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High Vacuum Angle Valve

Heater: Indicator: 418 B XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79

Aluminum High Vacuum Angle Valve

Heater: Indicator: 418 A XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79

Slit Valve XGT Series

Valve type 1 Non-cassette type 2 Cassette type Standard Cassette type Half MESK Cassette type Full MESK 3 4 Symbol XLA Valve type XL XLQ Made to Order specifications (For details, refer to page 534.)

High Vacuum Angle Valve

Chemraz is a registered trademark of Greene, Tweed Technologies, Inc. 4 XLA/XLA V Series Specifications Model XLA(V)-16-2 XLA(V)-25-2 XLA(V)-40-2 XLA(V)-50-2 XLA(V)-63-2 XLA(V)-80-2 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature [C] XLA 5 to 60 (High-temperature type: 5 to 150) XLAV 5 to 50 Operating pressure [Pa(abs)] 1 x 106

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Modular Type Filter Regulator Series AW

Note 2) Symbol Nil B C D E G H Applicable model AW20K to 40K AW20K to 40K AW30K, 40K AW20K to 40K AW20K to 40K AW20K to 40K Port size Body size Symbol Port size 20 30 40 Float type auto drain (N.O.)

High Vacuum Angle Valve, XL Series

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

XL

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

XLAQ/XLDQ

Chemraz Example) XLDQ-40K-M9NA-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 The material for the sliding parts of the S valve is FKM.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

(or within 3 kPa ) 1/8 ARP ARP 1/4 For 0.2 MPa setting With backflow function (ARP20K/30K/40K) 3/8 IR 1/2 Installable between a solenoid valve and a cylinder : Standard : Semi-standard IRV Direct operated precision regulator now available as a series!! (ARP20/30/40) VEX SRH SRP Applications Applications SRF a Apply a constant pressure to fluid. b Adjust the blow-line pressure.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

(or within 3 kPa ) 1/8 ARP ARP 1/4 For 0.2 MPa setting With backflow function (ARP20K/30K/40K) 3/8 IR-A 1/2 Installable between a solenoid valve and a cylinder : Standard : Semi-standard IR Direct operated precision regulator now available as a series!! (ARP20/30/40) IRV VEX SRH Applications Applications SRP a Apply a constant pressure to fluid. b Adjust the blow-line pressure.

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

ARP30-02BE1 Construction Bleed type Weight (kg) Note 4) 0.2 0.5 0.3 Note 1) When a product with backflow function (ARP20K to 40K) is chosen, set the inlet pressure 0.05 MPa or higher than the set pressure. Note 2) For the type set to 0.2 MPa only, repeatability will be within 3 kPa. Note 3) Port thread is not provided for products with square embedded-type pressure gauges.

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

XLA XL XLQ XLQ y Body surface treatment/Seal material and its changed part Bodysurfacetreatment Part numbers indicating changed seal material and leakage XM XY Surface treatment External: Hard anodized Internal: Raw material External: Hard anodized Internal: Oxalic acid anodized Symbol Nil A Note 2) Leakage Pam3/s or less Note 1) Changed part None w, e w e Symbol External 1.3 x 10-10 (FKM

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

ARP30-02BE1 Construction Bleed type Weight (kg) Note 4) 0.2 0.5 0.3 Note 1) When a product with backflow function (ARP20K to 40K) is chosen, set the inlet pressure 0.05 MPa or higher than the set pressure. Note 2) For the type set to 0.2 MPa only, repeatability will be within 3 kPa. Note 3) Port thread is not provided for products with square embedded-type pressure gauges.

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

flange surface Right flange surface Left flange surface Right flange surface Flange side Flange side Left flange surface Rear flange surface Right flange surface Left flange surface Rear flange surface Right flange surface Nil Left flange surface A F J K M With indicator With indicator Without indicator Without indicator Flange side Flange side t Auto switch type r Temperature specifications XLA

XM, XY

Stainless Steel High Vacuum Angle/In-line Valve XM, XY Series Angle type/ XM Series XY Series In-line type XY Series XM Series XLA XL XLQ Body material: SCS13 (conforms to Stainless steel 304) A precision casting, unified composition prevents accumulation of gas. The XM series is interchangeable with the XL series, aluminum high vacuum angle valve.

Modular Style Regulator with Built-in Pressure Gauge Series ARG

Note 2) Check valve assembly contains check valve, check valve cover and its screws (2 pcs). 27 Series ARG20K/30K/40K Construction F E Port size D A C IN OUT SMC G R B Q Set nut (Option) S P T N M Bracket (Option) Panel fitting dimension K J IN OUT L H P K U C S O H L to Plate thickness ARG20K to 40K: Max. 3.5 Standard specifications Accessory specifications Panel mount Bracket mount A Model

Smooth Vent Valve

Chamber XLA XL XVD By switching to the main valve circuit, the main valve opens and the full amount is introduced into the chamber. XLQ Chamber XM XY DXSA XVD XVD XGT CYV 523 XVD Series Specifications Model XVD2-02V XVD2-02S Valve type Normally closed (Pressurize to open, Spring seal) Fluid Nitrogen, Air, Inert gas, etc.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

It can damage the pressure gauge. 1099 Series ARP20/30/40 Series ARP20K/30K/40K Specific Product Precautions 2 10 21 10 21 Be sure to read this before handling. Refer to page 1382 for Safety Instructions. Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F. R.