AK1000

Single Stage Regulator for General Applications Low to intermediate flow Series AK1000 High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity Standard: to 30 slpm HF (option): to 120 slpm Body material: Stainless steel and Brass available Hastelloy internals available for corrosion resistance How to Order Port Number q w e r t AK10 01 4PL 4 4 S 0 0 Delivery pressure Code Connections

฀AS

Bodysize Metricsize Inchsize 100 200 205 300 400 M3,M5standard 1/8standard 1/4standard 3/8standard 1/2standard Grease-free(Sealant:Fluorocoated)+ Restrictor(WithoutCheckValve) -X21 02 23 04 06 08 10 12 01 03 07 09 11 13 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 2 3.2 Ex.)AS2002F-04-X21 Note)Notparticle-free 4 6 8 10 12 Withone-touchfittings Restrictor(WithoutCheckValve) -X214 Use1/8"tube.

AS

Made to Order Body size 100 200 205 300 400 M3, M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard Grease-free (Sealant: Fluoro coated) + Restrictor (Without Check Valve) -X21 Inch size 01 03 07 09 11 13 Metric size 02 23 04 06 08 10 12 Lock nut option 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 2 3.2 Ex.)

Metering Valve with Silencer Series ASN2

Metering Valve with Silencer Series ASN2 Superior sound reducing performance Over 20 dB at max. flow rate Cylinder speed easily set Shape of needle is the same as that of speed controller Retainer prevents accidental loss of needle Model Model Port size Effective area (mm 2) Weight (g) ASN2-M5 ASN2-U10/32 ASN2-01 ASN2-02 ASN2-03 ASN2-04 M5 x 0.8 10-32 UNF 1.8 1.8 3.6 6.5 16.6 24.5 5 5 17

P

How to Order P 3 3 01 07 X352 AS F 0 U Flow control With residual pressure relief valve (manual), G thread pilot port With pilot check valve Applicable tubing O.D.

Speed Controller: Standard Type In-line Type AS Series

Nil Metric thread (M3, M5) Rc NPT G N F Bore size Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 1/8 1/4 3/8 1/2 AS1000 AS1000 AS2000 AS2000, 3000, 4000, 5000 AS3000, 4000, 5000 AS4000, 5000 650 A

Flame Resistant (Equivalent to UL-94 Standard V-0) Flat Head Screwdriver Adjustable Speed Controller with One-touch Fitting AS  2  1F-W2D Series

With One-touch fitting Port size 01 1/8 02 1/4 03 3/8 04 1/2 Thread type G G thread 1

AZ1000

Single Stage Regulator for Ultra High Purity Low to intermediate flow Series AZ1000 For UHP gas delivery High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity Standard: to 30 slpm HF (option): to 120 slpm Body material: 316L SS Hastelloy internals available for corrosion resistance How to Order Port Number q w e r AZ10 S FV4 FV4 01 2PW Delivery pressure Delivery pressure 1 to

Series GS40 Digital Pressure Sensor

Model GS40-M5 GS40-01 GS40-02 AV Air/Inert gas Fluid AU 3% F.S.

Process Pump (Diaphragm Pump) Body Wetted Parts: Polypropylene/Stainless Steel Built-in Solenoid Valve/Air Operated (External switching type) PB1000A Series

Symbol Nil N F Option Option Symbol Applicable actuation Built-in solenoid valve Air Operated PB1013A Air operated Port size Port size 1/8 Nil B N None With foot With silencer Symbol 01 When option is more than one, suffix in alphabetical order.

PF2A

How to Order Integrated Display Type M PF2A7 10 01 27 Flow rate range 1 to 10 l/min 5 to 50 l/min 10 to 100 l/min 20 to 200 l/min 50 to 500 l/min 10 50 11 21 51 Thread type Unit specification Nil M With unit switching function Fixed SI unit Note) Nil N F Lead wire (Refer to page 35.)

Ionizer IZN10 Series

Ionizer IZN10 Series RoHS How to Order 01 P IZN10 06 High frequency AC nozzle type Without maintenance detector X194 Made to Order Nozzle type Type Energy saving static neutralization nozzle Symbol Refer to page 449. 01 High flow rate nozzle 02 Bracket Female threads for piping Note) Rc1/8 11 Without bracket Nil Note) Nozzle shape: When using the female thread for the piping, connect the

Nozzle Type Ionizer IZN10E Series ®

Nozzle Type Ionizer IZN10E Series How to Order Energy saving static neutralization nozzle 01 P IZN10E 06 Z B1 High flow rate nozzle Female threads for piping High frequency AC nozzle type Bracket Nozzle type Symbol Type Part no.

IZSE_X101

Panel mount adapter ZS-46-B Panel mount adapter + Front protection cover ZS-46-D Lead wire with connector ZS-46-3L 3-core, 2 m, Non-waterproof (Without waterproof cover) Front protection cover ZS-27-01 D Panel mount adapter + Front protection cover ZS-46-D R1/8 Piping adapter ZS-46-N1 NPT1/8 Piping adapter ZS-46-N2 9

IR1000-A/2000-A/3000-A

Precision Regulator IR1000-A/2000-A/3000-A Series How to Order 0 0 0 IR 1 01 BG r t y u e w q A ARJ Option/Semi-standard: Select one each for a to e. Option/Semi-standard symbol: When more than one specication is required, indicate in alphanumeric order.

IR1200-A/2200-A/3200-A

Regulator IR1200-A/2200-A/3200-A Series How to Order 0 2 0 IR 1 01 BG r t y u e w q A ARJ Option/Semi-standard: Select one each for a to e. Option/Semi-standard symbol: When more than one specication is required, indicate in alphanumeric order.

ZSE3/ISE3

LCD Readout Digital Pressure Switch Series ZSE3/ISE3 How to Order Piping specifications Operating pressure range Single mounting R 1/8 Note 1) Nil L 01 T1 0 to 0.98 MPa 0 to 98 kPa Single mounting NPTF 1/8 Note 1) Note 1) M5 x 0.8 female threaded.

KP

Clean One-touch Fittings Series KP How to Order KP H 06 KP P 08 01 Applicable fitting size Port size/Applicable tubing O.D.

KPQ/KPG

KPQ/KPG Series Clean One-touch Fittings How to Order KP H 06 KP P 08 Q 01 KQ2 Applicable fitting size Clean One-touch fittings Made to Order KQB2 04 06 08 10 12 4 6 8 10 12 Specifications X53 With pipe tape Grease-free Symbol Q G KS KX Specifications (metal part materials) Brass (electroless nickel plated) Stainless steel 304 Rubber material: EPDM (Fluorine-coated) X193 Note 1) Gasket: M-

5 Port Pilot Operated Solenoid Valve Series VFR2000 Rubber Seal, Plug-in/Non Plug-in How to Order Option Port size (P, A, B port) Thread type Electrical entry Rc Nil Nil Nil None Without sub-plate F: Plug-in type 01 1 8 F Z G With light/surge voltage supp

Series VFR2000 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in How to Order F: Plug-in type Electrical entry Option Port size (P, A, B port) Thread type Nil F G Rc Nil Z None Nil 01 Without sub-plate 1 8 1 4 With light/surge voltage suppressor 02 N NPT Piping (P, A, B, EA, EB port) T NPTF EA, EB port: Rc 1/8 Nil B Side ported Bottom ported Option SJ 1 00 01 F Plug-in