CG5-S

GA GB 2-P Bore size A AL B1 H H1 MM ZZ W 10 M BM H1 20 14 12.7 11.0 25.4 4.0 1/4-28 108.4 25 14 12.7 12.6 28.4 4.8 5/16-24 111.4 Max.

180° Angular Style Air Gripper Series MHY2/MHW2

Calculate the moment of inertia of attachment. z r1 Material of attachment: Aluminum alloy (Specific gravity = 2.7) A part z1 r1 = 37 (mm) Calculation of weight m1 = a x b x c x Specific gravity m1 = 40 x 7 x 8 x 2.7 x 10-6 = 0.006 (kg) Moment of inertia around Z1 axis Z1 = {m1(a2 + b2)/12} X 10-6 z1 = {0.006 x (402 + 72)/12} x 10-6 = 0.8 x 10-6 (kgm2) A = 0.8 x 10-6 + 0.006 x 372 x 10-6

MHZ2/MHZJ2

When auto switches are used on 10, side mounting with the through holes is not possible. Axial Port (with M5 Port) [M] Auto switch mounting groove (4 locations) (except 10) End boss assembly D2 D1 M5 x 0.8 piping port 5 B E A Auto switch mounting groove (4 locations) (10 only) Refer to the dimension table.

21

Note 2) D-K39A Note 2) D-M9l D-M9lW D-A9l D-B59W D-H7C D-H7BAL D-H7NF D-G5NTL D-B54 D-B64 D-C73C D-C80C A A B A B B B A B A B A B A B Bore size A 20 25 32 40 10 9 6 5 0.5 0 5.5 3.5 2.5 0 0 5.5 4.5 2 1 6.5 10 10 6 6 0.5 0.5 6.5 3.5 3.5 0 0 5.5 5.5 2 2 6.5 10 10 6 6 0.5 0.5 6.5 3.5 3.5 0 0 5.5 5.5 2 2 6.5 12 12 8 8 2.5 2.5 8.5 5.5 5.5 2 2 7.5 7.5 4 4 8.5 Note 1) Adjust the auto switch after

ZQ-OM01401

8 (3) (PD) 1) 1 B (: P ) 3 (: PD ) C 2) 1) 3)12S 0.5 8 0.7 6 (4) 1.0 4 2) 8 4 A 4) Assy 6 - No.ZQ-OM01401-B ZQ000 U A-K15L B-EA M G-3 3-N (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (1) U (6) M 6) (2) M SI (kPa) 6) (:psi) P K1 N.C.

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

M5 x 0.8 Port 2 M5 x 0.8 Note) 10-V114(A) and 10-V124(A) cannot be mounted on the same manifold.

PFA/PFW

-m-m PFA750-m-m Dry air, N2 Heater type 1 to 10l/min (0.04 to 0.35SCFM) 0.1l/min (0.004SCFM) 5 to 50l/min (0.18 to 1.77SCFM) 0.5l/min (0.02SCFM) l/min, CFM x 10-2 Instantaneous flow rate Cumulative flow rate Display units l, ft3 x 10-1 0 to 0.5MPa (0 to 72psi) 1.0MPa (145psi) 3kPa (50l/min) [0.44psi (1.77SCFM)] 0 to 9l (0 to 35,300 ft3) 0 to 50C (32 to 122F) with no condensation 5% F.S.

HRX-OM-R016

HRS012/018--10-T/MT HRS012/018/024/030--20-T HRS012/018/024/030--20-MTNote 1) Applicable model Rated flow50/60Hz Note 2) 3) 7(0.36MPa)/10(0.42MPa) 10(0.44MPa)/14(0.40MPa) 10(0.32MPa/)/14(0.32MPa) Pump 18/22 Maximum flow rate (50/60 Hz) L/min Maximum pump head (50/60 Hz) m 55 70 60 Output W 320 550 Circuit protector 15A (10 A for standard) A 15 Recommended earth leakage breaker capacity 15

Support Guide/11-LEFG Series

0.4 0.3 0.2 0 0.1 0.6 0.5 0.4 0.3 0.2 Particle diameter [m] Particle diameter [m] 511 A 11-LEFS Series AC Servo Motor Clean Room Specication Particle Generation Characteristics AC Servo Motor (100/200/400 W) 11-LEFS25 Speed 900 mm/s 11-LEFS32 Speed 1000 mm/s 10 10 ISO Class 6 upper limit ISO Class 6 upper limit 10 10 Suction flow rate: 0 L/min Suction flow rate: 0 L/min 10 10 Particle concentration

IZx-OMX0087

Symbol Layout direction Length (m) Symbol Length (m) N None N None 3 3 5 5 J 3 E 0.5 10 10 K 5 Straight G 1 15 15 M 10 H 2 Straight N None S 3 J 3 T 5 Angle K 5 To use AC adapter, with transistor Input/Output specify "N", and select AC adapter with the option number.

Pressure Gauge Guide

This will cause a malfunction. 14-11-6 6 Pressure Gauge Guide How to Order G M C 46 10 01 X2 Option Specifications Symbol Pressure gauge F.R.L.

JXCx-OMT0001CN

-107No.JXC-OMT0001CN-C 1. 1.1 LEY/LEYG LEY16/LEYG16 LEY25/LEYG25 LEY32/LEYG32 LEY40/LEYG40 A B C A B C A B C A B C [mm] 10 5 2.5 12 6 3 16 8 4 16 8 4 [mm] 300 300 300 400 400 400 500 500 500 500 500 500 mm/s 500 250 125 500 250 125 500 250 125 300 150 75 [mm/s] () 15 8 4 18 9 5 24 12 6 24 12 6 [mm/s] () 22 12 6 26 13 7 34 17 9 34 17 9 1.2 LEFS LEFS16 LEFS25 A B H A B [mm] 10 5 20

VQ7-6/7-8

size ISO size 2 Series VQ7-8 ISO size 2 0.96n + 0.77 (n: Stations) Max. 10 stations 3/8 1/2 1/2 3/4 3-10-27 28 Series VQ7-8 DIN Terminal Type VV72-2n-3/8, 1/2 118 142 67 9 118 142 9 34 20 2-1/8 14 Indicator light P , R1, R2 port for Rc 3/4 only U side U side 18 R4.5 60(73) P = 56 P = 56 60(73) 23 R4.5 Manual override B PA 18 42 14 1313 B A SMC SMC SMC B B B A PA B PA B A A B PA Courtesy

VQ7-6/7-8

VFR PA A B VP4 L1 L2 B A A PA VZS A B SMC VFS PA A VS4 B VQ7 PA A L side R side (2n-1/8) EVS 38 D side VFN 3 68.5 (A, B port) 4n-1/4, 3/8 16 120.5 (Single) 44 155 (3 position) 145 (Double) 55 77.5 121 PA 14 PB 12 1 R 3 5 65 54 P 39 (Pilot pressure EXH port) 4-1/8 SMC 21 R2 R1 17 17 (P , R port) 6-3/8 26.5 26.5 L Dimension n: Stations 10 9 8 7 6 5 4 3 2 1 Formula L1 L1 = 43n + 64 494 451

Modular F.R.L. Unit

Model Description AC10 AC20 AC25 AC30 AC40 AC40-06 AC50 AC55 AC60 G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD27 G36-10-01 GC3-10AS G36-2-01 GC3-2AS G36-10-01 GC3-10AS G36-2-01 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G46-10-02 GC3-10AS G46-2-02 GC3-2AS G-27-10-R1 Note 1) Pressure gauge

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

U D B M O U side (2 to 10 stations) Without SI unit D side (2 to 10 stations) Both sides (2 to 16 stations) Special specifications In the case of special specifications, indicate separately on a manifold specification sheet. Note) A total of up to 3 supply/exhaust blocks can be mounted. Contact P/A if 4 or more will be mounted.

Fieldbus system Ethernet POWERLINK compatible SI unit

Proper use of the seal cap enables the enclosure to achieve IP67 specification. 25 EX## OMS1015-A Specification Specifications Model EX600-ED2EX600-ED3Power connector M12 (5 pin) Plug 7/8 inch (5 pin) Plug specifications Power Power supply (Control and input) 24 VDC, 10%, Class2, 2 A 24 VDC, 10%, 8 A Power supply (Output) 24 VDC, +10/-5%, Class2, 2 A 24 VDC, +10/-5%, 8 A Enclosure IP67 (With

3 Port Solenoid Valve/

Piping adapter Spacer with Bracket Mounting Position Dual residual pressure release valve (-X538) Dual residual pressure release valve with soft start-up function (-X555) (Max. 10) 201.8 82.9 (14) (14) 201.8 (Max. 10) 82.9 IN OUT IN OUT d c b a d a b c Model a b c d Note Model a b c d Note VP544-5DZ1-03-X538 33.9 57.2 95.7 220.7 AW30-03G-A Y300T-A E300-03-A VP544-5DZ1-03-X555 33.9 57.2 129.2

Electric Actuator / Low profile slider type

LEMH 25 25 LEMHT32 LEMH32 20 20 Workload m[kg] Workload m[kg] 15 15 LEMHT25 LEMH25 10 10 5 5 0 0 0 200 400 600 800 1000 1200 1400 0 200 400 600 800 1000 1200 1400 Support spacing [mm] Support spacing [mm] 6.2 Handling Caution 1.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYV15 CYV32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m: Load mass [kg] L: Distance to load center of gravity [mm] A, B: Distance to guide shaft [mm] g: Gravitational acceleration [9.8 m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Central axis of guide Central axis of