CLS

model D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F D-F5NTL D-A5 D-A6 D-A3 D-A44 D-G39 D-K39 D-F5W D-J59W D-F5BAL D-F5 D-J5 D-F59F D-A59W D-F5NTL Bore size (mm) Bore size (mm) A B A B A B A B Hs Hs Ht Hs Hs Ht 125 125 2 75.5 69.5 74.5 70 116 126 4.5 4.5 9.5 9.5 0 0 2 140 140 2 81 76.5 80 76.5 124 134 4.5 4.5 9.5 9.5 0 0 2 160 160 2 89 87.5 88 87.5 134.5 144.5 4.5 4.5 9.5 9.5 0 0 2 180 180 7.5 97.0

CXS

A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5

CXS

A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5

CXT

12 16 20 25 32 40 19 21 24 26 29 32.5 11 10.5 16 18 20.5 26.5 5 5.5 9 10 8.5 12 7 6 11.5 13.5 16.5 22.5 17 19 22.5 24.5 27 30.5 9 9.5 13 14 12.5 16 MG Bore size (mm) MGP MGQ MGG Reed switch Solid state switch @ HS A B D-F7NWV D-F7BWV D-F7NV D-F7PV D-F7BV D-J79C D-A72 D-A73 D-A80 D-A73C D-A80C D-A79W MGC MGF 32, 40 CY1 MY1 (mm) D-A72 D-A73 D-A80 D-A73C D-A80C D-A79W D-F7NV D-F7PV D-F7BV D-J79C

MXS Series Air Slide Table

45 55 65 75 100 125 150 175 Z 90.5 90.5 90.5 100.5 113.5 154.5 195.5 253.5 293.5 MXS25L-10 MXS25L-20 MXS25L-30 MXS25L-40 MXS25L-50 MXS25L-75 MXS25L-100 MXS25L-125 MXS25L-150 162 218 258 72 72 Air Slide Table MXS Series Appropriate mounting position for stroke end detection (mm) Reed switch: D-A90, D-A93, D-A96, D-A90V, D-A93V, D-A96V Stroke B Stroke E Model Operating range A 10 40 10 75

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(same side) 70 Bore size (mm) D-F9BAL Auto switch model 1 or 2 pcs. (different sides) 25 40 50 63 80 D-Z7/Z80 10 10 11 13 40 32 50 Bore size (mm) 63 80 Auto switch type No. of auto switches Model D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV 6 5 6 8 2 pcs. (same side) 70 60 D-Z7/Z80 Reed switch D-Y7BAL 5.5 5.5 6 7 1 or 2 pcs.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

/40/50/63 D-X 20B A Data Solid State Switch D-Y59 , D-Y69 , D-Y7P(V) A B A B Reed Switch D-Z73, D-Z76, D-Z80 (mm) D-Y7BAL (mm) D-Y7NW(V), D-Y7PW(V), D-Y7BW(V) 63 50 40 32 25 Mounting position 40 32 25 Mounting position 63 50 40 32 25 Mounting position A A 229.5 184.5 139.5 278.5 229.5 184.5 139.5 323.5 A 323.5 278.5 229.5 184.5 139.5 B B 110.5 95.5 180.5 121.5 110.5 95.5 180.5 136.5 B 136.5

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

(Red Green Red) PLC: Abbreviation of Programmable Logic Controller D-F7W, D-J79W D-F79W D-F7PW D-J79W Auto switch model Wiring type 3-wire 2-wire PNP Output type NPN Applicable load IC circuit, Relay, PLC 24 VDC Relay, PLC Power supply voltage 5, 12, 24 VDC (4.5 to 28 VDC) 10 mA or less Current consumption 28 VDC or less 24 VDC (10 to 28 VDC) Load voltage 40 mA or less 5 to 40 mA 80

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

(Red Green Red) PLC: Abbreviation of Programmable Logic Controller D-F7W, D-J79W D-F79W D-F7PW D-J79W Auto switch model Wiring type 3-wire 2-wire PNP Output type NPN Applicable load IC circuit, Relay, PLC 24 VDC Relay, PLC Power supply voltage 5, 12, 24 VDC (4.5 to 28 VDC) 10 mA or less Current consumption 28 VDC or less 24 VDC (10 to 28 VDC) Load voltage 40 mA or less 5 to 40 mA 80

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Auto Switch Proper Mounting Position (Detection at Stroke End) (mm) Auto Switch Mounting Height (mm) D-M9l D-M9lW D-M9lA D-A9l Hs 20 26.5 25 29 32 32.5 40 37 50 42.5 63 49.5 D-M9l D-M9lW D-M9lA D-A9l Auto switch model Auto switch model Bore size A B A B 20 12 24 8 20 25 11.5 24.5 7.5 20.5 32 13 25 9 21 40 18 27 14 23 50 20 32 16 28 63 18.5 33.5 14.5 29.5 Bore size Note) Adjust the auto switch

MXS

70 75 80 GA 22 22 22 22 55 61 102 154 190 KA M 92 92 92 102 115 156 197 255 295 MXS25L-10 MXS25L-20 MXS25L-30 MXS25L-40 MXS25L-50 MXS25L-75 MXS25L-100 MXS25L-125 MXS25L-150 162 218 258 3.11-34 Air Slide Table Series MXS Auto Switch Mounting Position for Stroke End Detection Reed switch: D-A90, D-A93, D-A96, D-A90V, D-A93V, D-A96V Stroke B Stroke E Model Operating range A 10 20 30 40 75 100

F

E A D: M-5E B U L K H E A D R E D U C E R: M-5ER R E D U C I N G B U S H I N G: M-5B M5 female to 18 female taper M5 female to 18 male taper P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R T E C H N I C A L SPECIFICATIONS S T R A I G H T B A R B C O N N E C T O R: M-01AU-4 M-01AU-6 S T R A I G H T A D A P T O R: M-01H-4 M-01H-6 Applicable Tube Material Nylon Soft Nylon Polyurethane

Table of Contents

(g) Stroke (mm) Model 60 40 30 25 20 15 10 5 50 70 80 90 100 27 (32) 30 (40) 34 (44) 37 (47) 40 (50) 44 (54) 51 (61) 58 (68) 65 (75) C(D)UW6-D 44 (49) 49 (59) 53 (63) 58 (68) 62 (72) 67 (77) 76 (86) 85 (95) 94 (104) C(D)UW10-D 74 (99) 81 (111) 88 (118) 95 (125) 102 (132) 109 (139) 123 (153) 137 (167) 151 (181) C(D)UW16-D 132 (165) 145 (182) 158 (195) 171 (208) 184 (221) 197 (234) 223 (260

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) D Model B d H C SNJ-015A Y M10 x 1 3 14 16.2 E SN-015A M14 x 1 5 19 21.9 SNJ-010A M8 x 1 3 12 13.9 C A B Ball joint type: 40, 50 D E Y C A B (mm) D E Y ZP10F Model B A C 1.5 6.5 10 12 ZP13F 13 15 3 8.2 2 7 ZP16F 16 18 ZP20F 20 22 8.5 ZP25F 3 25 28 4 10.2 ZP32F 9 32 35 ZP40F 5 13 40 43 10 28 ZP50F 6 14 50 53 8 13-11-101 6 Vacuum Pad: Ball Joint Type Vertical Vacuum Entry Without Buffer

Table of Contents

C D E F Dimensions Part no.

MGC

(Including band and screw) Operating Range Bore size (mm) Bore size (mm) Auto switch model Auto switch model 20 25 32 40 50 20 25 32 40 50 D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 D-B7/B80 BMA2 -025 BMA2 -032 BMA2 -040 BMA2 -050 BMA2 -020 10 8 10 9 10 D-B73C/B80C D-C7/C80 BA -32 BA -04 BA -05 BA -01 BA -02 10 8 10 9 10 D-C73C/C80C D-B5/B64 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 10 8

Plate Cylinder with Lock Series MLU

HS D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-F7NT D-F7BAL 40, 50 25, 32 Approx. 30.5 A A Approx. 22 A A Approx. HS 40, 50 25, 32 D-A73C D-A80C D-J79C Approx. 30.5 Approx. 26.6 A A A A 25, 32 40, 50 D-A79W D-F7WV D-F7V D-F7BAVL Approx. 30.5 Approx. 22 A A A A 40, 50 D-P5DW Approx. 31 A A Approx.

7

18 S F D Q (mm) Model Conduit Conduit terminal Electrical entry Applicable flange A B C E F N Q R S U D V T T 84 (92) 179.5 (187.5) 92.5 (100.5) 92.5 (100.5) 192.5 (200.5) 98 (106) 98 (106) U 168 (176) 67.5 84 (92) 7 E VXD2 32A 35 160 22 51.5 135 12 100 36 110.5 79.5 50 8 F VXD2 40A 70 40 170 24.5 54.5 140 14 105 42 113 82 52.5 9 G VXD2 50A 77.5 40 180 24.5 59 155 14 120 52 113 82 52.5 (

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMD Symbol Nil D C Type KF (NW) K (DN) CF Applicable flange size 25, 40, 50, 63, 80 63, 80 40 (070), 63 (114) XYD V V V V V XMD V V V V V Size 25 40 50 63 80 XYD Nil D KF (NW) K (DN) 25, 40, 50, 63, 80 63, 80 3.

Round Type Low Pressure Hydraulic Cylinder Series CH
M

6 8 11.5 6.5 32 18.5 13 16 11.5 15 18.5 14.5 13.5 19.5 13.5 8 10 13.5 8.5 40 23 17.5 17 21 19.5 23 24 20 18 19 13.5 15.5 19 14 Auto switch mounting heights (mm) D-C7 D-C8 D-H7 D-H7W D-H7F D-H7BAL D-G39 D-K39 D-A33 D-A34 D-A44 D-B5/B6 D-B59W D-G5NTL D-H7C D-C73C D-C80C Bore size (mm) HS HS HS HS HS 24.5 27.5 27 62 72 20 27 30 29.5 64.5 74.5 25 30.5 33.5 33 68 78 32 40 35 38 37.5 72.5 82.5