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Stop (2) JOG a) View (V) 4.1 (1-1-2) View (V) b) 4.5 JOG c) JOG+/EMGx OFF OFF JOG : Stop EMGx OFF OFF Stop EMGx OFF OFF (EMGx)EMGx No.SFOD-OMT009 Stop Stop (3) 1 a) View (V) 4.1 (1-1-2) View (V) 40 No.SFOD-OMT0011CN-A b) Remote mode ON SVRE ON c) All axes Return to Origin d) Execute d) start e) Stop EMGx OFFOFF Stop (EMGx)EMGx No.SFOD-OMT009 Stop USB OFF, 41

. / (420) 5-414 24611 NORWAY / (47) 67 12 90 20 DENMARK / (45) 70 25 29 00 POLAND / (48) 22-548 50 85 FINLAND / (358) 9-859 580 PORTUGAL / (351) 2 610 89 22 FRANCE / (33) 1-64 76 1000 SPAIN / (34) 945-18 4100 GERMANY / (49) 6103 4020 SWEDEN / (46) 8-603 0700 GREECE / (30) 1342 6076 SWITZERLAND / (41) 52-396 3131 HUNGARY / (36) 1-371 1343 TURKEY / (90) 212 221 1512 IRELAND / (353) 1-403 9000

Troubleshooting 41 -2No.EX-OMY0014-A Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of "Caution", "Warning" or "Danger".

Dimensions (page 17) for necessary space. (5) Install vertically so that outlet of drain is facing downward. It cannot be used in horizontal or upward direction. Caution (1) When the bowl is installed on HF2-BF series, install them so that the lock button lines up to the groove of the front (or the back) of the body to avoid drop or damage of the bowl.

. -17- D Note 1) D Note 1) Option symbol 2 Semi-standard symbol 6 Semi-standard: 2 Semi-standard: Piping port Piping port thread ty pe (4) Part No. (4) Part No. thread ty pe Rc Rc AD48-2-A AD48-D G G NPT AD48N-2(Z)-A NPT AD48N(-Z)-D Appearance and Semi-standard: 6 part No.

If the product has failed, then please return the valve without any modifications. 41 No.JSY1000V-OMW0002-B Revision history Renewal 2021.11 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC

33 43 6.5 10 36.5 71 50 2.3 3 17 VHS40-D 50 44 57 8.5 19 43.5 88 66 2.3 3 21 VHS40-06-D 50 46 59 8.5 19 43.5 88 68 2.3 4 27 VHS50-D 70 60 11 27.5 49.5 113 71 3.2 4 27 -13- Revision history Rev.

Note 3)o0.085450/20BeltLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)41?2?725Non-magnetizing lock547.924 VDC 0 10%

Note 3)o0.085450/20BeltLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)41?2?725Non-magnetizing lock547.924 VDC 0 10%

Nijverheidsstraat 20 B-2160 Wommelgem Belguim TEL: 03-355-1464 FAX: 03-355-1466 TAIWAN SMC Pneumatics (Taiwan) Co.,Ltd. 17, Lane 205, Nansan Rd., Sec.2, Luzhu-Hsiang, Taoyuan-Hsien, TAIWAN TEL: 03-322-3443 FAX: 03-322-3387 POLAND SMC Industrial Automation Polska Sp.z.o.o. ul.

Stainless steel Spring washer Flat washer 37 Stainless steel 18 Stainless steel Flat washer Top cover 38 Electroless nickel plated Aluminum alloy Electroless nickel plated Aluminum alloy 19 Plate A Cushion seal holder 39 Chromated Aluminum alloy Electroless nickel plated Aluminum alloy 20 21 Plate B O-ring 40 Fluoro rubber Fluoro rubber Cushion seal O-ring 41 Fluoro rubber Linear guide 42

300 400 500 Flow rate l/min (ANR) Compact and light weight Allows smaller mounting pitch 18.3mm A Accommodates two types of threads Inside: Female thread (M5 x 0.8) Outside: Male thread (1/8) B C Panel type One-touch fitting feature introduced to series mm Weight Model A (Width) C (Depth) B (Height) Approx. 70g (Body: 65g) 4, 6 (metric size) 5/32", 1/4" (inch size) ARJ310-01G 18.3 Approx. 41

A B C D 17 Standard Motor Series LJ1H30 Ground Ball Screw Motor Output High Rigidity Direct Acting Guide 200W 25mm/25mm lead Horizontal Mount How to Order Stroke LJ1H303 F 2 1 PD Cable entry direction Top entry Cable entry direction Power supply voltage Cable length Left entry 1 2 F R L T B 100/110VAC (50/60Hz) 200VAC (50/60Hz) Axial Right Left Top Bottom 2 3 4 5 2m 3m 4m 5m Axial entry

loading [oz / gr] 7.1 / 200 9.7 / 7.1 / 11.5 / 325 275 200 Nominal electric absorption [A / W] 2.2 / 170 2.7 / 210 3.3 / 250 4.3 / 330 5.9 / 450 6.1 / 470 Max. electric absorbtion [A / W] 2.9 / 220 3.4 / 260 4.3 / 330 5.6 / 430 7.8 / 600 8.0 / 620 Fan electric absorption [A / W] 0.30 / 27 0.54 / 40 Acoustic pressure level at 1 mt [dbA] < 70 Weight [lb / Kg] 75 / 34 82 / 37 86 / 39 90 / 41

Piping: Base Mounted, Stations & Port Location: 17 Stations (Type 21, 41, 42), Port Size: ø6 One-touch Fitting, Thread: -

Piping: Base Mounted: Side Ported, Stations & Port Location: 17 Stations (Type 20, 41, 42, 43), A, B Port: NPTF1/4 One-touch Fitting

rInterface tInterface with bracket 225 173 130 97 129 169 30 eAFM20-A 41 wAF20-A eAFM30-A qIR100--X170 wAF30-A eAFM40-A 50 qIR20--X170 qIR30--X170 wAF40-A 820 Made to Order IR1000/2000/3000 Series With Digital Pressure Switch 7 Manifold Specifications (Except IR2120 and IR3000 series) 8 With digital pressure switch (model no: ISE30A-01--ML).

HED Polypropylene skid HEA Model Weight [kg] Dimensions [mm] HRSE012-A-10 35 Height 745 x Width 465 x Depth 575 HRSE018-A-10 HRSE012-A-10-T 42 Height 745 x Width 465 x Depth 620 HRSE018-A-10-T HRSE012-A-20 38 Height 745 x Width 465 x Depth 575 HRSE018-A-20 HRSE024-A-20 HRSE012-A-20-T 45 Height 745 x Width 465 x Depth 620 HRSE018-A-20-T HRSE024-A-20-T HRSE012-A-23 41 Height 790 x Width 470

Filtration rating . 0.3 I' m 0.01 I'm 0.3+0.01 I'm Oil misl removal rate : O.8ppm (1.0mglm3(ANR)} O .08ppm (O.1 mg/m3(ANR)) 008ppm (O.1 mglm3(ANR)) Micro-Mist Separator with Prefilter Micro-Mist Separator SeriesAMH Available Models Model AMH150 AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 Air flow rate NOle) Q/min (ANR) 200 500 1000 2000 3500 6000 12000 1/4 3/8 1/2 3/8 1/2 3/4 1/2 3/4 1 3/41