Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: Rc, Option: M [Applicable to DI Water (Deionized Water) Piping]

Cooling Method: Water-cooled Refrigeration, Pipe Thread: Rc, Power Supply: 40 [3-phase 380 to 415 VAC (50/60 Hz)], Option: Applicable to Deionized Water Piping

Cooling Capacity: 012 (Cooling Capacity: 1100/1300W, 50/60 Hz), Cooling Method: W (Water-cooled Refrigeration), Thread: Rc, Option: M [Applicable to DI Water (Deionized Water) Piping]

Cooling Capacity: 9.5 kW Air/ 11.0kW Water, Cooling Method: Water-cooled Refrigeration, Power Supply: 40 [3-phase 380 to 415VAC (50/60 Hz); 3-phase 460 to 480VAC (60 Hz)], Option: Applicable to DI Water Piping

Cooling Capacity: 250 (24kW), Thread: Rc, Option: M (Applicable to DI Water Piping)

Cooling Capacity: 150 (15.7kW), Thread: Rc, Option: M (Applicable to DI Water Piping)

Cooling Method: W (Water-cooled Refrigeration), Pipe Thread: Rc, Power Supply: 40 (3-phase 380 to 415 VAC, 50/60 Hz; 3-phase 460 to 480 VAC (60 Hz)), Option: M (Applicable to Deionized Water Piping)

Clean Rodless Cylinder Series CYP

P (port f)] WB WA R 4-J Depth JK Inner cover holding screw TA TA WB WA TB TB R W (mm) C ED A EK B F E G H HA HB HG HI HL HP HS HT J JK K Model +0.030 0 CYP15 5.4 9.5 8 4 9.5 12.5 4H9 6.5 45 19.5 8.5 8.5 23 38.6 44 27 19.5 M6 x 1 10 21 +0.030 0 CYP32 8.6 6H9 13 12 14 6 25 8.5 75 39 19 19 39 64.9 73.5 49.5 39 M10 x 1.5 12 20 LD LW MM M N L P PA PB Q QW R T TA TB W WA WB Y Z Model CYP15 5.6

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

20 25 49 58 71 87 110 136 TY TX TZ TT 1.7-29

PSE530/200

C 2 m 16-3-20 20 Series PSE Specific Product Precautions 3 Be sure to read before handling. Wiring Caution 3. Connecting to other series Any pressure sensor (SW) can be connected as long as it generates analog output (1 to 5 V) signal. However, the pressure range must match. SMC pressure sensors, Series PSE510 & PSE520, are also connectable.

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

1 5 1 0 25 20 1 5 30 25 25 2.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Construction w e r !2 !4 L-Bracket !5 !5 w e r !2 !4 q !3 !3 !6 !6 t t !1 Component Parts !1 No. Description Material 1 Bracket Steel strip DIN Rail Mounting Bracket q w e q o !0 i y u q o !0 i y Component Parts No.

Speed Controller with

Dimensions, flow rate characteristics and options are the same as standard product (brass needle guide). 8 AS-FG Series Construction w e r t w e r t q o !0 !1 i y u q o !0 !1 i y Component Parts No.

VT307

Power consumption/DC 2 W, 2.2 W (With indicator light) 1. Since this valve has slight air leakage, it can not be used for vacuum holding (including positive pressure holding) in the pressure container. Specifications different from standard are as follows. 25 ms or less (at 0.5 MPa) Response time (1) 100 VDC: 2.4 W Note 1) Refer to Response time of standard specifications.

AME

Refer to dimensions on pages 14-20-40 to 14-20-41 for details. w e Sight glass Tempered glass AM850 is aluminum casted. Replacement Parts AME450 Model No.

Thermo-chiller/

Thermo-chiller/ Rack Mount Type HRR Series How to Order Option U Air-cooled Refrigeration HRR A 20 012 (UL Standards) Cooling capacity Option 012 1000/1200 W (50/60 Hz) 018 1600/1800 W (50/60 Hz) 024 2000/2400 W (50/60 Hz) 030 2500/3000 W (50/60 Hz) Nil None DM With electric conductivity control function, Applicable to DI water piping M Applicable to DI water piping T High-pressure pump mounted

Thermo-chiller/

Thermo-chiller/ Rack Mount Type HRR Series How to Order Option U Air-cooled Refrigeration HRR A 20 012 (UL Standards) Cooling capacity Option 012 1000/1200 W (50/60 Hz) 018 1600/1800 W (50/60 Hz) 024 2000/2400 W (50/60 Hz) 030 2500/3000 W (50/60 Hz) Nil None DM With electric conductivity control function, Applicable to DI water piping M Applicable to DI water piping T High-pressure pump mounted

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

Description Material Surface treatment ZX t NBR, Silicone rubber, Urethane rubber, Fluororubber, EPR u o Pad 1 ZR r e w Adapter plate 2 Aluminum ZM w Hard chrome plated Piston rod 3 Carbon steel w Spring 4 Stainless steel ZMA Buffer body 5 Aluminum Electroless nickel plated Buffer adapter 6 Brass q q q ZQ Electroless nickel plated Adapter A 7 Brass Electroless nickel plated X type adapter

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

LEJ-OM004xx

(reference value) 11-LEJS40* Speed 600mm/sec Speed 1200mm/sec 100,000,000 100,000,000 10,000,000 10,000,000 ISOclass8 ISOclass8 0/mi n( AN R ) ISOclass6 1,000,000 1,000,000 ISOclass7 ISOclass7 Particl concentration[Particls/m 3] Particl concentration[Particls/m 3] 100,000 100,000 0/mi n( AN R ) ISOclass6 10,000 10,000 ISOclass5 ISOclass5 50/mi n( AN R ) 20/mi n( AN R ) 1,000 1,000 ISOclass4