100

Circuit diagram 90 With vacuum pressure switch With pressure gauge Refer to the vacuum port figure above for the branch specification. 90 Air pressure supply (1/P) port applicable tubing O.D. (2000) 68.6 A Release button color ZL6mm 8 Light gray ZL6mNm 5/16" Orange Vacuum (2/V) port1 Rc3/4, G3/45, NPT3/4 (Recommended tightening torque: 28 to 30 Nm) 2 x R20 Air pressure supply (1/P) port

ZSE30A(F)/ISE30A

.: ZS-38-A1) 25 20 20 45 30 2 30 34.6 19 5.2 14.7 9.6 5.2 Bracket configuration allows mounting in four orientations.

HAA

Outlet Air Temperature 50C 70C 100C Inlet air temperature (C) Correction factor Air flow (l/min (ANR)) Model 35.5 42.5 47.5 36 42.5 44 38.5 42.5 45 39 43 45 35 40 44 35.5 40 42 37 40 41.5 38 40 42 34.5 38 40 33 36.5 38 34 36 37 34 35 36 500 1000 1500 1000 2200 3000 2000 3300 4000 4000 5700 7000 HAA7 Air inlet Air outlet Air cooled style after cooler HAA15 HAA22 Auto-drain HAA37 Min.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

H 28 30 36 44 54 E 22 21 26 F 45 55 58 65 76 G 33 42 44 50 61 D 34 46 63 67 78 A 59 78 107 110 134 B 20 29 39 42 53 C 40 53 70 75 90 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1938 Series VHS20/30/40/50 Specific Product Precautions Be sure to read before handling.

AMF

Air Flow (page 14-20-45).

Air Cooled Aftercooler Series HAA 1

Model A B C A B C A B C A B C 500 1000 1500 1000 2200 3000 2000 3300 4000 4000 5700 7000 34.5 38 40 33 36.5 38 34 36 37 34 35 36 35 40 44 35.5 40 42 37 40 41.5 38 40 42 35.5 42.5 47.5 36 42.5 44 38.5 42.5 45 39 43 45 HAA7 HAA15 HAA22 Maintenance HAA37 Caution 1. Inspect the cooler at least once a week and clean it to prevent it from becoming obstructed. 2.

Heatless Air Dryer Series ID 1

Replace the adsorbent according to color of the indicator. 1 4 1 2 1 2 3 4 520 615 850 961 45 45 75 75 9 9 9 9 120 120 170 170 95 95 95 95 59.5 59.5 88 88 128.5 128.5 243.5 243.5 59.5 59.5 66.5 66.5 134.5 134.5 183 183 222 222 302 302 Dew point temperature (Atmospheric pressure) 30C or less 18C 10C 5C Color of indicator ID300 ID400 ID600 Dark blue Light blue Light pink air, the capillary

IDUS/IDFS

(C) 30 35 40 45 50 15 15 15 15 15 10 10 10 10 10 5 5 5 5 5 1.71 1.37 1.09 0.89 0.75 1.31 1.05 0.84 0.68 0.58 0.92 0.74 0.59 0.48 0.40 30 1.63 1.30 1.04 0.85 0.72 1.25 1.00 0.83 0.65 0.55 0.88 0.70 0.46 0.46 0.39 32 1.56 1.25 1.00 0.81 0.69 1.20 0.96 0.77 0.62 0.53 0.84 0.67 0.37 0.44 0.37 35 1.46 1.17 0.94 0.76 0.64 1.13 0.90 0.72 0.59 0.50 0.79 0.63 0.28 0.41 0.35 40 Data C: Correction Factor

CRQ2

S: Upper 90 Lower 180 11-8-6 7 Series CRQ2 Compact Rotary Actuator Rack & Pinion Style Size 20/30/40 TF effective depth TL TA TB 45 BE CA CA CRB2 CRBU2 BU CRB1 MSU 8JJ (Opposite side 4 locations) 2-J through (Opposite side JA counterbore depth JB) BD B CRJ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area:

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

switch: MDSUA3-S CRB2 1) 24: When using D-90/90A/S99/S99V/S9P/S9PV/T99/T99V 30: When using D-97/93A 2) 60: When using D-90/90A/97/93A 69: When using D-S99/S99V/S9P/S9PV/T99/T99V CRBU2 CRB1 MSU CRJ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 CRQ2 15.5 45

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 29 29 30 31 32 34 34 35 36 38 42 42 43 43 44 44 45 46 46 47 48 49 50 50 51 52 54 56 56 57 58 58 59 60 How to Order . Specifications. Construction. Dimensions . Made to Order Specification . Related Products . About New air cushion mechanism.

MGQ

OUT 113 23 34 45 57 68 79 90 102 113 12 6 IN 85 17 26 34 43 51 60 68 77 85 OUT 201 40 60 80 101 121 141 161 181 201 Symbol Specifications 16 8 IN 151 30 45 60 76 91 106 121 136 151 -XA Change of rod end shape OUT 314 63 94 126 157 188 220 251 283 314 Heat resistant cylinder (150C) -XB6 20 10 Low speed cylinder (10 to 50 mm/s) -XB9 IN 236 47 71 94 118 142 165 189 212 236 Intermediate stroke

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

16 Stroke fine adjusting range (mm) Type MLU Side support A MY-S25A MY-S25B MY-S32A MY-S32B MY-S40A MY-S40B RB1412 RB2015 RB2015 Shock absorber model Side support B 58.8 58.8 19.6 Max. absorbing energy (J) ML1C For details about dimensions, etc., refer to page 9-14-9. 15 15 12 Stroke absorption (mm) D1000 1000 1000 Max. collision speed (mm/s) Auto Switch Mounting Bracket Part No. 25 25 45

MLGP

Data Common Dimensions: MLGPM/MLGPL B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) GC ID IE IF IG IH J JA 80 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 139.5 56.5 22 25 61 91.5 15.5 14.5 18 202 240 M12 M14 43 1.5 110 137 18.5 23 7.5 11 30 50 5.5 5.5 Rc 1/8 Rc 1/4 7 15 54.2 45.5 38 45 25 30 19 23 50, 75, 100, 125, 150

RLQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Extension locking LOCK PC PC Rod side cylinder port Rear cylinder port PL unlocking port M8 x 1.25 (Effective thread depth) 18.5 55 Unlocks when pressurized 22.5 2-5.4 through 2 x 2-9 counterbore depth 7 9 7.5 60 6.5 16 45 27 48.1 2-Cushion needle Dust

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL HG HT HS HB HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) K 21 20 JK 10 12 J M6 x 1 M10 x 1.5 HT 19.5 39 HS 27 49.5 HP 44 73.5 HL 38.6 64.9 HI 23 39 HG 8.5 19 HB 8.5 19 HA 19.5 39 H 45

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

TB W Counterbore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60 100

MXH

Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 17 CX 38 39 15 19 10 18 19 18 D5 -X 5.5 10 5.5 5.5 NS 4 209 10.5 8.5 31 + Stroke 39.5 + Stroke 16 Data 4-M3 x 0.5 Depth 4.8 5 + Stroke 10 (mm) Stroke (mm) NS LA LB LT J 5 42 14 10 4 10 42 14 4 10 15 24 52 4 20 20 24 20 52 4 25 62 30 30 4 30 62 30 4 30 40 45

10-cna2w-e

. #8, #9, $2, $4 Rod seal B NBR MBW80-PS 41 $2 43 $4 45 Release piston seal NBR MBW100-PS 40, 41, 43 and 45 to 48 are non-replaceable parts, so they are not included in the seal kit. Cushion seal Urethane Since the lock of the CNA2 series cannot be disassembled and is normally replaced as a unit, kits are for the cylinder section only.

Type: [Fitting] One-Touch / Screw, Fitting Type: Screw Mount Direction, Tube Size 1(φ): 4, Threaded Adapter Shape: [Elbows] Elbow, Body Material: [PBT Resin] PBT+Brass (Electroless Nickel Plating), Application: Standard/Mini, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Packing, Material of O-Ring: [NBR] Standard (NBR), Threaded Adapter Elbow Shape: [45° Elbows] 45