Part Number Description: INTERNAL O-RING FOR XLAQ-25 Product Line: Z Product Line Description: VACUUM SERIES Click here to report information errorImage shown may not match exact part number
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
This is a legacy product. Please contact us for the latest version.sales@ocaire.com
High Vacuum Angle Valve Heater: Indicator: 418 B XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79
Heater: Indicator: 418 A XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79
Valve type 1 Non-cassette type 2 Cassette type Standard Cassette type Half MESK Cassette type Full MESK 3 4 Symbol XLA Valve type XL XLQ Made to Order specifications (For details, refer to page 534.)
Chemraz is a registered trademark of Greene, Tweed Technologies, Inc. 4 XLA/XLA V Series Specifications Model XLA(V)-16-2 XLA(V)-25-2 XLA(V)-40-2 XLA(V)-50-2 XLA(V)-63-2 XLA(V)-80-2 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature [C] XLA 5 to 60 (High-temperature type: 5 to 150) XLAV 5 to 50 Operating pressure [Pa(abs)] 1 x 106
For Water Digital Flow Switch Series PFW How to order PFW7 20 03 27 Integrated display type Flow rate range 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 04 20 40 Unit specification Thread type Nil M With unit switching function Fixed SI unit Note) Rc NPT G Nil N F Wiring specification Note) Fixed units: Real-time flow rate: l/min Accumulated flow: l 3m lead wire with connector Without lead wire
1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric
XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric
MHC2-16l Note) When signal acting type is used, one side port is bleed port and adjusting needle for finger speed is not attached. When auto switch is used, through hole mounting type is not available.
MHY2 MHW2 MRHQ Limitations of Holding Point Auto switch MHK2-12l MHKL2-12l MHK2-16l MHKL2-16l MHK2-20l MHKL2-20l MHK2-25l MHKL2-25l 120 60 100 60 Overhang distance H (mm) Overhang distance H (mm) Overhang distance H (mm) Overhang distance H (mm) 100 50 50 Pressure 0.2MPa 80 Pressure 0.2MPa 40 40 80 Pressure 0.2MPa Pressure 0.2MPa 60 30 30 60 0.3MPa 0.4MPa 0.5MPa 0.6MPa 0.3MPa 0.4MPa 0.5MPa
XLA XL XLQ XLQ y Body surface treatment/Seal material and its changed part Bodysurfacetreatment Part numbers indicating changed seal material and leakage XM XY Surface treatment External: Hard anodized Internal: Raw material External: Hard anodized Internal: Oxalic acid anodized Symbol Nil A Note 2) Leakage Pam3/s or less Note 1) Changed part None w, e w e Symbol External 1.3 x 10-10 (FKM
flange surface Right flange surface Left flange surface Right flange surface Flange side Flange side Left flange surface Rear flange surface Right flange surface Left flange surface Rear flange surface Right flange surface Nil Left flange surface A F J K M With indicator With indicator Without indicator Without indicator Flange side Flange side t Auto switch type r Temperature specifications XLA
0) XLA Pilot port S (for initial exhaust valve) Magnet (Option) XL Pilot port M (for main exhaust valve) Bellows holder (Material: Stainless steel 304) !
Stainless Steel High Vacuum Angle/In-line Valve XM, XY Series Angle type/ XM Series XY Series In-line type XY Series XM Series XLA XL XLQ Body material: SCS13 (conforms to Stainless steel 304) A precision casting, unified composition prevents accumulation of gas. The XM series is interchangeable with the XL series, aluminum high vacuum angle valve.
NPT, G) 1/8 1/4 3/8 1/2 11/2 1 2 Switch output Analog output Accumulated pulse output Display unit Sensor unit PF2A710 750 711 721 751 703H 706H 712H PF2A510 550 511 521 551 1 to 10 PF2A30 5 to 50 10 to 100 31 20 to 200 50 to 500 150 to 3000 300 to 6000 600 to 12000 : Output from integrated display type and remote display unit type : Output from remote sensor unit type For Water P.12 16l
Chamber XLA XL XVD By switching to the main valve circuit, the main valve opens and the full amount is introduced into the chamber. XLQ Chamber XM XY DXSA XVD XVD XGT CYV 523 XVD Series Specifications Model XVD2-02V XVD2-02S Valve type Normally closed (Pressurize to open, Spring seal) Fluid Nitrogen, Air, Inert gas, etc.