17

x 0.8 KK 9 NH NW 53 NE NF MY1B25 MY1B32 MY1B40 110 9 5.5 16 24.5 54 M6 x 1 9.5 5.6 18 40.2 39 110 40.5 55 42 9 M5 x 0.8 30 MY3A MY3B 140 11 6.6 19 M8 x 1.25 2 28.5 68 M5 x 0.8 16 10 6.8 22 50.2 49 64 140 70 52 50 12 M6 x 1 37 170 14 8.5 23 M10 x 1.5 2 35 84 M6 x 1 15 13 170 8.6 85 26.5 62.7 62 61.5 75 64 12 M6 x 1 45 MY3M Centralized piping YW P PA PB Q PP RR QW T TT WW XXX YH Z ZZ Model

VQ20/30

Series VQ20 L dimension 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Stations No. L 6 8 11 13 15 17 20 22 24 27 29 31 34 36 38 40 43 45 47 50 85.5 110.5 148 173 198 223 260.5 285.5 310.5 348 373 398 435.5 460.5 485.5 510.5 548 573 598 635.5 Series VQ30 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Stations No.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128 163 193 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 66 84 95 121

MHF2-E

torque Nm (mm) MHF28D M3 x 0.5 0.63 4 MHF2-12D M4 x 0.7 1.5 5 MHF2-16D M5 x 0.8 3 5.5 MHF2-20D M6 x 1 5.2 6 Screw-in depth Model Bolt Max. tightening torque Nm (mm) MHF28D M2.5 x 0.45 0.36 4 MHF2-12D M3 x 0.5 0.63 5.2 MHF2-16D M4 x 0.7 1.5 MHF2-20D M5 x 0.8 3 When MHF2-8D* and MHF2-12D* are mounted body through-hole, use the attached special bolts.

VEX1

Caution Caution When the VEX3420 air operated power valve is delivered from our factory, the M5 threaded pilot ports P1 and P2 in the cover are open and the Rc1/8 pilot port in the subplate is plugged. Before connecting pipes to P1 and P2 ports in the subplate, remove the 1/8 plug from the subplate and put M5 plugs into P1 and P2 ports in the cover.

PSxx-OMU0005CN

) -5No.PS-OMU0005CN-C * FG (35 N () ,() *() 6 33 () () 30m DC(-)() () * -6No.PS-OMU0005CN-C ( ) () CE -5~50(5 ) * , 1015 10 1% 2365 LCD * -7No.PS-OMU0005CN-C 3 ISE20B -0.100~1.000MPa ZSE20B 0.0~-101.0kPa Y ZSE20BF -100.0~100.0kPa K T 2 X NPN 2 Y PNP 2 A1 A R NPN 2 + 1 () T PNP 2 + 1 A2 B S NPN 2 + 1 V PNP 2 + 1 1 B D + M SI 3 P psi 2 2: 3kPaMPa 1 ( 2m, ) W M5

M-E05-1-LQ1

LQ1-5N19 LQ1-5B19 3-10 LQ1-3N10 LQ1-3B10 5-19 LQ1-5N19 LQ1-5B19 LQ1T51-R3 5 5-19 LQ1-5N19 LQ1-5B19 3-08 LQ1-3N08 LQ1-3B08 5-19 LQ1-5N19 LQ1-5B19 LQ1T51-R4 5 5-19 LQ1-5N19 LQ1-5B19 2-06 LQ1-2N06 LQ1-2B06 5-19 LQ1-5N19 LQ1-5B19 LQ1T51-R5 5 5-12 LQ1-5N12 LQ1-5B12 5-19 LQ1-5N19 LQ1-5B19 5-19 LQ1-5N19 LQ1-5B19 LQ1T51-R6 5 3-10 LQ1-3N10 LQ1-3B10 5-19 LQ1-5N19 LQ1-5B19 5-19 LQ1-5N19 LQ1-5B19 LQ1T51

XM, XY

flange) (mm) Model A 75.8 102.5 119 B 48 66 79 C 1 2 2 D 23.5 38 53 E 40 55 75 Fn 26 41 52 G 40.5 57 70 H 21.5 30 35 J XYH-25 XYH-40 XYH-50 100.2 130 178 494 XMH, XYH Series Glossary 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less outgassing.

Refrigerated Thermo-chiller

Continue 19 FAN Motor Stop WRN The internal pump continuously run for more than a certain period of time. Continue 20 Internal Pump Time Out WRN The error occurred in the control systems. Stop 21 Controller Error FLT The data stored in the controller of this unit went wrong.

Mini Free-Mount Cylinder Series CUJ: ø4, ø6, ø8, ø10

+ Stroke 13 + Stroke 6.5 + Stroke 3 13.5 7 Single acting 3 3 Built-in magnet/CDUJB10 [5.6] [Auto switch] Element [Approx. 25.5] 24 + Stroke 18 + Stroke 11.5 + Stroke 3 Single acting Rod end male threads M5 x 0.8 Width across flats 8 Width across flats 5 M5 x 0.8 6 12h9 9.2 4 8 16.5 10.5 9 4 2.5 Rod end nut part no.

IDX-OM-M050

Inside diameter 25 approx. 2m) (The opposite side 4Eye bolt (O.D.10, Length Compressed air outlet JIS flange 65A 10K For Option K 16K 4x 20 Drain tube direction(Nil) Drain tube Ventilation approx. 0.7m) condensed water Drain tube for (O.D.10, Length 9351 78 18 267 8x 19 4x 19 A A Flange bolt hole Drawing of view A 1130 140 1120 140 655 Other than 18 Option K Option K Model 75 direction

Digital Pressure Switch

M5 01 N01 C4L C6L Port size M5 x 0.8 R1/8 NPT1/8 One-touch fitting Straight type One-touch fitting Elbow type 4 mm 5/32 inch 6 mm Materials in fluid Pressure-sensing part Silicon contact part Piping port (Common) PBT, CB156, heat resistant PPS, O-ring: HNBR Piping port C3604 (Electroless nickel plating), SUS304, NBR POM, SUS304, NBR, C3604 Weight Body 24 g 34 g 36 g 30 g 30 g Lead wire with

KJ

(mm) <M5> <M5> Note) Weight (g) Model D1 P A M D2 L 2-applicable tubing M5 x 0.8 KJU23-M5 KJU23-01S KJU04-M5 KJU04-01S KJU06-M5 KJU06-01S 5.9 8.3 6.4 8.8 7.4 9.9 Reference dimensions after R thread installation.

Series M Miniature Fittings M3, R(PT) 1/8, M5

M3 male -M3 male M-3N P. 92 M5 M5 M-5ALHN-6 P. 91 Bulkhead union M-5E 6/4 P.90 Panel mount connection. M5 female -M5 female Plug Barb elbow(H) For soft nylon tube. Body rotates at 360 around the stud axis. 3.18/2.18 M-5ALHU-3 To plug unused M3 port.

Slide Tables MX Series

Locating pin hole D x H (mm) Max.tightening torque ftlb (Nm) Model Depth l (mm) Bolt used 0.9 (1.2) MXW 8 5H9+0.03 depth 4.5 14.8 M3 x 0.5 0 1.5 (2.1) 5H9+0.03 depth 4.5 MXW12 19.2 M4 x 0.7 0 3.2 (4.4) MXW16 6H9+0.03 depth 5.5 21.5 M5 x 0.8 0 3.2 (4.4) MXW20 6H9+0.03 depth 5.5 30.5 M5 x 0.8 0 5.5 (7.4) MXW25 8H9+0.036 depth 9 36 M6 x 1 0 19

VZA2000

4.5 body side 2 x M5 x 0.8 Mounting hole 5 x Rc 18 Pilot port (A side) Sub-plate side Pilot port (B side) 2 x M5 x 0.8 sub-plate side 1757 5 Port Air Operated Valve Series VZA4000 Specifications Fluid Air VZA4121, 4141 0.15 to 1.0 Operating pressure range (MPa) 2 3 4 2 3 4 0.15 to 1.0 VZA4 21, 4 41 0 to 1.0 VZA4121, 4141 Pilot pressure range (MPa) 2 3 4 2 3 4 VZA4 21, 4 41 0.1 to 1.0 Impact

V100

M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Plug connector Large flow capacity Standard V14:13(27) V14A:16(30) V14:12(26) V14A:15(29) Large flow capacity V124A Note 1) 1 2 Flow characteristics 2 3 V100 Valve model C[dm3/(sbar)] 0.037 0.076 0.054 0.099 C[dm3/(sbar)] 0.054 0.099 0.037 0.076 b 0.11 0.070 0.35 0.23 b 0.35 0.23 0.11 0.070 Cv 0.0080 0.016 0.015 0.024

VEX1

cap screw (with spring washer) M5 x 0.8 x 10 (2 pcs.)

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 N.C.

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

0.31 0.28 0.31 0.28 U W M5 x 0.8 U W 597 4 Port Direct Operated Poppet Solenoid Valve 10-VQD1000 Dimensions L plug connector: 10-VQD1121-L-M5 M plug connector: 10-VQD1121-M-M5 Directional Control Valves Air Grippers Modular F.