CNA

10 85 15 52 16 12 12 10 8 25 to 500 M18 x 1.5 30 7 M8 x 1.25 18 35 32 70 27 108 1/4 1/8 52 20 40 10 95 17 56.5 20 13 15 12 11 25 to 600 MLGP M18 x 1.5 31 7 M10 x 1.25 18 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 67 20 18 12 15 11 32 to 600 M22 x 1.5 37 11 M12 x 1.75 22 40 37 102 32 139 1/4 1/4 78 25 52 14 123 21 83 20 23 18 17 13 41 to 750 RLQ M26 x 1.5 40 11 M12 x 1.75 26 40 37 116 41

LEC-OM071xx

bits) Reference 0003H unit Position error (upper 32 bits) Reference 0004H unit unit Encoder count (lower 32 bits) Reference 000AH Count value of the actually driven motor encoder Encoder count (upper 32 bits) Reference 000BH unit unit FPG count (lower 32 bits) Reference 000CH Count value of the actually driven external encoder FPG count (upper 32 bits) Reference 000DH unit Pn824 Pn825

CNA

10 85 15 52 16 12 12 10 8 25 to 500 M18 X 1.5 30 7 M8 X 1.25 18 35 32 70 27 108 1/4 1/8 52 20 40 10 95 17 56.5 20 13 15 12 11 25 to 600 M18 X 1.5 31 7 M10 X 1.25 18 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 67 20 18 12 15 11 32 to 600 M22 X 1.5 37 11 M12 X 1.75 22 40 37 102 32 139 1/4 1/4 78 25 52 14 123 21 83 20 23 18 17 13 41 to 750 M26 X 1.5 40 11 M12 X 1.75 26 40 37 116 41 160 1/4 1

Tie-rod Type Hydraulic Cylinder

25 14 9.5 M8 x 1.25 M14 x 1.5 23 20 60 17.5 32 44 18 22 1/4 30 15 106 37 50 19 50 14 9 23 20 28 17 13 M10 x 1.5 M16 x 1.5 25 22 73 17 35 53 20 26 3/8 30 18 112 43 63 21 55 16 8 27 22.4 30 17 13 M10 x 1.5 M18 x 1.5 28 25 80 17 40 60 22 26 3/8 30 20 116 47 80 26 65 M12 x 1.75 18 8 31 28 32 22 15 M22 x 1.5 32 29 100 20 45 75 26 30 1/2 35 22 127 57 100 34 80 M27 x 2 M12 x 1.75 20 6.5 35 35.5

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

/Mounting Method -X2321/-X2322 Applicable cylinder -X2091/-X2092 -X2321/-X2322 D-M9;V/M9;WV Applicable auto switches D-P3DW; D-A73/A79W 32 32 32 Bore size (mm) BMU1-025 (Below , ) Auto switch mounting CKU32-42-088EN-R BMU1-025 BQ2-012 (Below , ) bracket part no.

ISO Standard Hydraulic Cylinder

7 25 to 800 45 33.2 32 M6 x 1 M14 x 1.5 56 12 46 23 17 1/4 19 18 12 16 15 30 35 12 18 14 43 40 25 to 800 63 41.7 43 M8 x 1 M16 x 1.5 73 14 51 32 3/8 17 18 9 19 22 20 19 34 37 12 19 47 22 50 25 to 800 75 52.3 60 M12 x 1.25 M20 x 1.5 74 20 57 33 1/2 29 11 32 18 28 30 25 42 9 24 42 53 28 63 25 to 800 90 64.3 60 M12 x 1.25 M27 x 2 80 20 55 33 29 1/2 32 13 36 17 30 32 50 13 39 30 36 68 80 25

High Vacuum L Type Valve

Note 2) Heaters are not available for size 16. 18 XL-OMS0001-B Revision history A Heater Replacement Procedure added SZ B Product Specific Precautions added. Maintenance part indication revised. Erroneous descriptions corrected. Format changed.

Air Gripper Unit for Collaborative Robots

Refer to P.18 for assembling method.

Air Gripper for collaborative robots.

Refer to P.18 for assembling method.

Air Gripper Unit for Collaborative Robots

Refer to P.18 for assembling method. M8 8 Pin connector (Plug) NPN output PIN No.

MHx-OMZ0003

M3x7 0.59Nm 18 - (0.7mm) 19 - 5-3.

XLF Series

Rc 1/8 Rc 1/4 Weight kg 0.25 0.45 1.1 1.6 3 4.8 10 18 Note 1)The conductance is molecular flow measured with an elbow pipe which has the same dimension with each flange.

Regulator Valve

Connection thread: M5 First, tighten by hand, then use a wrench appropriate for the hexagon flats of the body to tighten an additional 1/6 to 1/4 turn. Once lubricant is utilized within the system, since the original lubricant applied within the product during manufacturing will be washed away, please continue to supply lubrication to the system.

MGF

Model Applicable screw Max. tightning torque Nm l (mm) MGF 40 MGF 63 MGF100 7.5 18 M8 x 1.25 9 36 M10 x 1.5 Example) 9 65 M12 x 1.75 2. When mounting a work piece to the cylinder, do so only when the piston is retracted. Also make sure that the rotational torque applied to the cylinder body does not exceed the allowable rotational torque (given on page 11).

Guide Table Series MGF ø40, ø63, ø100 Low-profile compact cylinder utilizes a large concentric guiding sleeve to provide excellent eccentric load resistance.  Mounting height greatly reduced  Built-in non-rotating mechanism Internal guide pin prevents

Model Bolt Maximum tightening torque (Nm) l (mm) MGF 40 MGF 63 MGF100 M8 x 1.25 18 7.5 Example) M10 x 1.5 36 9 M12 x 1.75 65 9 When mounting a workpiece to the cylinder, do so only when the piston is retracted. Also make sure that the rotational torque applied to the cylinder body does not exceed the allowable rotational torque (given on page 410).

Air Catch Sensor

ZSE2 ISE2 ZSP Environment Installation ISl Caution Caution qIf the Air Catch Sensor is mounted in an enclosure, make sure that the exhaust port is open to atmospheric pressure to avoid malfunction due to possible pressure build-up inside the enclosure. wConnect the tubing via the M5 fittings to the Air Catch Sensor.

ZL3-OM00601

(M4X110) Nil Recommended tightening torque: 0.76 to 0.84Nm V Yes * Pressure switch with energy saving function requires 1st ejector check valve. 3 Silencer assembly (for ZL3) Silencer case Silencer assembly ZL3-SC1-A 4Sound absorbing material assembly (for ZL3) ZL3-SE1-A Sound absorbing material assembly Sound absorbing material 1 Sound absorbing material 2 18 Doc.

Magnet Gripper Unit for Collaborative Robots

Refer to P.18 for assembling method. PNP output Conversion cable M8 8 Pin connector (Plug) PIN No.

Magnet Gripper Unit for Collaborative Robots

Refer to P.18 for assembling method. NPN output M8 8 Pin connector (Plug) PIN No.

Ｍ agnet Gripper Unit for Collaborative Robots

Refer to P.18 for assembling method. PNP output M8 8 Pin connector(Plug) PIN No.