Vacuum (mm) 02_o2 0 4 _ o 4 0 6 0 6 0 8 _ 0 8 10 _ o.10 1 3 @ 1 3 1 6 @ 1 6 20 @2O 25 _ a25 32 _ a32 40 s4O 50 o50 Pad dia. (mm) 02_o2 0 4 o 4 0 6 a 6 0 8 0 8 1 0 _ o 1 0 1 3 _ o 1 3 1 6 _ s 1 6 20 szo 25 o25 32 s32 40 s4O 50 650 Thread Dia. s2-sB o4(}o50 B4 M4 x 0.7 o B5 M5 x 0.8 o a Thread B6 M G x l a o B8 M8 x 1.25 o a 8 1 0M 1 0 x 1 . 2 5 o o .
20 42.5 40 32 M26 x 1.5 Up to 1000 1/8 159 9 10 40 60 209 219 22 40 51 M32 x 2 53 Up to 1000 1/4 181 10 11 53 77 236.5 247 26.5 The dimension NA(42.5) is wider than dimension TX(40).
Inlet pressure (MPa) 0 0.4 0.5 0.6 0.7 0.8 0.9 1 Inlet pressure (MPa) 0 0.5 0.4 0.6 0.7 0.8 0.9 1 Inlet pressure (MPa) Charge Characteristics Charge Characteristics Charge Characteristics 60 12 5 11 50 10 Charge time per 10 L t (s) Charge time per 10 L t (s) Charge time per 10 L t (s) 4 9 40 8 3 7 30 6 5 2 20 4 3 1 10 2 1 0 0 0 1.0 1.2 1.4 1.6 1.8 2.0 Pressure increase ratio P2/P1 1.0 1.1
(mm) Port size R 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) 1(P) M5 4 6 8 10 12 1(P) 1(P) M5 Applicable tubing O.D. (mm) Applicable tube O.D. (mm) Applicable tubing O.D.
LEC / (LEC ) () ID 1 164 1 IO 1: 64 1 S 0 +23) +2 10 -23) -2 -10 / 3000 3000 LEFS 0.5 LEFB 1 LEFS 0.5 LEFB 1 4) 0.00 CCW:-10+[] 9 CW-9+10-[] 1: /1:+2: SW 2 /1:2 W 1 0.00 W 2 0.00 0.00 1 2 (1-052) 2mm 3 CCW CW (+2 4) P29 -27- LEC / (LEC ) () 1) 2:CCW 1CW 2CCW 1 LEF 100 LEF16A 150 LEF25A 250 LEFS 200 LEFB 200 LEFS 30 LEFB 60 1000 LEFS 30 LEFB 60 0 1
Note) Metric size Inch size With One-touch fitting 01 03 05 07 09 11 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 4 6 8 10 For low speed control Note) For applicable tubing O.D. selection, refer to the Model on page 727. Thread type Port size M5 U10/32 01 02 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT M5 x 0.8 10-32 UNF 1/8 1/4 N Made to Order Lubricant: Vaseline X12 Ex.)
to 150) Atmospheric pressure to 1 x 10-6 Operating pressure Pa Conductance l/s Note 1) 14 45 80 160 200 5 1.3 x 10-10{1 x 10-10} at ambient temperature, excluding gas permeation Internal Leakage Pam3/s 1.3 x 10-11{1 x 10-11} at ambient temperature, excluding gas permeation External Operating time s 0.05 0.1 0.21 0.24 0.26 0.28 KF (NW), CF KF (NW) KF (NW), CF KF (NW) KF (NW), K (DN), CF KF
::;Hs 1(0) 1(0) 5(1.5 8 4 0(6.5) 71.5 76.5 84.0 92.5 \02.5 D-A4 A 0(0) 0(0) 0(2.5) 2(6 4(75) [).Q3 B 1(0) 1(0) 5(1.5) 8(4) 10(6. 5) D-K3 ~ H, B3 88 95.5 10. 114 A 0(0) 0(0) 0(3 2.56.5 4.5 8 D-G5, [)'B5 1.5(0 1.5(0) 5.5(2) 8.5 4.5 10.5(7) ~.D-K5 ~ , 38 43.5 SO.5 59 69.5 A 0(0) 0(0) O{4.S 3 8) (9.5) D-I'S B 3(0) 3(0) 7(3.5) 10{6 12(8.5) , , D-JS 40 43.5 49 55.5 83 ~ Ht 31 42 35 so 51.5 _A 0
temperature C 2 to 45 Circulating fluid CH1 : Clear water / CH2 : Clear water,DI water (pure water) 1 Set temperature range C CH1 : 15 to 25 / CH2 : 20 to 40 Cooling capacity2 kW 9 1 8 19 1 8 26 1 8 Heating capacity3 kW 1.5 1 4.5 1 6.5 1 Temperature stability 4 C CH1 0.1 CH2 0.5 Rated flow rate (Outlet) L/min 45 10 45 10 125 10 (0.43MPa) (0.45MPa) (0.45MPa) (0.45MPa) (0.45MPa) (0.45MPa
B7 NC 10 mA 10 mA B8 NC B8 NC Note1) Note1) B9 NC B9 NC ) ) B10 NC B10 NC Note 1) When the step data input method is used, do not connect wires to the terminals B7 to B10.
Note 16-9-5 16-10-1 Page 16-9-1 16-9-3 For details, refer to Best Pneumatics Vol. 16. 17-5-178 17-5-179
Refer to pages 12-10-4 to 12-10-5 for the details on effective holding force and allowable overhanging distance. Misc. D2012-10-9 9 Series MHY2 Construction Closed condition Size 10 Size 16 Size 20, 25 r o !8 e w !7 t r o !8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !
Refer to pages 12-10-4 to 12-10-5 for the details on effective holding force and allowable overhanging distance. Misc. D2012-10-9 9 Series MHY2 Construction Closed condition Size 10 Size 16 Size 20, 25 r o !8 e w !7 t r o !8 e w @0 !7 t r o !8 e w @0 !7 t !5 !5 !5 !6 !6 !0 u !2 i q !1 y !9 !0 u !2 i q !1 y !9 !0 u !3 !2 i q !1 y !9 !4 !4 !
Station 10 SOL.A SOL.A 10 10 Light/Surge voltage suppressor Light/Surge voltage suppressor 15 15 15 SOL.B SOL.B SOL.B Station 2 Station 2 Station 2 2 2 SOL.A SOL.A SOL.A Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor 2 SOL.B SOL.B SOL.B 14 Station 1 Station 1 14 14 Station 1 SOL.A SOL.A SOL.A 1 1 1 Light/Surge voltage suppressor Light/Surge voltage
D-M9W 10 2 pcs. D-M9WV D-M9AV 5 Note 2) 1 pc. 10 2 pcs. 5 Note 2) 1 pc. D-M9A 10 Note 2) 2 pcs. 5 1 pc. D-M9V 5 2 pcs. 5 1 pc. D-A9V 10 2 pcs. 5 1 pc. D-A9 10 2 pcs. 1 pc. 15 D-P3DWA 2 pcs. 15 Note 1) Confirm that it is possible to secure the minimum bending radius of 10 mm of the auto switch lead wire before use.
HRX-OM-R016 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.3.3 Types of hazard labels . 1-3 1.3.4 Locations of Hazard Labels . 1-4 1.4 Other Labels . 1-5 1.4.1 Product Label . 1-5 1.5 Safety Measures . 1-5 1.5.1 Safety
3, contained in one kit, and can be ordered using the order number for each cylinder bore size. 2.4-3 Series MU Basic: MUB Rod end male thread MUB25 SMU25, #1 (#1+#11) MUB32 SMU32, #1 (#1+#11) MUB40 SMU40, #1 (#1+#11) MUB50 SMU50, #1 (#1+#11) MUB63 SMU63, #1 (#1+#11) (mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 Model MUB25 MUB32 MUB40 MUB50
Type 2 3 Elbow Universal Applicable tube outside diameter Metric size Inch size 3.2 4 6 8 10 01 03 05 07 09 11 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 23 04 06 08 10 Control system 0 1 Meter-out Meter-in Use a 1/8" tube.
Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE KE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS-FG AS-FG N AS-FP AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 542. Use 1/8" tube.