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If it is 10 L/min, there is a flow of 10 L passing through the device in 1 minute. The voltage drop across the product (and therefore not applied to the load), when the switch output is ON. The voltage drop will vary with load current, and ideally should be 0 V.

Fig. 9 Normal output OFFt0 Fig. 10 Sequence OFF0 Fig. 11 Sequence 6. Cascade connection There are only outputs up to 10 points (6 points in the case of VXFC06A) on a single board. However, it is possible to increase the output points by cascading (multiple board connection).

Pressurizing the air blow discharge port may result in the breakage of the product. 10 Revision history A: Specification and Notes added 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation

Vale specifications Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for

Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding

Vale specifications Model XLC-25 XLC-40 Flange (valve) size 25 40 Actuating type Double acting/ activated by applying pressure Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 14 45 Leakage Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Pam3/

Specifications Table 4 Model Note 1 XMH-16 XMH-25 XYH-25 XMH-40 XYH-40 XMH-50 XYH-50 Flange (valve) size 16,CF034 25 40,CF070 50 Actuating type Manual Fluid Inactive gas under vacuum Operating temperature oC 5 to 150 Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 2 5 14 45 80 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures ,

ON 23 4. 10. 24 5. 1 CG5SR CG5SV 2 15 3 16 NBR FKM 4 17 5 18 6 19 7 20 PET 8 21 9 22 10 11 12 13 14 1CG1 2 11. 25 Revision history 1: 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of

OFF (OFF) 1. 2. 60 21 - 10. 22 - 23 - B 24 - A RS2H-OM0044PRS2H-OM0045P 12 B 17,24 9 C C +86-10-67885566 : 08:0017:00() SMC() URL http://www.smc.com.cn 2 100176 +86-20-28396516 : 08:4517:30() SMC() URL http://www.smcgz.com.cn 3 2 510660 +81-3-5207-8249 Fax: 81-3-5298-5362 : 09:0017:00() SMC URL http://www.smcworld.com /101-0021 4-14-1 2017 SMC Corporation All Rights Reserved

20800 10400 Speed[mm/s] Pushing speed[mm/s] 20~30 10~30 5~30 2030 1030 2030 1030 actuator specification Max.acceleration/ 10 Horizontal Vertical 2] 5000 deceleration[mm/s Position repeatability [mm] 0.01 note4) 0.1 or less Lost motion [mm] Screw Lead [mm] 10 5 2.5 12 6 16 8 Impact / Vibration note5) 50/20 2] resistance [m/s Actuation type Ball screw (In-Line) Ball screw + Belt (Parallel)

Refer to page 8 to 10. Please note that the graph should only be used as a guide as there is a tolerance of about 10% in the clamp cylinder body.

1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Leakage Pam3/s External 1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Flange type KF(NW) KF(NW),K(DN) Main material Body : Aluminum alloy, critical part : SUS304, FKM (standard seal material) Note 2 Surface treatment for body Outside: hard anodized Inside

ft diagEm E : With indicator light and surco voltage suppssor i e l s I 3 14' 6 , ' , Lr 2.09 (s3) 2.72 (6e) 3.35 (85) 3.98 (101) 4.61 (117) 5.24 (i33) (i4e) 6.50 (165) (i&) (197) 8.39 (2|3) (?

6 TUZ0805 8 TUZ1065 10 TUZ1208 Tubing O.D.

The grease can be ordered tool can be ordered by part no. shown on Table 6. by the following part no. <6, 10> 1) Inner side of cylinder tube A 2) Outer side of cylinder tube and sliding side of switch rail Table 6 Part no. of specific tool Part on. Applicable cylinder tube I.D.

A5 A5 A6 A6 A7 A7 Internal Internal A8 A8 resistance resistance 10[k ] 10[k ] 24 VDC 24 VDC A9 A9 Main circuit Main circuit power supply power supply for the input for the input A10 A10 signals signals B1 B1 B2 B2 B3 B3 B4 B4 B5 B5 Maximum output Maximum output B6 B6 current: 10 mA current: 10 mA B7 B7 Pulse input internal circuit Note2) B8 Pulse input internal circuit Note2) B8 Pulse input

0.5 ON:SEC OFF:MIN 0.5 4-2-4 7 25 Y92S-36/CR2477/ 0 MEMO h (h) IDF100150F 4-2 4 4 IDX-OM-U021 4 , OFF [] IDF100150F 4-2 4 5 IDX-OM-U021 4 (+,-) 0 IDF100150F 4-2 4 6 IDX-OM-U021 5 5 5-1 3 ON OFF (R) OFFON 3 2 R T 5.2 60cm 1 5.2 5.2 10% 5.2 IDF100150F 5-1 5 1 IDX-OM-U021 5 ( ) ( ) 60cm 1 10% 3 ( ) 60cm 1 2 IN OUT INOUT () 424 IDF100150F 5-1 5 2 IDX-OM-U021

Description Material Note 1 Body A PBT 2 Body B PBT 3 Needle PBT 4 Indicator 5 Stopper Stainless-steel 6 Needle guide Brass Electroless nickel Plated 7 Disk seal HNBR 8 Stud Brass Electroless nickel Plated 9 O-ring NBR 10 O-ring NBR 11 O-ring NBR 12 O-ring 13 Seal NBR 14 Seal NBR 15 O-ring NBR Meter-in type only 13 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel

Connection thread size Maximum number of rotations of the indicator M5, 10-32UNF 8 rotations 1/8 10 rotations 1/4 9 rotations 3/8 8 rotations 1/2 10 rotations 6 - Caution (1)When performing the piping work, turn the tightening tool in the horizontal direction to the hexagon across flats of the body B so that any moment is not applied to the body.