The ARP is a modular style, direct operated precision regulator.  A locking adjustment knob allows the pressure to be set, and then locked to prevent accidental setting changes. The ARP20/30/40 series is available with a back flow function that exhausts the air pressure in the outlet side reliably and quickly.  Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free

The ARP is a modular style, direct operated precision regulator.  A locking adjustment knob allows the pressure to be set, and then locked to prevent accidental setting changes. The ARP20/30/40 series is available with a back flow function that exhausts the air pressure in the outlet side reliably and quickly.  Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free

PFxx-OMJ0005CN

min 0.525 L/min 150 L/min 2100 L/min () CO2 0.25 L/min 0.512.5 L/min 125 L/min 250 L/min N2Ar 0.210.5 L/min 1 0.526.3 L/min 152.5 L/min 2105 L/min 2 CO2 0.25.2 L/min 0.513.1 L/min 126.2 L/min 252 L/min N2Ar 010.5 L/min 1 026.3 L/min 052.5 L/min 0105 L/min 2 CO2 05.2 L/min 013.1 L/min 026.2 L/min 052 L/min / 0.01 L/min 0.1 L/min 0.1 L/min 0.1 L/min / 3 09 L / 1 L 0.1 L/Pulse 0.1 L/

Rated Control Flow Range: 11 (1 to 100 L/min), Port Size: C6 (6mm), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: Unit Specification, Bracket: R (Bracket (mounting position: Side), Operation Manual/Calibration Certificate: T (Calibration

Rated Flow Range: 10 (0.1 to 10 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: C6 (ø6), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: A (Calibration

Rated Flow Range: 10 (0.1 to 10 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: C6 (ø6), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve), Calibration

Rated Flow Range: 01 (0.01 to 1 L/min), Flow Adjustment Valve: None (Straight), Port Size: C6 (ø6), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve), Calibration Certificate: A (Calibration

Series: 25A-PFM7, Flow Rate Range: 10 [0.2 to 10 (5) L/min], Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: D [1 NPN Outputs + Analog (4 to 20 mA)], Unit Specification: Unit Switching Function, Operation Manual: With Instruction Manual, Calibration Certificate: None, Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon

Series: 25A-PFM7, Flow Rate Range: 25 [0.5 to 25 (12.5) L/min], Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: A (2 NPN Outputs), Unit Specification: Unit Switching Function, Operation Manual: With Instruction Manual, Calibration Certificate: None, Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber), Option:

Type of Actuation: 3 (3 Position Closed Center), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: LO (L Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: U (Surge Suppressor w/Light Non-polar), Manual Override: Non-locking Push Style, A, B Port Size: C6 (Body Ported ø6 One-touch Fitting)

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: LO (L Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: E (Push-turn Locking Lever Style), A, B Port Size: C6 (Body Ported ø6 One-touch Fitting), Thread

Type of Actuation: 5 (3 Position Pressure Center), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: LO (L Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: U (Surge Suppressor w/Light Non-polar), Manual Override: Non-locking Push Style, A, B Port Size: C6 (Body Ported ø6 One-touch Fitting

Type of Actuation: 2 (2 Position Double), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: LO (L Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: U (Surge Suppressor w/Light Non-polar), Manual Override: Non-locking Push Style, A, B Port Size: C6 (Body Ported ø6 One-touch Fitting), Thread

Type of Actuation: 3 (3 Position Closed Center), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: LN (L Plug Connector w/o Lead Wire), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: C6 (Body Ported ø6 One-touch Fitting)

Type of Actuation: 4 (3 Position Exhaust Center), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: T (Power Saver), Voltage: 5 (24VDC), Electrical Entry: LO (L Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: C6 (Body Ported ø6 One-touch Fitting),

Type of Actuation: 2 (2 Position Double), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: LO (L Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: D (Push-turn Locking Slotted Style), A, B Port Size: C6 (Body Ported ø6 One-touch Fitting), Thread

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 3 (110VAC 50/60HZ), Electrical Entry: LO (L Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: C6 (Body Ported ø6 One-touch Fitting), Thread

Type of Actuation: 2 (2 Position Double), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: LN (L Plug Connector w/o Lead Wire), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: C6 (Body Ported ø6 One-touch Fitting), Thread

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: LN (L Plug Connector w/o Lead Wire), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: C6 (Body Ported ø6 One-touch Fitting), Thread

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: LO (L Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: U (Surge Suppressor w/Light Non-polar), Manual Override: Non-locking Push Style, A, B Port Size: C6 (Body Ported ø6 One-touch Fitting), Thread