Air Cylinder Series CM2

400 401 to 500 Bore size 20 18 36 30 68 81 93 106 131 156 181 12.5 25 37.5 50 75 100 125 143 156 168 181 206 231 256 25 18 36 32 72 85 97 110 135 160 185 100 125 235 260 12.5 25 37.5 50 75 147 160 172 185 210 32 18 36 32 72 85 97 110 135 160 185 100 125 237 262 12.5 25 37.5 50 75 149 162 174 187 212 40 20 46 41 77 90 115 140 165 190 100 125 269 294 102 12.5 25 37.5 50 75 181 194 206 219 244

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Stations n L1 L2 3 68 59 6 116 107 8 148 139 10 180 171 4 84 75 5 100 91 7 132 123 9 164 155 11 196 187 12 212 203 13 228 219 14 244 235 15 260 251 16 276 267 17 292 283 18 308 299 19 324 315 2 stations 52 43 20 stations 340 331 532 Manifold specifications 10-SYJ5000 Type 42: Side ported / 10-SS5YJ5-42Stations -01, C6 N7 [ ]: AC Grommet (G) 01 C6 N7 (With built-in One-touch fitting) Air

0.4

port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread C8 [1(P) SUP port] C8: 8 One-touch fitting 2 L n Dimensions Formula L1 = 10.5n + 44.5, L2 = 10.5n + 62.5 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 L1 L2 (L3) (L4) 65.5 76 86.5 97 107.5 118 128.5 139 149.5 160 170.5 181 191.5 202 212.5 223 233.5 244

Air Cylinder Series CA2

Without rod boot With rod boot P Bore size (mm) L MM N RR S U H Z ZZ d e f h Z ZZ l CS1 30 M14 x 1.5 27 1/4 10 84 16 51 165 175 56 43 11.2 59 1/4 stroke 173 183 40 50 35 M18 x 1.5 30 3/8 12 90 19 58 183 195 64 52 11.2 66 1/4 stroke 191 203 CS2 63 40 M18 x 1.5 31 3/8 16 98 23 58 196 212 64 52 11.2 66 1/4 stroke 204 220 80 48 M22 x 1.5 37 1/2 20 116 28 71 235 255 76 65 12.5 80 1/4 stroke 244

SYJ300/500/700

Station n L1 L2 L1 L2 Station 2 52 43 63 54 Station 20 340 331 369 360 3 68 59 80 71 4 84 75 97 88 5 100 91 114 105 6 116 107 131 122 7 132 123 148 139 8 148 139 165 156 9 164 155 182 173 10 180 171 199 190 11 196 187 216 207 12 212 203 233 224 13 228 219 250 241 14 244 235 267 258 15 260 251 284 275 16 276 267 301 292 17 292 283 318 309 18 308 299 335 326 19 324 315 352 343 Port size M5

Air Cylinder

range Bore size MM N P RR S U H Z ZZ d e f h L Z ZZ (mm) (mm) 40 50 63 80 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 10 12 16 20 25 84 90 98 16 19 23 28 36 51 58 58 71 72 165 183 196 235 256 175 195 212 255 281 56 64 64 76 76 43 52 52 65 65 11.2 11.2 11.2 12.5 14.0 59 66 66 80 81 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 173 191 204 244

Square Tube Type Air Cylinder Series MB1

Without air cushion Foot type/ (L) Bore size (mm) Cushion valve Port LS ZZ 32 40 50 63 80 100 134 138 156 156 184 188 168 176 198 201 240 244 LH LY 4-LD LT (mm) Foot type ZZ + Stroke LS + Stroke X Y X Y LX Bore size (mm) Stroke range X Y LD LH LS LT LX LY LZ ZZ LZ 32 40 50 63 80 100 700 800 1000 1000 1000 1000 9 11 11 14 14 16 22 24 27 27 30 32 7 9 9 12 12 14 30 33 40 45 55 65 128 3.2 3.2

5 Port Solenoid Valve SY Series

25/3 (A/BEA/EB) Grommet Cv b C (dm3/ Valve model Type of actuation 1, 5, 3 14/2 (PA/B) 4/25/3 (A/BEA/EB) Grommet Cv b C (dm3/ L, M plug W M8 L, M plug W M8 (P, EA, EB) 4, 2 (A, B) (P, EA, EB) 4, 2 (A, B) DIN terminal DIN terminal (sbar) ) Cv b C (dm3/ (sbar) ) Cv b C (dm3/ connector connector (sbar) ) connector connector (sbar) ) Single Single 2 position 2 position 70 72 88 93 93 135 241 244

10

Finger opening port) 4 x M8 x 1.25 (Piston rod and rack screw) M5 x 0.8 (Finger closing port) 76 33.2 11.5 6.5 16 1 30 12 Width across flats 13 23.5 52 (4 locations) 18.5 K (81) 38 29 29 29 12 Closed E 14 14 40 Open F 21 21 64 G 4 x M8 x 1.25 through (Thread for mounting attachment) Model A B C D E F G H J MHL2-25DZ 66 70 88 48 100 150 196 38 146 MHL2-25D1Z 120 124 142 102 182 282 328 86 244

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Port size Symbol Model A B 18 20 28 ZFA200 1 8 1 4 ZF Manifold ZP SP ZCUK AMJ AMV Pitch AEP HEP Related Equipment (Section F-F') Port size (The above diagram is for ZFA200) ZFA100 Port size Symbol Model A B 19 18 24 28 ZFA200 1 8 1 4 L1 1 Number of manifold stations Model Symbol 2 56 68 76 88 3 74 86 104 116 4 92 104 132 144 5 110 122 160 172 6 128 140 188 200 7 148 158 216 228 8 164 176 244

Made to Order

320 100 52 90 14.6 244 320 ZZ + (2 x Stroke) S + (2 x Stroke) NA MB1 series GC NB (mm) Bore size GC NA NB S ZZ 32 36 62 10.6 180 231 40 38 62 10.6 180 235 50 41 71 10.6 200 262 63 43 71 10.6 200 262 80 52 88 14.6 244 320 100 52 88 14.6 244 320 -X -X NA S + (2 x Stroke) ZZ + (2 x Stroke) 1795 Made to Order Common Specifications: -XC13: Auto Switch Rail Mounting Type Auto Switch Rail Mounting

SMC Pneumatic Clean Series

Correction possible when it is sucked at a nonconstant velocity 108 Maximum concentration limit (particles/m 3) Considered particle diameter (m) 0.1 0.2 0.3 0.5 1 5 10 100 1000 10 10 10 Cleanliness class (N) 107 Airborne particle concentration, Cn (particles/m3) 106 2 24 237 2370 23700 237000 1 2 3 4 5 6 7 8 9 4 35 352 3520 35200 352000 3520 3520 10 102 1020 10200 102000 ISO Class 9 8 83 832

1

ZZ + 2 x Stroke S + 2 x Stroke Series CA2 Bore size (mm) ZZ S GC 40 231 169 29 50 250 181 33 63 269 197 33 80 321 233 41 100 342 253 41 ZZ + 2 x Stroke Series MB MB, MB1 Common Bore size (mm) ZZ S GC S + 2 x Stroke ZZ + 2 x Stroke 32 231 180 36 40 235 180 38 50 262 200 41 Series MB1 63 262 200 43 GC 80 320 244 52 100 320 244 52 ZZ + (2 x Stroke) S + (2 x Stroke) Stroke range is shown as

4/5 Port Solenoid Valve

Station 2 52 43 Station 20 340 331 Station n L1 L2 3 68 59 4 84 75 5 100 91 6 116 107 7 132 123 8 148 139 9 164 155 10 180 171 11 196 187 12 212 203 13 228 219 14 244 235 15 260 251 16 276 267 17 292 283 18 308 299 19 324 315 41 Series SYJ5000 C6 N7 Type 42: Side Ported/SS5YJ5-42Stations -01, [ ]: AC C6 N7 Grommet (G) For 01 For (Built-in one-touch fitting) 65.2 [67.4] Approx. 300 (Lead

Air Cylinder

) + l 80 236 245 + l 254 263 + l 230 (244) 239 (253) + l 248 (262) 257 (277) + l 100 244 253 + l 266 275 + l 238 (252) 247 (261) + l 260 (274) 269 (283) + l Bore size (mm) Double end lock: -Wl Z ZZ Without rod boot With rod boot Without rod boot With rod boot 20 141 161 + l 152 172 + l 25 148 170 + l 161 183 + l 32 151 173 + l 166 188 + l 40 173 193 + l 191 211 + l 50 202 222 + l 222 242

CA2

21 16 M12 x 1.75 10 26 Without rod boot With rod boot P Bore size (mm) S H L MM N RR U l Z ZZ e f h Z ZZ 30 M14 x 1.5 27 1/4 10 84 16 51 165 175 43 11.2 59 1/4 stroke 173 183 40 50 35 M18 x 1.5 30 3/8 12 90 19 58 183 195 52 11.2 66 1/4 stroke 191 203 63 40 M18 x 1.5 31 3/8 16 98 23 58 196 212 52 11.2 66 1/4 stroke 204 220 80 48 M22 x 1.5 37 1/2 20 116 28 71 235 255 65 12.5 80 1/4 stroke 244

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

range [mm] A B d11 D1 D EE PL RT L12 KK SW G BG L8 VD VA WA WB WH ZZ ZY E R L2 L9 H SL 32 Up to 500 22 30 12.2 12 G 1/8 13 M6 x 1 6 M10 x 1.25 10 28.9 16 94 4 4 4 7 26 146 190 47 32.5 15 4 48 8 40 Up to 500 24 35 14.2 16 G 1/4 14 M6 x 1 6.5 M12 x 1.25 13 32.6 16 105 4 4 5 8.9 30 163 213 54 38 17 4 54 8 50 Up to 600 32 40 19 20 G 1/4 14 M8 x 1.25 8 M16 x 1.5 17 32 16 106 4 4 6 5.1 37 179 244

15

Allowable load mass on guides and moment Allowable moment [Nm] M1 1.3 2.6 8.6 17 30 67 96 Bore size (mm) Allowable load mass on guides m [kg] 6 10 15 20 25 32 40 M2 1.4 2.9 8.9 18 35 82 124 M3 1.3 2.6 8.6 17 30 67 96 9 15 35 60 104 195 244 The table above indicates the maximum performance of the guide, but does not show the actual allowable work load mass.

70astamb1

(drawing above) Foot style (L) Without Air Cushion Cushion valve Port Bore size (mm) LS ZZ 32 40 50 63 80 100 134 138 156 156 184 188 168 176 198 201 240 244 LH LY 4-LD LT Foot Style ZZ + Stroke LS + Stroke X Y X Y LX Bore size (mm) Stroke range X Y LD LH LS LT LX LY LZ ZZ LZ 32 40 50 63 80 100 22 24 27 27 30 32 9 11 11 14 14 16 7 9 9 12 12 14 30 33 40 45 55 65 128 3.2 3.2 3.2 3.6 4.5 4.5

Table of Contents

25 30 40 50 6, 10 16 20, 25 32 M3 M4 M5 M6 1.08 10% 2.45 10% 5.10 10% 8.04 10% 22 (27) 25 (35) 28 (38) 31 (41) 34 (44) 37 (47) C(D)U6-D 36 (41) 40 (50) 44 (54) 48 (58) 52 (62) 56 (66) C(D)U10-D 50 (75) 56 (86) 62 (92) 68 (98) 74 (104) 80 (110) C(D)U16-D 95 (128) 106 (143) 117 (154) 128 (165) 139 (176) 150 (187) 172 (209) 194 (231) C(D)U20-D 176 (230) 193 (252) 210 (269) 227 (286) 244