Digital Flow Switch Series PFMB7 2-Color Display ® (200 L type only)

2-Color Display (200 L type only) Digital Flow Switch Series PFMB7 RoHS How to Order PFMB7 201 C8 A M Type Calibration certificate Note 1) Integrated display 7 None With calibration certificate Nil A Rated flow range (Flow rate range) Note 1) Certificate in both English and Japanese Made to Order 2 to 200 L/min 201 Flow adjustment valve Unit specifications Nil S None Yes Unit selection function

® SEMI Thermo-chiller Series HRW Fluorinated Fluid Type

/200 to 208 VAC 10% Max. operating current (A) 26 Breaker capacity (A) 30 Communications Serial RS-485 (D-sub 9 pin) and Contact input/output (D-sub 25 pin) Dimensions Note 9) W15 in (380mm) x D26.2 in (665mm) x H33.9 in (860 mm) Weight Note 10) Approx. 220 lbs (100 kg) Approx. 198 lbs (90 kg) Safety standards UL, CE marking, SEMI (S2-0703, S8-1103, F47-0200), SEMATECH (S2-93, S8-95) Note

Series NCA1

Mounting B MX0 Basic L MS1 Foot F MF1 Front Flange G MF2 Rear Flange R MS4 Side Tapped D MP2 Double Detachable Rear Clevis T MT4 Center Trunnion C MP4 Single Detachable Rear Clevis X MP1 Double Rear Clevis S MS2 Side Lug U MT1 Rod Trunnion J MT2 Head Trunnion Bore Size 150 200 250 325 400 1.5" 2" 2.5" 3.25" 4" Nil S n Nil J K No. of Switches 2 Pieces 1 Piece "n" Pieces For larger bore

(Or None in the Case of No Switch), Auto Switch Mounting Bracket: C (Mounting Bracket)

(Or None in the Case of No Switch), Auto Switch Mounting Bracket: C (Mounting Bracket)

(Or None in the Case of No Switch), Auto Switch Mounting Bracket: C

(Or None in the Case of No Switch), Auto Switch Mounting Bracket: C

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 200, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Non-use of Copper and fluoropolymer-based Material (Partially Plating), End Locking: [Included] Presence, Valves: No, Cushion: Rubber cushion, Operating Pressure

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 200, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Non-use of Copper and fluoropolymer-based Material (Partially Plating), End Locking: [Included] Presence, Valves: No, Cushion: Rubber cushion, Operating Pressure

(Or None in the Case of No Switch), Auto Switch Mounting Bracket: C

Magnet: Built-in, Mounting: Basic Style, Bore Size: 25mm, Stroke: 200mm, Cushion: Rubber Bumper, Rod Boot: None, Lock Style: Lock on Both Sides Locking, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Bracket: Mounting Bracket

Magnet: Built-in, Mounting: Axial Foot, Bore Size: 20mm, Stroke: 200mm, Cushion: Rubber Bumper, Rod Boot: None, Lock Style: Lock on Both Sides Locking, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Bracket: Mounting Bracket

S Couplers

Before restarting the equipment, confirm that measures are taken to prevent sudden action. 7 (5) Make sure to wear safety goggles for regular maintenance. (6) Please check the following points, and replace the parts as necessary. a) Scratches, damage, wear, or corrosion b) Air leakage c) Squeezing, kinking or twisting of the tubing d) Hardening, deterioration or softening of the tubing (7

IDX-OM-W013

IDX-OM-W013-C PRODUCT NAME Refrigerated Air Dryer MODEL / Series IDU3E-10(-C,K,L,M,R,S,T) IDU3E-20(-C,K,L,M,R,T) IDU4E-10(-C,K,L,M,R,S,T) IDU4E-20(-C,K,L,M,R,T) IDU6E-10(-C,K,L,M,R,S,T) IDU6E-20(-C,K,L,M,R,T) IDU3E-23(-C,K,L,R,T,V) IDU4E-23(-C,K,L,R,T,V) IDU6E-23(-C,K,L,R,T,V) This manual is intended to explain the installation and operation of the product.

IDX-OM-W022

IDX-OM-W022-A PRODUCT NAME Refrigerated Air Dryer MODEL / Series IDU8E-10(-C,K,L,M,R,S,T) IDU8E-20(-C,K,L,M,R,T) IDU11E-10(-C,K,L,M,R,S,T) IDU11E-20(-C,K,L,M,R,T) IDU15E1-10(-C,K,L,M,R,S,T) IDU15E1-20(-C,K,L,M,R,T) IDU8E-23(-C,K,L,R,T,V) IDU11E-23(-C,K,L,R,T,V) IDU15E1-23(-C,K,L,R,T,V) Please read this manual prior of using the air dryer. Keep the manual readily available for reference.

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

BBA4: D-C7/C8/H7 "D-H7BAL" switch is set on the cylinder with the screws above when shipped.

S Couplers

Tube deformation ratio at the minimum bending radius = L D 2d 1 x 100 Mandrel Here, : Deformation ratio (%) d : Tube O.D.

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

Rack & Pinion Type Rotary Actuator Series 11-CRA1-Z Size: 30, 50 RoHS How to Order 11 Vacuum suction type Clean series Nil Auto switch No D Built-in magnet B Mounting Basic L Foot Shaft type S Single shaft W Double shaft 30 Size 50 11 C D R A 1 B S 50 90 Z M9B Rotating angle Number of auto switches 90 180 100 90 180 100 190 Nil S 2 pcs. 1 pc. 190 Type of auto switch (For model with auto switch

3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Nil Without port (For manifold) (8A) 1 4 02 Electrical entry Light/Surge voltage suppressor CE-compliant CE-compliant G Grommet, 300 mm lead wire H Grommet, 600 mm lead wire Electrical entry D T C H G Only"D" Symbol Nil S Z C Conduit Note) Note) T Conduit terminal Note) D DIN terminal Symbol S: With surge voltage suppressor Note) Refer to the figure below.

E-P HYREG ® Series VY1

Applicable wire Cord external diameter: 4 to 6.5 c.f. 0.5 mm2 3 core wire (JIS C 3306 equivalent) F.R.L.