IDX-OM-M050

When the IDF100F-30 is provided with options C, R and V and specified to have the ventilation direction to the right side, the part number will be IDF100F-30-CRV1. NIL IDF 100 F 30 NIL C 1 K 2 Size P 3 Air compressor size Note) 100kW 125kW 150kW Note) The value is referential. Confirm the capability of the compressor used.

VK300

[dm3/ (sbar)] C [dm3/ (sbar)] C [dm3/ (sbar)] C [dm3/ (sbar)] V100 Grommet b Cv b Cv b Cv b Cv S070 VK332 0.47 0.41 0.41 0.47 0.41 0.85 0.65 0.65 0.85 0.65 0.44 0.27 0.27 0.44 0.27 0.26 0.24 0.24 0.26 0.24 0.13 0.10 0.10 0.13 0.10 0.19 0.15 0.15 0.19 0.15 0.47 0.39 0.39 0.47 0.39 0.80 0.55 0.55 0.80 0.55 0.40 0.35 0.35 0.40 0.35 0.27 0.32 0.32 0.27 0.32 0.13 0.10 0.10 0.13 0.10 0.19 0.14

DOC1003077

For example, if 0.1 C is set here, the actual reference temperature for control is lower than the indicated SV by 0.1 C.

VSA4

dm3/(sbar)] 6.4 8.7 9.2 6.4 8.7 9.2 6.2 8.1 10 6.6 8.9 11 Port size Rc 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 Note) Weight (kg) A/B EA/EB Pilot port size SA C[dm3/(sbar)] 6.3 8.2 9.6 6.3 8.2 9.6 5.8 7.5 9.5 5.5 6.7 9.4 b 0.16 0.28 0.14 0.16 0.28 0.14 0.23 0.27 0.18 0.24 0.25 0.15 b 0.13 0.13 0.17 0.13 0.13 0.17 0.15 0.11 0.14 0.15 0.14 0.14 Cv 1.4 2.1 2.2 1.4 2.1 2.2 1.4 2.0 2.4

TA301

DXT060-27A Flow Characteristics/Weight Weight (kg) Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Valve model b Cv Grommet Port size b Cv b Cv C [dm 3/(sbar)] C [dm 3/(sbar)] C [dm 3/(sbar)] C [dm 3/(sbar)] b Cv 0.63 0.30 0.16 0.59 0.30 0.15 0.59 0.32 0.15 0.65 0.30 0.16 0.11 (With bracket: 0.13) 0.66 0.28 0.16 0.60 0.29 0.15 0.61 0.32 0.15 0.66 0.30 0.16 0.34 0.26 0.084

c

" 11/4" 31.75 11/10" 27.95 O.D. 3.18 0.086" 2.18 1/16" 1.58 I.D.

IDX-OM-W053

CM PE FM1 PRS P FM2 PE CM FM 12 OLR PTC PTC ILS PRS TB PE GFCI EDV 6 3 6 6 4 2 6 4 7 A A 7 1 7 2 A m 3/h(ANR) 1) (50/60Hz) 0.32/0.375 10 1ANR 65% 2 7 3 7 1 8 C 8 C 8-1 8-2 1) 2) 8-3 8 1 9 G G 9-1 9 1 10 H 10 H 10-1 ( ) 10-2 () AD48-2-A 10 IDFA6E-20-H N.O. () 0.151.0MPa 10 1 10 H IDF-S1941 () 1 AD48-2-A 1 1) 2019 3 2019 2 SERIAL No.XP IDF-S1940

KR

(mm) Model N L1 L2 Port B Min. bore Weight (g) L3 L4 L5 L6 P Q1 Q2 MA MB FA FB KRM11-06-10-10 KRM11-06-10-6 76 10 6 6 10 29 47 19.5 31.5 21.5 31 13 13.5 17 21 7.5 10 102 6 85 10 116 41 39 55 73 KRM11-08-12-10 KRM11-08-12-6 8 12 11.5 22.5 35.5 24 34.5 15.5 14.7 18.5 22 9 57 86 Dimensions: KRM12 2-connection thread 2-4.5 mounting hole N-applicable tubing O.D.

CEP1

R04-J8M7.3 AC100240V DC24V RS-232C RS-232C + BCD 05 5 10 10 15 15 20 20 *1) ( ) () 2-3 CEP1 CEU5 3 CEU1 , CEP1 CEU5 ,CE1-R,23m ,, (8 ) CEP1 ,CE1-R, CEP1 ()() CEP1 ,CE1-R C C () CEP1, CE1-ROOC CE1-RO5 CE1-R10 CE1-R15 CE1-R20 CE1-R*C 3 3-1 CEP1B12 CEP1B20 () 1.5MPa 1.0MPa 0.15MPa 0.1MPa 50~300mm/s 0~60 () 25~85%RH() 0~+1.0 2 3 , JIS2 3-2 7,6 () [,R03-J8M] 23m*

MH-OMY0004

C 1C 2 3 :MH-G04(30g) C 17 3-4. C C 1. Assy 18 3. 4. 5. 6.

MONOSASHI-KUN WITH BRAKE CONTROLLER

Extension Cable + Connector 10 10m 15 15m 20 20m Connectors Connection Symbol Core Wire Color A White B Yellow C , D Brown, Blue E Red F Black G (Shield) 17 5.

PF2D

A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] PFMC 100 2 or 3 particles/cc PFMV 10 00 10 20 30 40 50 60 70 PF2A 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [hour] PF3W The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room

PSE530/200

Internal data error. 16-3-10 10 Series PSE530/200 Multi-channel Controller/Pressure Sensor Operation 1: Initial Setting 1 Channel selection MPa kPa OUT1 OUT2 CH 1 2 3 4 CH2 CH3 CH4 CH1 PRESSURE ZSE ISE SET PSE SET button and hold for 2 seconds or longer.

PSxx-OMV0003CN

OFF No.3 No.4 No.5 No.6 -73No.PS-OMV0003CN-G No.7 No.8 No.8 No.9 No.10 No.11 No.12 No.13 No.14 -74No.PS-OMV0003CN-G No.

Solid State Auto Switches

Weight (g) Applicable bore size(mm) Weight Applicable bore size(mm) Weight Auto switch model Auto switch model D-A33C-4, A34C-4 D-A33C-5, A34C-5 D-A33C-6, A34C-6 D-A33C-8, A34C-8 D-A33C-10, A34C-10 D-A44C-4 D-A44C-5 D-A44C-6 D-A44C-8 D-A44C-10 162 166 184 210 232 160 164 182 208 230 40 50 63 80 100 40 50 63 80 100 Dimensions (mm) T Applicable bore size (mm) 40 50 63 80 100 C 44 52 64 78 92

KP/KPQ/KPG

14 8 10 14 12 14 4 10 19 6 12 20 13 21 26 36 38 65 4 4 4 18 10.4 20.7 D1 10 L2 A D2 8 H 6 10 10 19.5 12.8 22.8 Connection threads 10 (R) 8 (R) 15.2 18 26 21.5 12 26.3 Applicable tubing 10 18.5 29 41 24 29.4 M L1 17 17 12 20.9 46 58 25 31.4 22 D1 Reference dimension for R threads after installation Note 1) D1 indicates the maximum diameter.

Vacuum Ejector Series ZM

VJ10-36-1A-10 . 2 pcs.

PF-OMN0009_C

1 V 1.5 V 5 V 4 mA 6 mA 20 mA (PF3W511) A B C 1 V 1.4 V 5 V 4 mA 5.6 mA 20 mA (PF3W521-12/14) A B C 1 V 1.8 V 5 V 4 mA 7.2 mA 20 mA (PF3W521-U30) A B C 1 V 1.48 V 5 V 4 mA 5.92 mA 20 mA [L/min] PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521-12/14 50 250 PF3W521-U30 30 250 () A B C D 0.6 V 1 V 5 V 5.4 V -40No.PF-OMN0009CN-F PF3W504/520/540/511 2X A AA B DD E F G H J

VVXA21/22

L1 L2 384 372 494 476 348 336 448 430 312 300 402 384 276 264 356 338 240 228 310 292 204 192 264 246 168 156 218 200 132 120 172 154 96 84 126 108 VVXA31 VVXA32 Symbol Model A 40 44 B 20 22 C 9 10 D 22 24 E 59 66 F 33 34 G 24 25 H 30 40 J 36 46 K 6 9 M 45.5 50.5 N 69 76 VVXA31 VVXA32 17-3-108

Shuttle Valve/AND Valve with One-Touch Fittings

Output 3 goes ON if "C" is turned ON, only when output 1 and output 2 are in an ON state. If either "A" or "B" is OFF, output 3 does not go ON even if "C" is turned ON.