IDX-OM-U010

Read carefully the Chapter 6 Troubleshooting before taking actions. Do not start the product in any trouble.

IDX-OM-V020

Read carefully the Chapter 6 Troubleshooting before taking actions. Do not start the product in any trouble.

FILTER REGULATOR

S T U AW20-B 30 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 AW30-B 41 40 45.8 6.5 8 53 2.3 31.1 38.5 19 7 AW40-B 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 AW40-06-B 50 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 AW60-B 70 66 65.8 11 13 90 3.2 Dimension:B of auto-drain and optional bowl assembly Optional D C Standard 8 6 2 6 8 C 6C J 2J 6J 8J CJ 6CJ W 6W 2 6 C 6C 2 8 AW20-B 87.4 87.6 87.6 87.6 91.4 93.9

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

6 r t !3 w q e !5 !0 !1 !

Low Profile Slide Table Series MXF

6 t !3 !4 !2 r w e !0 o !9 !8 i !5 u !7 q !

E-P HYREG

0.7 MPa) Note 6) The supply pressure must be under the maximum operating pressure.

In-line Air Filter

) 11.2 Applicable tubing O.D. (3.2, 4, 1/8", 5/32") IN 18.2 8.5 33 2 x Mounting hole for M3 countersunk head screw 10 60.5 11.5 17.5 25 18 ZFC5 (4, 6, 5/32", 1/4") 19 Applicable tubing O.D. (4, 6, 5/32", 1/4") IN 33.4 20 30 18 53.9 23 4.5 6.4 15.7 13.6 24.6 6 ZFC Series Dimensions ZFC7 (6, 8, 1/4", 5/16") 23.6 Applicable tubing O.D. (6, 8, 1/4", 5/16") IN 39.8 24 34 20 68.3 27.3 4.5 8.7 19.3

MXU

M4 x 0.7 2.5 6 Axial Mounting (Body tapped) l Model MXU6 MXU10 MXU16 Bolt Maximum tightening torque (Nm) M3 x 0.5 1.1 5 M4 x 0.7 2.5 6 M4 x 0.7 2.5 6 Operating Direction with Different Pressure Ports OUT port (2 on both sides) OUT port l Model MXU6 MXU10 MXU16 Bolt Maximum tightening torque (Nm) M3 x 0.5 1.1 4.8 M4 x 0.7 2.5 6 IN port OUT port (2 on both sides) M4 x 0.7 2.5 6 8-3-5 6 Series

MXU

M4 x 0.7 2.5 6 Axial Mounting (Body tapped) l Model MXU6 MXU10 MXU16 Bolt Maximum tightening torque (Nm) M3 x 0.5 1.1 5 M4 x 0.7 2.5 6 M4 x 0.7 2.5 6 Operating Direction with Different Pressure Ports OUT port (2 on both sides) OUT port l Model MXU6 MXU10 MXU16 Bolt Maximum tightening torque (Nm) M3 x 0.5 1.1 4.8 M4 x 0.7 2.5 6 IN port OUT port (2 on both sides) M4 x 0.7 2.5 6 8-3-5 6 Series

3 Port Solenoid Valve

Rated voltage For DC 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC B: Locking slotted For AC (50/60 Hz) 1 2 3 4 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] Electrical entry 24 V, 12 V, 6 V, 5 V, 3 VDC/100 V, 110 V, 200 V, 220 VAC Grommet L plug connector M plug connector Indicator light and surge voltage suppressor G: 300 mm lead wire L: With 300 mm lead wire M: With 300 mm lead wire

In-line Air Filter

Unlocked state Locked state Procedure 2 Rotating Procedure 7 Procedure 3 Product no. display Procedure 6 Case Element Procedure 4 Procedure 5 Cover Protrusion on the cover 3 In-line Air Filter Series ZFC Dimensions ZFC5 (4, 6) 19 Applicable tubing O.D. (4, 6) IN 33.4 20 30 18 53.9 23 4.5 4.5 4.5 6.4 15.7 13.5 24.7 23.6 ZFC7 (6, 8, 1/4", 5/16") Applicable tubing O.D. (6, 8, 1/4", 5/16") IN

IDX-OM-W093

(REFRIGERANT) IDF60-20) W R 0001 (2018 4 ) W R 0001 2018 2019 2020 2021 W X y Z 1 2 3 4 o P Q R o 1 Z 12 A Z IDF60/70/80/90 Series 1-5 IDX-OM-W093 1.3 HFC 1-5 IDF60/70/80/90 Series 1-6 IDX-OM-W093 1.4 / 1 1.5 () IDF60/70/80/90 Series 1-7 IDX-OM-W093 IDF60/70/80/90 Series 1-8 IDX-OM-W093 2 2.1 IN OUT (ONOFF ) 6-4 6-4 IDF60,70,80,90-20 IDF60,70,80,90-30 AC200V AC200V L1 L2

Fluoropolymer Piping Equipment

Page 4 6 8 10 12 19 1/8" 3/16" 1/4" 3/8" 1/2" Material: Super PFA LQHB LQHB TL TIL TL TIL TL Metric Size TLM TILM TLM TILM P.948 TD TID TD TID TIL Inch Size TH TIH TH TIH Material: PFA 2, 3, 4, 6, 8, 10, 12, 16, 19, 25 TLM Metric Size From page 949 1/8", 3/16", 1/4", 3/8", 1/2", 3/4" 1", 1 1/4" TILM Inch Size 4 6 8 10 12 1/8" 3/16" 1/4" 3/8" 1/2" 4 6 8 10 12 1/8" 3/16" 1/4" 3/8" 1/2" 3/4"

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

1 q i !2 e !

Compressed Air Preparation Filter

Inlet pressure 0.3 MPa 6 4 6 Inlet pressure 0.5 MPa Inlet pressure 0.5 MPa Inlet pressure 0.5 MPa 4 4 2 2 2 Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa 0 0 0 0 5 6 7 8 1 2 3 4 0 2 4 6 8 1 3 5 7 9 10 12 14 11 13 15 16 2 1 3 4 5 6 7 8 9 10 11 12 0 Air flow rate [m3/min (ANR)] Air flow rate [m3/min (ANR)] Air flow rate [m3/min (ANR)] 7 Compressed Air Preparation Filter

LFE-OMZ0011

R Bracket thickness is approx. 1.6mm Model Piping port size A B C D E F G H I J K L LFE13(Z) 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14(Z) 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26(Z) 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 LFE38(Z) 1 120 90 55 32 73 100 106 41 6 1.6 115 106 Model M N O P Q R S T U Bracket weight LFE13(Z) 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 Approx. 45g

3 Port Air Operated Valve Series SYJA300 1

Refer to pages 5-11-2 to 6 for Safety Instruction and Solenoid Valve Precautions.

LC6D/LC6C

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Series LC6D Stepper Motor Driver Series LX Dedicated How to Order LC 6 D 220 A D CE marking Applicable motor Standard CE marking Nil Q 6 Stepper motor Driver power supply Function D 24VDC D Driver function only Input/Output type A Photo coupler input/

IDX-OM-W095

(REFRIGERANT) IDFC60-23 W R 0001 (2018 4 ) W R 0001 2017 2018 2019 2020 V W X Y A Z 1 2 3 4 o P Q R o 1 Z 12 IDFC60/70/80/90 Series 1-4 IDX-OM-W095 1.3 HFC 1-4 IDFC60/70/80/90 Series 1-5 IDX-OM-W095 1.4 / 1 1.5 () IDFC60/70/80/90 Series 1-6 IDX-OM-W095 2 2.1 IN OUT (ONOFF ) 6-4 6-4 L N PE 3-5 IDFC60/70/80/90 Series 2-1 IDX-OM-W095 () IDFC60/70/80/90 Series 2-2 IDX-OM-W095 3

Activated Carbon Filter

AMX-OMY0038-A PRODUCT NAME Activated Carbon Filter MODEL / Series / Product Number AMK20-(F, N)01 ~ (F, N)02(B)(-2, 6, C, R, Z)-D AMK30-(F, N)02 ~ (F, N)03(B)(-2, 6, R, Z)-D AMK40-(F, N)02 ~ (F, N)04(B)(-2, 6, R, Z)-D Contents Page 1. Safety Instructions 2 to 7 2. Application 8 3. Standard specifications 8 4. How to order 9 5. Construction / Options / Replacement parts 10 6.