Vacuum Unit Ejector / Vacuum Pump System

Maintenance 41 8.1. Maintenance 41 8.2. Replacement Procedure 42 9. Specifications 47 10. Port Layout 52 11. Exhaust/Flow Rate Characteristics 62 11.1. Ejector Exhaust Characteristics/Flow Rate Characteristics 62 11.2. Vacuum Pump Flow Rate Characteristics 64 11.3. Vacuum Release Flow Rate Characteristics 64 12. Limitations of Use 66 13. Troubleshooting 67 -1No.

Programless controller Step motor (servo 24 VDC)

(m) (n) 41 No. JXC-OMU0029-A 7.4 Test function The table below shows the difference between normal (f) (e) (c) operation and test function in manual mode. To start the test function, set the position switch (h) to "0" while the power LED (a) (a) is lights up (= Servo ON) in manual mode and the electric actuator stops, and press the set button (g) for 3 seconds.

Digital Pressure Switch

Function Setting 24 Function selection mode 24 Default setting 24 F0 Units selection function 26 F1 Setting of OUT1 27 F2 Setting of OUT2 30 F3 Response time 30 F4 Display resolution 31 F5 Auto-preset function 32 F6 Fine adjustment of display value 34 F7 Power saving mode 35 F8 Security code 36 Special function setting 37 F90 Setting of all functions 37 F97 Copy function 39 F98 Check of output 41

High Vacuum L Type Valve

As this product has pressure balanced construction, the exhausting direction is free. 8 XL*-OMI0013-B 5.Dimensions 26 41 K J 72 53010 OPERATION INPUT K J V L C B 39 C B 69 XLS-**-P*G (with control power supply) XLS-**-P*G () L G1/2 D XLS-**-** (without control power supply) DIN terminal (D) DIN( D ) XLS-**-** () E D F K2 J L 27010 J M 29010 J K 33 25 G1/2 G1/2 C G C C B B B A A Terminal (

XMA/XYA Series

110 83 96 D G C XYA Series / Straight Valve C B Fd (K Flange) 45 H Fn (KF Flange) A E Unit: mm Model n Fd XYA-25 100.2 79.5 48 1 23.5 40 26 64 XYA-40 130 106 66 2 38 55 41 84 XYA-50 178 119 79 2 53 75 52 95 XYA-63 209 149 100 3 61 87 95 70 118 XYA-80 268 178 117 3 80 114 110 83 142 9 XM-OMP0001-A 5.

Title not found

MEM MEM 5/8 41/64 27/32 1 1/8 3/8 MEM 1/4 Typ. Slim line coupler not shown 5/8 27/32 1 1 C6 C2-SL C2 C4 C8 C6 C3 C1 C5 C2 1/2 C7 C3 1/2 Reducing Couplings not shown Note not shown not shown 1 1/8 7/16 Dia. 3/8 Dia. Typ. 3/8 Dia. 5/16 Dia. Typ. 1/4 Dia.

1.63

MGPWM Common Dimensions (mm) A E Standard stroke (mm) Bore size (mm) B C DA DB FA FB G GA GB H J K L 50 st or less Over 50 stroke 50 st or less Over 50 stroke 20 25 32 40 50 63 44.5 47 52 56 60.5 67.5 34 35 37 41 42 49 10 10 14 14 18 18 10 12 16 16 20 20 7.5 9 10 10 12.5 12.5 3 3 5 5 6 6 36 42 48 54 64 78 9.9 10.3 11.4 13.5 14 15.5 7.5 8.7 9 10.5 11.1 13.5 137 157 190 206 258 286 18 21 24

MHC2

MHT 41 mm x 20 mm x 10 mm 19 g Port MHY With 4 hose nipple MHW MRHQ Misc. Port MHCM2-7S Smallest size and lightest weight in MHC series.

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

M5 x 0.8 thread depth 7 (Mounting thread) 17 60 4 x M5 x 0.8 thread depth 10 (Mounting thread) Bottom through hole dia. 4.2 (Mounting hole) 45 2 x M5 x 0.8 thread depth 10 (Mounting thread) 35 23 26 27 36 18 23 7 2 21H9 +0.052 depth 3 0 +0.2 +0.1 12 16 36 26 4 x M4 x 0.7 thread depth 5 M5 x 0.8 (Finger closing port) (Thread for mounting attachment) Auto Switch Mounting Groove Dimensions 41

ML2B

For details, refer to page 10-20-41. Reed switch D-X 20Data 10-13-17

Transfer

Hexagon socket head taper plug) F I B + Stroke 2 x PA (Port for operating cylinder) J J J J D D II 2 x MB, Depth LB II 2 x PB (Hexagon socket head taper plug) 2 x PB (Hexagon socket head taper plug) JJ 28 32 36 A 110 140 170 B 220 280 340 C 206 264 322 D 42 51 59 E 138 168 204 G 30 37 45 H 73 88 106 I 76.5 91 110 J 40 46.5 55 K 46 58 68 L 45.5 54 64 M 30.9 32.4 41.5 N 16 15 19 O 69 84 102 P 41

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

9 Rod seal NBR Basic (B) CM2QB Bore size Stroke (mm) Stroke range 1 to 300 1 to 300 1 to 300 1 to 300 S 65 65 67 91 N 15 15 15 21.5 Bore A 18 22 22 24 B2 26 32 32 41 D 8 10 12 14 H2 8 8 8 10 I 28 33.5 37.5 46.5 ZZ 119 123 125 157 NA 24 30 34.5 42.5 AL 15.5 19.5 19.5 21 E F 13 13 13 16 K 5 5.5 5.5 7 NN M20 X 1.5 M26 X 1.5 M26 X 1.5 M32 X 2 B1 13 17 17 22 G 8 8 8 11 MM M8 X 1.25 P 1/8 1/8 1

MHC2

MHT 41 mm x 20 mm x 10 mm 19 g Port MHY With 4 hose nipple MHW MRHQ Misc. Port MHCM2-7S Smallest size and lightest weight in MHC series.

MK

Model A G I J Q U X T B H K L O V Yh9 Z C P D E R F 0 0.062 0 0.062 0.1 0.2 0.1 0.2 0.1 0.2 0.1 0.2 0.15 0.15 MKB32 31.5 9 Depth 7 M10 X 1.5 93.5 71.5 Rc(PT)1/8 37 45 5.5 12 16 3 7.5 60 18 6.5 34 4.5 54 14 0.15 20 0.15 7 30 MKB40 65 29.5 35 9 Depth 7 M10 X 1.5 94.5 Rc(PT)1/8 52 5.5 12 16 3 8 69 18 6.5 40 5 61 14 24 7 30 0 0.062 0 0.062 0.15 0.15 MKB50 11 Depth 8 M12 X 1.75 112 76.5 34 10.5 41

MRQ

stroke) /2 66 ( 65 stroke) /2 71 ( 75 stroke) /2 68.5 ( 90 stroke) /2 73.5 (100 stroke) /2 68 ( 5 stroke) /2 68 ( 10 stroke) /2 70.5 ( 15 stroke) /2 68 ( 20 stroke) /2 70.5 ( 25 stroke) /2 68 ( 30 stroke) /2 70.5 ( 40 stroke) /2 75.5 ( 50 stroke) /2 75.5 ( 65 stroke) /2 80.5 ( 75 stroke) /2 78 ( 90 stroke) /2 83 (100 stroke) /2 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41

Table of Contents

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% Conditions Body ported Series CJ2 Series CM2 Series MB, CA1 T0425 x 1 m Tube bore x Length VQ0149-C4 Speed controller AS2001F-04 AN103-X233 Silencer Tube bore x Length T0604 x 1 m 30 41 VQ11 -C6 Speed controller AS3001F-06 Silencer AN103-X233 T0806 x 1 m Tube bore x Length VQ2149-C8 Speed controller AS3001F-08 Silencer AN200-KM8

Thomas Oil-less Diaphragm Compressor / Vacuum Pump Flow Rate: 1.45 CFM / 41 LPM , 1.45 CFM / 41 LPM, Max Pressure: 35 PSIG / 2.4 bar , 35 PSIG / 2.4 bar, Max Vacuum: 22.4 in HgV / -760 mbar , 22.4 in HgV / -760 mbar, Voltage (DC): 12, Item Dimensions: Length: 7.17 in / 182 mm Width: 4.25 in / 108 mm Height: 4.68 in / 119 mm , Length: 7.17 in

AIR SLIDE TABLE

46.9 32.9 71.9 71.9 16 Solid state switch A Stroke Stroke Model 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6(A) 16 5.4 5.4 5.4 5.4 14 14.6 17.6 19.6 19.6 MXQ8(A,C) 11.9 11.9 11.9 11.9 11.9 11.9 19.1 19.1 19.1 25.1 42.1 19.1 MXQ12(A,C) 14.5 14.5 14.5 14.5 14.5 14.5 14.5 28.1 20.1 20.1 28.1 28.1 47.1 47.1 MXQ16(A,C) 18.6 18.6 18.6 18.6 18.6 18.6 18.6 18.6 34 28 28 35 35 41

CU 6 6 Built-in magnet Bore size 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Port thread type Symbol Nil TN TF Type M5 x 0.8 Rc 1/8 NPT 1/8 G 1/8 Bore size ø6, ø10, ø16, ø20, ø25 ø32 ø32 ø32 30 Standard stroke (mm) ø6, ø10, ø16 ø20, ø25, ø32 5, 1

(g) Cylinder stroke (mm) Model 5 10 15 20 25 30 40 50 22 (27) 25 (35) 28 (38) 31 (41) 34 (44) 37 (47) C(D)U6-D When mounting Series CU, refer to the below table. Tightening Torque/ 36 (41) 40 (50) 44 (54) 48 (58) 52 (62) 56 (66) Bore size (mm) Hexagon socket head cap screw dia.

Rotary Table/Vane Style Series MSU

Adjustment: Max.10.2 2 x M5 x 0.8 1.5 7 3 x 4H9 long groove depth 3 +0.030 0 B port A port 0.5 ( A , B , C ) 4 x M5 x 0.8 depth 10 6g6 0.004 0.012 14h9 0 0.043 42 0 0.062 48h9 41 158 Series MSUA Rotary Table: High Precision Type Vane Style These drawings indicate the condition when the B port is pressurized.