenancepartslist

Material Applicable model Note) Qty. 3 5 3 5 3 5 FGF3A-40 FGF5A-60 FGF3B-40 FGF5B-60 FGF3-40 FGF5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 Stainless steel 304 BT-3S Replacement Parts 3 Basket Stainless steel 304 Part No. Qty. 1 1 1 1 1 No.

CHKD/CHKG

Minimum Auto Switch Mounting Stroke (mm) D-M9 D-M9V D-Y59 D-Y69 D-Y7P D-Y7PV D-M9W D-M9WV D-M9A D-M9AV D-A9 D-A9V D-Z7 D-Z80 Auto Switch Mounting Number D-Y7W D-Y7WV D-Y7BA 1 pc. 2 pcs. 5 5 10 10 15 5 10 10 15 15 Operating Range (mm) Auto switch models Bore size 20 25 32 40 50 63 80 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV 6 5.5 4.5 5.5 5.5 6.5 8.5 9.5 D-Y59/Y69 D-Y7/Y7V D-Y7W/Y7WV D-Y7BA 8 9.5

Auto Switch Guide

(Including bracket, screw) Applicable bore size (mm) 40 BMU2-040 50 BMU2-040 63 BMU2-040 Cylinder series MDU 8-30-60 61 Technical Data 2: How to Mount and Move the Auto Switch Mounting Bracket Tie-rod Mounting Style Reed switchD-A53, D-A54, D-A56, D-A64 D-A67, D-A59W Solid state switchD-F59, D-F5P D-J59, D-J51, D-F5BAL D-F59W, D-F5PW, D-J59W D-F59F, D-F5NTL

Auto Switch Guide

(Including bracket, screw) Applicable bore size (mm) 40 BMU2-040 50 BMU2-040 63 BMU2-040 Cylinder series MDU 8-30-60 61 Technical Data 2: How to Mount and Move the Auto Switch Mounting Bracket Tie-rod Mounting Style Reed switchD-A53, D-A54, D-A56, D-A64 D-A67, D-A59W Solid state switchD-F59, D-F5P D-J59, D-J51, D-F5BAL D-F59W, D-F5PW, D-J59W D-F59F, D-F5NTL

Rotary Actuator

CRB2BJ CRB2BY CRB2BT CRB2BK A parallel key is used instead of single flat for size 40. Round shaft Round shaft Round shaft Single flat D D D C D D D Round shaft Single flat Single flat (mm) Size 10 15 20 30 40 C D 8 14 9 18 10 20 13 22 15 30 Note) Dimensions and tolerance of the shaft and single flat (a parallel key for size 40) are the same as the standard.

4/5 Port Solenoid Valve

39 [41.2] G: Approx. 300 H: Approx. 600 (Lead wire length) 103.2 [107.6] 108.1 [110.3] (Light/surge voltage suppressor) 69.6 [76.6] 50.1 [57.1] + 54.2 45 34.7 31.5 21.5 6 6 17 17 43.9 15 8.5 1/8 (P, R port) 32 24 45.5 L plug connector (L): SYJ5 40-L-01 3 4 5 M plug connector (M): SYJ5 40-M-01 3 4 5 DIN terminal (D): SYJ5 40-D-01 3 4 5 M8 connector (WO): SYJ5 40-WO-01 3 4 5 Applicable cable

7ND9071en

Temperature range: -40 to +85 C / -40 to +185 F. Japanese Ex-d Certification: II 2 G Ex d IICT6 Gb II 2 D Ex tb IICT80C Db Temperature range: T6: < +60 C. Not applicable to 3. sign "1" or "4".

Modular F.R.L. Unit

Min. clearance for maintenance 25 A AFD30, 40, 40-06 L Bracket (accessory) D A G F K M J C 40 B E IN OUT H OUT Port size P Drain Min. clearance for maintenance With compact auto drain (N.C.)

Guide Cylinder/Compact Type Series MGC

D-G79/K79/K79C D-H7/H7W D-H7BAL/H7NF D-H7C 8 10 9 10 10 BMA2-020 BMA2-025 BMA2-032 BMA2-040 BMA2-050 8 10 9 10 10 13 13 14 14 14 8 10 9 10 10 D-B5/B64 D-B59W D-G5/K59 D-G5W/K59W D-G5BAL/G59F D-G5NTL D-G5NBL 4 4 4.5 5 6 7 8.5 9 10 9.5 BA-01 BA-02 BA-32 BA-04 BA-05 D-G5/K59 D-G5W/K59W D-G5NTL/G5BAL 4 4 4.5 5 6 D-G59F D-G5NBL D-B7/B80 D-B73C/B80C D-G79/K79 D-K79C 5 5 5.5 6 7 35 40 40 45 45

Rotary Actuator/Vane Style Series CRB2

Y Double shaft J Y T S K A parallel key is used instead of single flat for size 40. Single flat A parallel key is used instead of single flat for size 40. Single flat D D D D D D D C Single flat Single flat (mm) 15 9 18 20 10 20 30 13 22 40 15 30 10 8 14 Size C D Note ) Dimensions and tolerance of the shaft and single flat (a parallel key for size 40) are the same as the standard.

2–4

D-P5DWL type: 40 and 50 only available.

Electric Actuator

(2.5 to 40 mA). # The optimum operating range can be D-M9NAV D-M9NA D-M9BA D-M9BAV D-M9PAV D-M9PA Auto switch model In-line Perpendicular In-line Perpendicular In-line Perpendicular Electrical entry determined by the color of the light.

CRBU

A parallel key is used instead of single flat for size 40. Single flat Single flat D D D D D D D D C Single flat Single flat (mm) 15 9 18 20 10 20 30 13 22 40 15 30 10 8 14 Size C D Note 1) Only side ports are available except for basic type. Note 2) Dimensions and tolerance of the shaft and single flat (a parallel keyway for size 40) are the same as the standard.

Aluminum High Vacuum Angle Valve

D E F G J K L M Model XLS-16-G XLS-16-C XLS-16-D XLS-16-T XLS-25-G XLS-25-C XLS-25-D XLS-25-T XLS-16-PG XLS-25-PG 104 25.5 41 113 40 38 30 35 17 23 96 60 48 129 95 62 128.5 28 43 121.5 138.5 50 48 40 40 26 25.5 63 51 120.5 97 66 121.5 154.5 40 96 113 87 66.5 38 30 35 17 23 50 121.5 138.5 89.5 69 48 40 40 26 25.5 458 XL Series Common Option 1 Heater Valve heaters are common for

Air Cylinder Series CS1

n 150 + 50(n2) (n = 2, 4, 6, 8 ) 110 + 50(n2) (n = 2, 4, 6, 8 ) 55 + 55(n2) Same surface 150 1 15 110 D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W 2 (Different surfaces, Same surface) 1 115 110 105 15 115 + 40 (n4) 2 110 + 40 (n4) 2 105 + 40 (n4) 2 15 + 40 (n2) 2 (n = 4, 8, 12, 16 ) n (n = 4, 8, 12, 16 ) (n = 4, 8, 12, 16 ) (n = 2, 4, 6, 8 ) 2 (Different surfaces, Same surface) 1 90 10 95 100 D-Y69 D-Y7PV

NCM

D-M9W D-A9 D-A9V D-H7C D-C73C D-C80C D-G5NTL D-B5 D-B59W D-B64 Auto switch model D-M9V D-M9WV D-H7 D-H7W D-H7BAL D-H7NF D-C7 D-C80 (in) D-M9 D-M9W D-A9 D-H7 D-H7W D-H7C D-H7BAL D-H7NF D-C7 D-C80 D-C73C D-C80C D-G5NTL D-B5 D-B64 D-B59W Auto switch model HS 0.96 1.02 1.12 1.22 1.34 1.59 HS 0.98 1.04 1.14 1.24 1.36 1.61 HS 0.85 0.91 0.96 1.06 1.18 1.44 HS 0.87 0.93 0.98 1.08 1.20 1.46 HS 0.98

Air Slide Table

40 40 40 40 40 Stroke 50 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke 40 40 50 50 75 75 Page 67 100 Height interchangeable type