C76

9 @0 q w e r t y u i o !

C76

9 @0 q w e r t y u i o !

CNG

For details, refer to page 9-15-65. With pre-wire connector is available for D-G5NTL, G5NBL type, too. For details, refer to page 9-15-66. 9-5-22

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

9 10 12 15 BA 54 62 74 92 112 BB CA 9.5 10.5 11.5 13 14 K 9 9 10 11 12 NB Model +0.025 0 +0.025 0 +0.030 0 +0.030 0 +0.036 0 0 -0.036 0 -0.036 0 -0.036 0 -0.043 0 -0.043 MHSH3-32D MHSH3-40D MHSH3-50D MHSH3-63D MHSH3-80D 6 7 9 11 12 54.5 2H9 3H9 4H9 6H9 8H9 8h9 8h9 MRHQ 62.5 74.5 10h9 MA 92.5 12h9 112.5 14h9 DWA SA 4.2 4.2 5.1 6.6 6.6 R 44 52 63 78 98 ZC 9 9 10 12 15 SB 8 8 9.5 11 11 ZB 7.4

MGG

9 is type L only. r!1!6!7!8!9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!

CLQ

For details, refer to page 9-15-1.

Table of Contents

9 3 63 41 6.5 8 Bracket A Bracket A AMJ Misc.

NCM

Note 9) Stainless steel rod standard on 7/16", 9/16", 3/4" and 7/8". Note 10) Exclude 7/16" and 9/16". Note 11) Exclude 2".

Fieldbus System

Nil Internal pilot Internal pilot, Built-in silencer External pilot External pilot, Built-in silencer Nil None 1 station S Note) R RS Note) 1 9 9 stations Note) When the built-in silencer type is used, keep the exhaust port from coming in direct contact with water or other liquids.

VS 8-2/VS 8-4

Single wiring 5 6 7 8 9 10 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 1 2 3 4 5 6 7 8 9 10 1 2 3 4 NEW CONCEPT N.C. valve N.C. valve N.C. valve N.O. valve N.O. valve N.O. valve 5 6 7 8 9 10 1 2 3 4 R2 B R1 A P IP65 enclosure compliant kit (Lead wire) M 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 5 (R1) 3 (R2) 5 (R1) 3 (R2) 5 (R1) 3 (R2) 1 2 3 4 4 (A) 2 (B) 4 (A) 2 (B) 4 (A

Aluminum High Vacuum Angle Valve

1A AS568-016V XM XY AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A Standard S valve seal assembly r XLD(V) XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A AS568-009 XLD100-2-9-1A XLD160-2-9-1A Special DNote 3) In cases where the seal material is other than the standard (FKM: includes Compound no. 1349-80: made by Mitsubishi Cable Industries, Inc.

Programless controller Step motor (servo 24 VDC)

JXC-OMU0029-A 9.

KQ2

1 8 14.29 12.7 9 1 4 3 8 1 4 17 4.6 11 17.46 16 1 8 15.5 20.5 12 14.29 1 4 3 8 5 16 18.5 6 9 13.5 17.46 16 Connection thread 1 4 19 17.46 22 28 3 8 1 2 3 8 21 7 16 14 22 22.23 30 22.5 24 28.5 30 1 4 33 9 3 8 1 2 22.23 22 9.6 30 1 2 17 25 28 Reference dimensions after Uni thread installation.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

DD 11-9-19 20 Series MSQ Construction #1 oi @7 @8 t !0 y !6 !7 !8 !1 @5 er w@4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MSQ R (With internal shock absorber) @1 !2 !5 !4 !9 @6 u @3 @0 @2 @9 #0 !

HRX-OM-Y098

8.5.1 HRL100-A-20 CH1 . 8-9 8.5.2 HRL200-A-20 CH1 . 8-9 8.5.3 HRL300A20 CH1 . 8-10 8.5.4 HRL-A-20CH2 . 8-10 8.6 Types of Hazard Labels . 8-11 8.6.1 Positions of danger warning label . 8-12 8.7 Standards . 8-13 8.8 Sample DoC. . 8-14 8.9 Daily Check Sheetheck Sheet . 8-16 Chapter 9 Product Warranty . 9-1 HRL Series HRX-OM-Y098 Chapter 1 Safety Instructions Chapter 1 Safety Instructions Before

MLGP

9 @7 #9 #5 i o @5 #5 #9 @7 !9 i @5 o Section B-B' Section B-B' @5 !8@6!7 @5@6!7 !

Series VQ Base Mounted Metal Seal/Rubber Seal

(Specify a model with 9 to 16 stations by using a manifold specification form.)

MLGP

9 @7 #9 #5 i o @5 #5 #9 @7 !9 i @5 o Section B-B' Section B-B' @5 !8@6!7 @5@6!7 !

7ND9071en

125 5 12 12 6.5 8 150 6 10 8 11.5 16 9 13.5 8 13.5 13 200 8 9 7 8.5 12 6.5 9.5 7 11.5 250 10 9 7 7.5 13.5 9.5 7 10.5 300 12 8 6 6.5 9.5 7.5 6 9.5 350 14 6 6 5 9.5 5.5.11 HART version Select if device is used as HART 6 or HART 7 device by using the + and keys.

0.4

(Specify a model with 9 to 16 stations by means of the manifold specification sheet.)