Stations: 4 Stations, Exhaust Style: Individual Exhaust, A Port Size: 1/4 Individual Exhaust, Thread: Rc
Stations: 3 Stations, Exhaust Style: 2 (Common Exhaust), A Port Size: 02 (1/4 Individual Exhaust), Thread: Rc
Stations: 12 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 02 (1/4 Individual Exhaust), Thread: Rc
Stations: 6 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 02 (1/4 Individual Exhaust), Thread: Rc
Stations: 9 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 02 (1/4 Individual Exhaust), Thread: Rc
Stations: 3 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 02 (1/4 Individual Exhaust), Thread: Rc
Stations: 8 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 02 (1/4 Individual Exhaust), Thread: Rc
Stations: 2 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 02 (1/4 Individual Exhaust), Thread: Rc
Stations: 4 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 02 (1/4 Individual Exhaust), Thread: Rc
Reference: 1 [L/min] = 0.2642 [gal/min] 1 [gal/min] = 3.785 [L/min] Thread type Symbol Type Nil Rc N NPT F G The close proximity setting and zero-reset setting functions are only available for the integrated display type. For the remote type sensor unit, the close proximity setting and zeroreset setting functions cannot be used. Option/Part No.
ON/OFF / / 2 3 3 2 1 2 / -20- 3.3. [] LEC LEC / P.32 5.3 <> NPNPNP LEFS16A-100 NPN <> INPIN []INP ON ON INP ON OFF -21- <> No.1 01 a b c d e f g h i j k a ABSINC No. 1 2 mm/s mm mm/s2 mm/s2 % % mm/s % mm mm mm 0 ABS 250 50.00 3000 3000 0 0 0 100 48.00 50.00 0.50 1 ABS 250 0.00 3000 3000 0 0 0 100 0.00 2.00 0.50 ABS()/ / INC()// b c d e f 00 g h i 100%DC24V 250% j 12
RWwn+18 (LEC)7.1 RWwn [bit0-7]1 (LEC) (RWrn+8[bit 8])1 INP(Rx8B)1 INP (LEC*6)6.3 IO RWwn [bit0-7]0(RWrn+8[bit 8])0 () INP 31 - 11.4 (LEC) IO No (LEC*6) IO IO (LEC) RWwn [bit8-F]0 RWwn+18 (LEC)7.1 RWwn [bit0-7](063) RWwn [bit8-7](LEC) (RWrn+8[bit 8])1 RWwn [bit8-F]0(RWrn+8[bit 8])0 32 - 12. 12.1 [IN] () IO ID No Rx00Rx2F Modbus Rx30Rx7F Rx80 OUT0 Rx81 OUT1 Rx82 OUT2 Rx83 OUT3
(Fluid: Dry air) Analog output: 3% F.S. 1% F .S. (PF2A7 0) 2% F .S. (PF2A7 1) 1% F.S. (Fluid: Dry air) Monitor unit 1% F.S. 1% F.S. (Fluid: Dry air) Monitor unit Monitor unit Monitor unit 0.1% F.S. 1% F.S. 0.1% F.S. 0.1% F.S. 0.1% F.S. (Fluid: Dry air) Analog output: 5% F.S. Analog output: 0.5% F.S.
Display accuracy 0.5% F .S. 1 digit (Ambient temperature of 25 3C) Repeatability 0.1% F .S. 1 digit Accuracy Temperature characteristics 0.5% F .S.
F I D M E Z K M E J B + Stroke A + Stroke L Note) The auto switches above are shown for a D-M9(W) solid state auto switch.
Regeneration SF SFD Electric circuit Time chart LLB Power supply (refer to How to Order) Power supply (refer to How to Order) AD Inlet air temperature (C) (Saturation) 1 cycle 1 cycle SW F SOL.1 SW F SOL.1 LS1 LS1 GD IDseries Adsorbent/Silica alumina gel ID-Z series Adsorbent/Permutite SV SV SOL.2 LS2 SOL.2 LS2 SV SV R M M PL PL For ID05, ID06 For ID00, ID01 Symbol Description Description
How to Order Valves VQ1 1 0 5 F Manual override Nil B Non-locking push type (Tool required) Locking type (Tool required) Series VQ Compact 3 port valve Option Type of actuation Electrical entry 1 2 Note) Normally closed Normally open Plug-in With light/surge voltage suppressor (Only for plug-in manifold) F Note) Normally open type is available only with standard type. (1 W) Function Coil
-02/03 3 (Exhaust center) Rc 1/4: 17 VH302-02/03 VH312-02/03 2 (Position) 1 (P) 3 (R) 2 1 VH3 0.71 1/4, 3/8 VH320-02/03 VH330-02/03 3 (Closed center) Rc 3/8: 20 Exhaust center VH321-02/03 VH331-02/03 3 (Exhaust center) (A) 2 (B) 4 VH322-02/03 VH332-02/03 2 (Position) 12 3 4 VH400-02 to 06 VH410-02 to 06 3 (Closed center) 1 (P) 3 (R) Rc 1/4: 45 4 3 VH401-02 to 06 VH411-02 to 06 3 (Exhaust
3 (R) 4 3 3 (Exhaust center) VH301-02, 03 VH311-02, 03 Rc1/4: 17(0.9) Exhaust center 2 (Position) VH302-02, 03 VH312-02, 03 2 1 (A) 2 (B) 4 VH3 1/4, 3/8 0.71 3 (Closed center) VH320-02, 03 VH330-02, 03 Rc3/8: 20(1.1) 1 (P) 3 (R) 3 (Exhaust center) VH321-02, 03 VH331-02, 03 2 (Position) VH322-02, 03 VH332-02, 03 12 3 4 3 (Closed center) VH400-02 to 06 VH410-02 to 06 Rc1/4: 45(2.5) 4 3 3 (Exhaust
PF-OMK0003CN-E PFMV505(F)-1 PFMV510(F)-1 [kPa] [kPa] [L/min] [L/min] PFMV530(F)-1 [kPa] [L/min] -21No. PF-OMK0003CN-E PFMV5 PFMV5 + L (ZS-36-A) 10n +24(n=15) 10n +14 L L L -22No.