Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

-M-01 3 4 5 DIN Terminal (D): 10-SYJ5 43-D-01 3 4 5 M8 connector (WO): 10-SYJ5 43-WO-01 3 4 5 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 82.9 MAX.10 75.4 50.1[57.1] 64.1 34.7 49 M8 x 1 54.6 37.1 61.2[68.2] Approx. 300 (Lead wire length) 6 Pg7 6 6 6 65.8 59.3 103.4[107.8] 123[127.4] 45.5 45.5 45.5 45.5 18.1 43.3 17 17 17 17 17 17 17 17 141.2 121.2 143 6 8.5 6 6 6 48.9[51.1

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

-6 YNT-1210S k FVD5.5-8 l FVD8-6 DH-111 DH121 m FVD14-8 DH-112 DH122 YF-1 E-4 YNE-38 n FVD22-8 DH-113 DH123 (Note 1)p R38-8 YPT-60-21 TD-112 TD-124 YF-1 E-4 YET-60-1 q FVD2-6 YNT-1614 Note 1.

NCA1

Not available with W and K option 6-15-6 6 Series NCA1 Auto Switch Specifications Applicable Auto Switch/Refer to page 6-16-1 for further information on auto switches.

NCA1

Not available with W and K option 6-15-6 6 Series NCA1 Auto Switch Specifications Applicable Auto Switch/Refer to page 6-16-1 for further information on auto switches.

HRX-OM-S004

Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm buzzer stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release the thermal relay trip and circuit protector . 6-8 6.3.3 How to release the pump thermal trip . 6-10 6.4 Other Errors . 6-11 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Quality Control

HRX-OM-W032

Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm Buzzer Stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release the thermal relay trip and circuit protector trip . 6-8 6.4 Other Errors . 6-10 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Quality Control of Circulating Fluid and Facility Water

Cylinder with Lock

6 er uy t !9 #4@6!7!2 #6 #3#2#9 $3 80, 100 Component Parts Component Parts No. Description Material Qty.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

3 q !4 !2 !8 !7 !2 y o !1 !6 !5 u Parts list No. Description No.

5 Port Solenoid Valve, Series VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

HRX-OM-T002

Option . 6-1 6.1 Option M [DI water (Pure water) piping] . 6-1 6.1.1 Option M [DI water (Pure water) piping] . 6-1 HRS090 Series HRX-OMT002 Contents 6.2 Option J [Automatic fluid filling] . 6-2 6.2.1 Option J [Automatic fluid filling] . 6-2 Chapter 7 Alarm Notification and Troubleshooting . 7-1 7.1 Alarm Notification . 7-1 7.2 Alarm buzzer stop . 7-3 7.3 Troubleshooting . 7-4 7.3.1 Alarm

HRX-OM-R016

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-R016 Contents 6.3 Option T [High-pressure pump mounted] . 6-2 6.3.1 Option T [High-pressure pump mounted] . 6-2 6.4 Optional Accessories [Electric

T

T Slightly flexible 1.0 MPa max. at 20C Black Blue White Soft Nylon Tubing Series TS 15-6-8 15-6-9 15-6-3 15-6-4 15-6-5 Yellow Flame resistant (Equivalent to UL-94 standard, material V-0) Red Green VMG Blue Yellow FR Double Layer Polyurethane Tubing Series TRBU Green Black White 15-6-21 15-6-13 15-6-15 15-6-22 Red Blue Flexible 0.8 MPa max. at 20C Black Flame resistant (Equivalent to UL-94

HRX-OM-R026

Release the alarm referring Chapter 6.

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

tubing A B C Model Number of distribution ports Applicable tubing A B C VA4-6 VA6-6 VA10-6 VA16-6 4 6 10 16 36.5 60 88 130 6 VB4-6 VB6-6 VB8-6 4 6 8 74 102 130 96.5 124.5 152.5 62 90 118 82.5 110.5 152.5 48 76 118 6 Note) Insert seal plug (PG1) into the distribution port which is not used.

HRX-OM-M090

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-M090 Contents 6.3 Option T [High-pressure pump mounted] . 6-2 6.3.1 Option T [High-pressure pump mounted] . 6-2 6.4 Optional Accessories [Drain pan

Title not found

dE, Lr MM R, v, dND NX NZ 0 4 7 + 0 0 0 3 1 0 6 M 1 8 x 1 5 2 3 6 1 0 6 1 1 0 1 5 0 v v v + 0 m 3 q (16j3i) 50mfr Y-O5A (38) (27) ( 1 2 + 0 0 7 0 ) (1 5) (27] (60) (28) 0 6 3 o 0 1 2 o @39 3ir ( 1 6 1 5 0 0 4 7 + 0 0 0 3 1 0 6 1 1 0 M 1 8 x 1 5 0.59 1 0 6 236 63mr Y-O5A (27\ (28) (1 5) (27\ ( 1 2 + 0 0 7 0 ) (38) (60) 0 6 3 a o 1 2 0 @39 M22x1 5 o75 1 1 0 0 7 1 + 0 0 0 3 2 1 7 1 4 6 1 4 2

Flow Control Equipment

8 10 12 12 10 6 8 10 Tube O.D.

HRX-OM-W058

OptionOptional Accessories . 6-1 6.1 Option B [Earth leakage breaker] . 6-1 6.1.1 Option B [Earth leakage breaker] . 6-1 6.2 Option J [Automatic fluid filling] . 6-1 6.2.1 Option J [Automatic fluid filling] . 6-1 6.3 Option L [Large capacity tank] . 6-2 6.3.1 Option L [Large capacity tank] . 6-2 6.4 Option T [High-pressure pump]. 6-3 6.4.1 Option T [High-pressure pump] . 6-3 6.5 Option V

HRX-OM-R005

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-R005 Contents 6.2.1 Option M [DI water (Pure water) piping] . 6-2 6.3 Optional Accessories [Electric resistivity /conductivity sensor set] . 6-2 6.3.1 Optional Accessories [Electric resistivity/conductivity

Air Cylinder CP Series Cylinder Positioner Assembly

i 2.80 2.40 Q.2A 0 . 1 6 1 7 1 ) (4) c0P-5A 80 3.01 2 6 2 4.20 0 . 1 6 (76.5) (66.5) i5) {4) CDF 64 a0 i00 3,27 2.97 0.20 0.16 {83) (5) t4) 100 0 9 8 3.46 3.07 0.20 0 1 6 (88) (78) (5) REPAIR Cylinder Repair Kits (All rubber seals) Gauges ActuatorAssembly #1P200-02 Actuator Bepair Kit #1P200-RP Consists of: Back Pressure Diaphragm Supply Diaphragm Input Diaphragm Packing 4 Spool & Sleeve