Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Direct Operated Precision Regulator/Modular Style (For Special Applications) -ARP20 to -ARP40 10 20 21 10 20 21 JIS symbol Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) Regulator with backflow function Regulator -ARP20K to -ARP40K 10 20 21 10 20 21 Clean room compliant (10-ARP). Copper-free, fluorine-free (20-ARP).

Air Catch Sensor

10 Rc1/8 SUP.

PSxx-OMV0008CN

* 1015 10 1% 2162 LCD * -8No.PS-OMV0008CN-E ISE70G 02 L2 M 3 Y K T ISE70G 0~1 MPa ISE75G 0~2 MPa ISE76G 0~5 MPa ISE77G 0~10 MPa ISE78G 0~16 MPa 2 A A B B 02 Rc1/4 N02 NPT1/4 F02 G1/4 :ISO1179-1 1 M12 5m M12 5m T S : L IO-Link/1+2 NPNorPNP L2 1 M SI2 1 2kPaMPa / A ZS-50-A M46 2 B ZS-50-B M46 2 ZS-48-A ZS-31-B 5 m M12 ZS-31-C 5 m -9No.PS-OMV0008CN-E M12 4 24 OUT1 IO-Link

Title not found

20 20 Power supply 100-240 VAC 100-240 VAC 24 VDC 100-240 VAC 24 VDC + 10% 15 % + 10% 15% + 20% 15% + 10% 15% + 20% 15% 50/60 Hz 50/60 Hz 50/60 Hz Maximum micro power cut 10ms 10ms 5ms 10ms 5ms Maximum inrush current 0.7A 1.5A 0.7A 1.5A 7A 0.7A 1.5A 7A Maximum power 3W 4W 3W 8W 6W consumption ANALOGUE INPUT CHARACTERISTICS AC INPUT CHARACTERISTICS 10 6 inputs from I01 to I06 Input voltage

CEx-OMG0106

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

PSE530/200

Internal data error. 16-3-10 10 Series PSE530/200 Multi-channel Controller/Pressure Sensor Operation 1: Initial Setting 1 Channel selection MPa kPa OUT1 OUT2 CH 1 2 3 4 CH2 CH3 CH4 CH1 PRESSURE ZSE ISE SET PSE SET button and hold for 2 seconds or longer.

VT325

VO325-00 VQZ VT325-T Specifications VZ Type of actuation Direct operated type 2 position single solenoid VS Air Fluid Operating pressure range 0 to 1.0 MPa 10 to 50C (No freezing. Refer to page 4-18-4.)

ZSE30A(F)/ISE30A

ZSE20 ISE20 ZSE30 ISE30 ZSE30 ISE30 1 unit 2 units 10 units ZSE40 ISE40 ZSE10 ISE10 Master Slave (Max. 10 units) ISE70 Wiring example when using ZS-38-U Slave-side sensor Master-side sensor Slave-side sensors (up to 10 sensors) ZSE80 ISE80 Master-side sensor 1 unit 2 units n units (Up to 10 switches) Brown: DC+ PS DC (+) OUT1 OUT2 FUNC DC () DC (+) OUT1 OUT2 FUNC DC () DC (+) OUT1 OUT2 FUNC

Clean Air Module

Note) One-touch fitting 10 PB AMG PA 76 37.5 AFF 25 13.2 (47.5) 60 49 (77.5) 25 45 45 AM 349 Note) This port is unavailable.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

AS321FE AS331FE AS421FE AS431FE Model 8 10 6 8 10 12 12 10 6 8 10 Tubing O.D.

α PneuAlpha HARDWARE MANUAL

-57 Hz: 0.075 mm Constant Amplitude 57-150 Hz: 9.8 m/s2 Acceleration Sweep Count for X,Y,Z: 10 times (80 minutes in each direction) Conforms to IEC 68-2-6; 10-57 Hz: 0.15 mm Constant Amplitude 57-150 Hz: 19.6 m/s2 Acceleration Sweep Count for X,Y,Z: 10 times (80 minutes in each direction) 9 PneuAlpha Hardware Specification 2 Table 2.8:Environmental and Electrical Specications Insulation Resistance

25

The result is approximately 10 L/min (ANR). Air consumption (L/min [ANR]) SUP = 0.7 MPa 40 35 30 SUP = 0.5 MPa 25 20 SUP = 0.35 MPa Caution 15 SUP = 0.2 MPa 10 1.

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

Large blow and

45 45 Fluid passage dia.: P R J K 2 x L H I O 4 x Sa Thread depth Sb G M N A D F Vacuum flow Dust bag When dust bag is mounted E T Suction air Suction air Discharge air B C C U Hose band V Note 1) (mm) A 158 B 70 C 50 D 20 E F 24.5 G 60.5 H 5 I 70 J 60 K 5.5 L 72 M 37 N 2 O 30 P Rc1/4 Q R 59 Sa Sb T 500 U 250 V 310 Model ZH30--X185 ZH40--X185 28.5 146.5 M4 x 0.7 10 203 90 64 25 27.2 33.5

Cylinder Speed Checker

s 0 to 999 times Minimum display unit 1 mm/s 0.01 s (0.00 to 99.99 s, 0.00 to 99.99 s) 0.1 s (100.0 to 999.9 s, 100.0 to 999.9 s) 1 time Current consumption 10 mA or less Load voltage 28 VDC or less Load current 40 mA or less Measurement accuracy 20% or less 0.2 s or less Internal voltage drop 1.5 V or less (0.8 V or less at 10 mA) Leak current 100 A or less Operating time 1 ms or less

High Speed Pilot Operated

Description Material 1 Body Aluminum die-casted 2 (B) 4 (A) 2 Spool assembly Aluminum/FKM e 3 Plug (For the -X1) Steel 1 High Speed Pilot Operated Solenoid Valve DXT1215 Series How to Order Valves DXT1215 T 5 Wm U 01 N X1 w y e r t u q q Coil type w Rated voltage e Electrical entry M8 connector1 T With power-saving circuit 5 24 VDC Wm WO With straight connector cable Without connector cable

VFN2000N

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com d n i n i W g c e t i r o i d n e p a t e p i P Leakage Voltage It must be noted that when connecting C-R element parallel to switching element, leakage current flows through C-R element and the leak voltage increases

Series 10-MGF Guide table ø40, ø63, ø100

Port size Lubrication Model Rubber Air 10-MGF40 10-MGF63 10-MGF100 1/8 Relief type (Both sides) Double acting 30, 50, 75, 100 1/4 Non-lube Non-standard intermediate strokes (in 5 mm increments) are available by attaching a spacer of 5, 10, 15, 20 or 25 mm width.

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

10 14 14 22 22 23 23 30 30 42 42 U CX L Z + Stroke RR ZZ + Stroke Double clevis/(D) Port Cushion valve Double clevis CDH10 (mm) Bore size (mm) Stroke range H10 CX +0.3 ZZ Z U RR L CD +0.1 CZ 32 40 50 63 80 100 164.5 169 197 197 251 251 154 158 182 182 228 228 13 13 17 17 26 26 14 14 20 20 30 30 10.5 11 15 15 23 23 up to 500 up to 500 up to 600 up to 600 up to 750 up to 750 10 10 14 14 22

3 Way Direct Acting NVKF 300 Series

Port size lll5 10-32 Nom. (M5) 01T r/ NPTF {A port onl ' Special order Notel) Indicale in parentheses al end of parl # Ex.