VCS Orifice size Class 3 Class 2 Orifice size (mm) 2 3 4 5 7 10 Class 4 Symbol 2 3 4 5 7 10 Electrical entry G Grommet C Conduit Refer to the below table for orifice and port size combinations.
EXH/Side Ported Type 42 Manifold Grommet: G DIN terminal: D Manual override (non-locking) Applicable cord O.D. 4 to 6.5 4Rc(PT) 1/8 (ports P, R) 83 71.5 Max .10 2-4.5 (mounting holes) 75.5 Light (DZ type only) 67.5 20.5 59 P R P R 4Rc(PT) 1/8 (ports P, R) Pg.7 11.5 18 39 18 25 31 Approx. 300 (lead wire length) 53.5 P = 19 14 5 L2 L1 8.5 11.5 49.5 11.5 18 39 nRc(PT) 1/8 (port A) 8.5 11.5
MRQB32,40 18 1 17 2 16 2 34 2 15 1 33 O 1 14 1 32 4 13 2 31 2 12 O 1 30 1 11 2 29 1 10 1 28 S 1 9 1 27 S 1 8 O 2 26 1 7 1 25 2 6 1 24 4 5 1 23 4 4 1 22 4 3 1 21 O 3 2 1 20 O 1 1 1 19 1 12 14 2 28 1 13 2 27 1 12 4 26 1 11 1 25 R 1 10 1 32 24 2 9 2 23 2 8 4 22 8 7 1 21 2 6 2 20 2 5 1 19 2 4 1 18 O 4 3 1 17 O 4 2 1 16 4 1 1 15
Return 0.5 0.4 0.2 0 0 Out -0.2 -0.4 -0.5 -0.6 -0.8 0 25 50 75 -1 1 2 3 4 -1 100 5 Input signal % F.S.
10, 16, 20, 25: 40 mm, Bore size 32, 40: 80 mm.
with 10% voltage ripple or less Power supply voltage Power supply When used as an IO-Link device 18 to 30 VDC, including ripple (p-p) 10% Current consumption 35 mA or less Protection Polarity protection Accuracy Display accuracy 2% F .S. 1 digit (Ambient temperature of 25 3C) Repeatability 0.5% F .S.
Option L . 10-1 10.1 SAFETY INSTRUCTIONS FOR USE . 10-1 10.2 SPECIFICATIONS . 10-1 10.3 MOUNT THE HEAVY DUTY AUTO DRAIN . 10-2 10.4 MAINTENANCE . 10-2 Chapter 11 Option R .11-1 11.1 SAFETY INSTRUCTIONS FOR USE . 11-1 11.2 EARTH LEAKAGE BREAKER SPECIFICATION . 11-1 11.3 CONNECTION OF POWER SUPPLY . 11-2 Chapter 12 Option T . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 OPERATION / ERROR
XLH-16 XLH-25 XLH-40 XLH-50 16 25 40 50 5150 -6 Pa (abs) 110 l/s 1 5 14 45 80 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW SUS316L,FKM Nm 0.1 0.15 0.35 0.5 5 7 10 13 0.23 0.41 1.05 1.62 1) 3-2.
Specifications Model Note 1 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-80 XYA-25 XYA-40 XYA-50 XYA-63 XYA-80 Flange (valve) size 16,CF034 25 40,CF070 50 63,CF114 80 Actuating type Normally closed (Pressurize to open , spring seal) Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (High temperature type:5 to 150) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance
Model AKH03-U10/32 AKH03-N01S AKH07-U10/32 AKH07-N01S AKH07-N02S AKH09-N01S AKH09-N02S AKH09-N03S AKH11-N02S AKH11-N03S AKH11-N04S AKH13-N03S AKH13-N04S 8 11.11 10-32 UNF 1/8 10-32 UNF 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 3/8 1/2 24.3 24.6 25.8 26.9 31 31.7 21.2 20.6 22.7 22.9 25 27.7 36 35.5 48.3 40.7 41.2 54 46.5 5 10 10 11 18 16 24 43 47 40 79 87 85 Applicable tubing 5/32 2.8 12.7 2.8 6.5 6.5
To ehitt spool fully 12 (0.8) 25|n..n r00 (6.7) 12 (0.8) 5 (0.3) 5 (0.3) 10 (0.4 E 11 .71 10(0.7) 3. Maxlmum Permisslble 125 (8.3) 125(8.3) 125 (8.3) iledla: Alr (lubricated or oll-free), any non-flammabls, nontoxic, non-corrosive gasses except oxygen. Leakagq Port to port (intemal) not to exceed 0.030 cubic teet per minute at 100 PSIG (6.7 Kgf/cm').
To ehitt spool fully 12 (0.8) 25|n..n r00 (6.7) 12 (0.8) 5 (0.3) 5 (0.3) 10 (0.4 E 11 .71 10(0.7) 3. Maxlmum Permisslble 125 (8.3) 125(8.3) 125 (8.3) iledla: Alr (lubricated or oll-free), any non-flammabls, nontoxic, non-corrosive gasses except oxygen. Leakagq Port to port (intemal) not to exceed 0.030 cubic teet per minute at 100 PSIG (6.7 Kgf/cm').
Table 15 Parts where grease is to be applied Application of grease Grease Body (inner sliding surface) Piston(Seal groove) Slider(Sliding surface) GR-S-010 Piston seal Tube gasket 23 24 25 O-ring 5 11 1 16 12 7 23 24 12 11 4 25 4 24 25 23 -34- (2) Mount the tube gasket 11 to the left cover 3 to mount to the body 1 . (3) Insert the rack 16 and the piston 4 into the body 1 .
12 16 Piston area (mm2) 0.2 6 10 16 23 40 MTS 0.7 20 35 55 79 141 0.6 17 30 47 68 121 0.5 14 25 40 57 101 0.4 11 20 32 45 80 0.3 8 15 24 34 60 28 50 79 113 201 With Shock Absorber Mass Standard Stroke (g) (mm) Body mass 80 105 100 160 130 210 210 320 640 830 Standard stroke 5, 10 10, 20 10, 20 15, 25 20, 30 Model MXP6 MXP8 MXP10 MXP12 MXP16 Model MXP6-5 MXP6-10 MXP8-10 MXP8-20 MXP10-10 MXP10
Value 7 6 5 4 3 2 1 0 Output No. 7 6 5 4 3 2 1 0 1 0-7 All disable Setting value 00 0 0 0 0 0 0 0 0 Output No. 15 14 13 12 11 10 9 8 2 8-15 All enable Setting value FF 1 1 1 1 1 1 1 1 Output No. 23 22 21 20 19 18 17 16 3 16-23 All disable Setting value 00 0 0 0 0 0 0 0 0 Output No. 31 30 29 28 27 26 25 24 4 24-31 Output 24-27: Disable Output 28-31: Enable Setting value F0 1 1 1 1 0 0 0 0
Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).
Example) AL30-03B-2R Symbol Description Body size 20 30 40 50 60 10 Metric thread (M5) Rc NPT G Nil Thread type N F + M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 Port size + Nil B Note 1) Option (Mounting) Without mounting option With bracket + Polycarbonate bowl 1000 cm3 tank 1000 cm3 tank (with switch) Lowest limit ON 1000 cm3 tank (with switch) Lowest limit OFF Metal bowl Nylon bowl
Port side side Minimum stroke 10 20 75 15 3.
System error Brown DC(+) Internal data error 12 to 24VDC + Black OUT Load Internal data error Blue DC() 6 Series ZSE30/ISE30 Dimensions 20 0.1 2-M3 x 0.5 Thread depth 4 Lead wire with connector 9.5 25 8 30 3.6 M5 x 0.8 MPa PRESSURE 20 0.1 10 SMC OUT Width across flats 12 SET 1.5 01: R 1/8 T1: NPT 1/8 With bracket 42.5 10 15 4.2 3 22 30 20 25 20 SMC 45 30 1.8 35 35 Panel mount 8 17.8 7.2
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