HRX-OM-W038

2 Names of each part Table 2-1 Accessories list 1 Alarm code list label 1pc. 2pcs. 2 Operation Manual (Jpn: 1pc.

HRX-OM-Y098

*12 130 16 *12 180 16 *12 Maximum lifting height m 50 49 55 49 68 49 0.10 0.10 0.10 0.10 0.10 0.10 Settable pressure range 5 MPa to to to to to to 0.50 0.49 0.55 0.49 0.68 0.49 Circulating fluid system Minimum operating flow rate 6 L/min 20 2 25 2 40 2 Tank capacity L 42 7 42 7 60 7 By-pass (With valve) built-in Electric conductivity setting range S/ cm 0.5 to 45 9 0.5 to 45 0.5 to 45 9

VM

F.O.F. 3.5 mm 1.5 mm 2.0 mm 23 N 2-4.6 mounting hole 5-6-17 16 Series VM100 Series VM100/Bottom Ported Cross roller plunger VM122-M5-07 VM132-M5-07 VM122-M5-07S VM132-M5-07S JIS Symbol 2 port Panel mounting hole Polyacetal or hard steel roller Hexagon nut thick 5, across flats 17 3 port R port (3 port only) 0.5 MPa supply 2-M5 x 0.8 depth 4 2 mm P.T. 23 N F.O.F. 2-4.6 mounting hole 1.5

Table of Contents - Tubing

Tube Reel Tube Stand: TB-2 TB-3VS Vertical Stand Applicable tube size mm Model 4, 6 8 10 12 TBR-1 TBR-2 TBR-3 TBR-4 TB-3VS Vertical Stand Dimension: 37 1/4" W x 27 9/16" D x 68 11/16" H Designed for high capacity and reel size flexibility. This stand comes with two cross bars.

Digital Flow Switches

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

HRX-OM-Y120

and before communication . 2-2 2.2 Communication specification . 2-2 2.3 Contact input signal . 2-5 2.3.1 Setting of contact input signal type and form . 2-5 2.3.2 Run/stopRunStopExternal switch signal . 2-7 2.3.3 External switch signal . 2-8 2.4 Contact output signal . 2-10 2.4.1 Contact output signal 1 to 3 .2-10 2.4.2 Contact output signal 4 to 6 . 2-11 2.5 Analog output signal . 2-14

Low Profile Slide Table Series MXF

to use as operating port 2 x M5 x 0.8 Note) 25 4 N x M3 x 0.5 thread depth 5.5 3H9 +0.025 0 depth 3 (Insert) 8.5 6.5 A 58 6 10.5 45 16 23 16 35 24.5 20 3H9 depth 3 +0.025 0 68 20 10 4 x 3.2 4 x 6.5 5.5 6.5 2 x M3 x 0.5 thread depth 6 25 H 9.8 4 x M4 x 0.7 A Section AA M 10 Operating port 2 x M5 x 0.8 (Table length) 23 0.3 17 N 2 ( 1): The number of pitches 18.5 5.5 J I Z 3 ZZ Max. 10.5

Process Pump

Class Symbol PAF341S 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 PAF541S PAF341S PAF541S tubing size (mm) tubing size (inch ) SMC SMC SMC 4 4 5 5 6 6 1 2 1 2 1 2 4 4 5 5 6 6 A B A B A B 1/2" x 3/8" 3/8" x 1/4" Panel mount union U P 3/4" x 5/8" Union 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" SMC Note) Select the fitting after confirming the IN / OUT side fitting size and fitting type.

VCC

Cleaning unit Note 2) Unit Standard unit (with gate valve) Part number (Mountable valve number) G06 G04 G02 02 04 06 08 10 12 14 16 18 20 40 U side (OUT port side) Stations Note 1) 4 5 2 3 1 Gate 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 39 40 Description/Model 2 port valve 2 port valve (Sliding type) VCC12-00 D side Valve options 2 port valve (Diaphragm type) VCC12D-00 Blanking

7.4

S07 1 2 5 C4 G Connector kit 1 setManifold base part no. 2 setsValve part no. (Stations 1 to 2) 2 setsValve part no. (Stations 3 to 4) 2 setsValve part no. (Stations 5 to 6) 2 setsValve part no.

C95Series

PS MBW50P$ , 63 80 Sel of the No_12, 13, 14 and 16 MBWa:J. PS M8W80PS 100 MBW100-P$ *The seal kit includes 2-Cushion seals, 2-rod seals, , -piston seal, and 2-tube gaskets Air Cylinder/Basic TyPll (Double Acting: Double Rod) Series C95 Basic Mounting/(B) S+Slroke Foot/(L) With Mounting Bracket >!

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Note 1) Body size AS-F AS-F With indicator Metric size Inch size 2 1/8, 1/4 3 3/8 4 1/2 Type Tubing O.D. 23 3.2 Note 2) Tubing O.D. 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" TMH 2 Elbow 04 4 06 6 08 8 10 10 12 12 16 16 ASD Control type Note) AS 0 Meter-out 1 Meter-in Indicator window direction AS-FE Note) Meter-out and meter-in types can be visually identified by color of the knob

Model Selection 1

/N.O./ Double acting Tubing O.D.: 4, 6, 8, 10, 12, 19 mm 1/8, 3/16, 1/4, 3/8, 1/2, 3/4 inch 0 to 0.5 Pilot pressure: 0.3 to 0.5 2 port Suck Back 17-5-3 LVC2/3/4/5 Single unit/Unit 4, 8, 10, 16 Direct operated, Integral fitting type HYPER FITTING 0 to 0.5 Pilot air pressure: 0.3 to 0.5 Tubing O.D.: 3, 4, 6, 8, 10, 12 mm 1/8, 3/16, 1/4, 3/8, 1/2, 3/4 inch N.C.

17

3 #2 !2 @1 !0 @2 @6 #6 #3 @8 #1 @4 o #8 !

EX500

Core wire colors M12 48 1 1 2 3 4 5 2 : DRAIN 6 5 Red: V+ Black: V 16 White: CAN H Blue: CAN L M12 4 3 14.9 Socket connector pin arrangement Connections Terminal no.

AIR COMBINATION

PRECAUTION FOR SAFETY 18 2. APPLICATION 9 3. SPECIFICATIONS. . . 9 4. SERIESMAP AND COMBINATION OF EQUIPMENT. . . 10 5. HOW TO ORDER 1115 6. ATTACHMENTS / ACCESSORIESOPTIONSPART NUMBER 16 7. TROUBLE SHOOTING 16 8. SPARE PARTS LIST 16 9. HOW TO REPLACE 17 10. DISASSEMBLY DRAWING . 1819 11.

Possible to transfer a workpiece at low-speed.

Description Qty. 4 4 4 4 1 1 1 1 Seal Seal Seal Seal 10 10 10 10 1 1 1 1 Gasket Gasket Gasket Gasket Parts included in seal kit 11 11 11 11 1 1 1 1 Gasket Gasket Gasket Gasket 15 Wear ring 15 Wear ring 15 Wear ring 15 Wear ring 4 4 4 4 16 Piston seal 16 Piston seal 16 Piston seal 16 Piston seal 4 4 4 4 25 Seal washer 25 Seal washer 25 Seal washer 25 Seal washer 2 2 2 2 A set includes all

OMR0032

Controller Specifications . 15 3.1 Basic specifications . 15 3.2 Parts description . 16 3.3 External dimensions . 17 (1) Direct mounting (LATCA-) . 17 (2) DIN rail mounting (LATCA-D). 17 3.4 Mounting . 18 (1) Mounting. 18 (2) Connection to ground . 18 (3) Mounting location. 19 4.

MXF

Body tapped Stroke (mm) Model Reed switch D-A9, D-A9V 10 20 30 50 75 100 MXF8 8 Solid state switch D-M9, D-M9V MXF12 12 2-color indication solid state switch D-F9W, D-F9WV MXF16 16 MXF20 20 8-6-1 2 Low Profile Slide Table Series MXF 8, 12, 16, 20 How to Order MXF 12 50 M9N S Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

MLGP

Step (2) 1.