Smooth Cylinder/Low Speed Cylinder

75 80 85 90 95 100 105 110 135 160 75 80 85 90 95 100 105 110 115 140 165 85 90 95 100 105 110 115 120 125 150 175 50 55 60 65 70 75 80 85 90 95 120 145 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 130 155 CQ-M5 x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 120L x 145L CQ-M5 x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 125L x 150L

IDX-OM-U010

AD52-A Bowl assembly 1 KA00463 Bowl O-ring 1 AD402P-040S Element 1 IDFC60/70/80/90 Series 5.2 Regular maintenance 5-3 IDX-OM-U010 Chapter 5 Checks and Maintenance 5.2 Regular maintenance IDFC60/70/80/90 Series 5-4 IDX-OM-U010 Chapter 6 Troubleshooting Chapter 6 Troubleshooting 6.1 Troubleshooting Refer to the table below if any abnormality is found.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

32A 173.6 67.5 42 160 21 51.5 135 12 100 36 80 40A 179.3 70 42 170 21 54.5 140 14 105 42 90 50A 192.3 77.5 42 180 21 59 155 14 120 52 Specific Product Precautions Size Applicable flange Grommet Grommet with PCB Conduit DIN terminal DIN terminal without connector M12 connector T U T U T U T U V T U T U 70 32A 68.4 31.1 74.1 41 75.7 51.9 77.2 58.3 70 77.2 34.3 76 44.1 80 40A 71.6 31.1 77.3

Vacuum Pad

ZP2-6030W ZP2-8030W ZP2A-003 P. 69 ZP2-04S P. 70 ZP2A-S01P ZP2-B02MU ZP2-B035MU ZP2-B04MU ZP2-B05MU ZP2-B04MB ZP2-06S P. 70 ZP2A-M01P P. 69 ZP2A-S02P ZP2-B06MU ZP2-B08MU ZP2-B10MU ZP2-B15MU ZP2-B06MB ZP2-B08MB ZP2-B10MT ZP2-B15MT ZP2-08S P. 70 ZP2A-S03P ZP2A-M02 P. 69 ZP2-10S P. 70 ZP2A-S04P ZP2-15S P. 71 ZP2A-S05P ZP2-B20MT ZP2-B25MT ZP2-B30MT ZP2A-M03 P. 69 ZP2-04S P. 71 ZP2A-S11 ZP2-B06MU

Vacuum Pad

ZP2-6030W ZP2-8030W ZP2A-003 P. 69 ZP2-04S P. 70 ZP2A-S01P ZP2-B02MU ZP2-B035MU ZP2-B04MU ZP2-B05MU ZP2-B04MB ZP2-06S P. 70 ZP2A-M01P P. 69 ZP2A-S02P ZP2-B06MU ZP2-B08MU ZP2-B10MU ZP2-B15MU ZP2-B06MB ZP2-B08MB ZP2-B10MT ZP2-B15MT ZP2-08S P. 70 ZP2A-S03P ZP2A-M02 P. 69 ZP2-10S P. 70 ZP2A-S04P ZP2-15S P. 71 ZP2A-S05P ZP2-B20MT ZP2-B25MT ZP2-B30MT ZP2A-M03 P. 69 ZP2-04S P. 71 ZP2A-S11 ZP2-B06MU

Vacuum Pad

ZP2-6030W ZP2-8030W ZP2A-003 P. 69 ZP2-04S P. 70 ZP2A-S01P ZP2-B02MU ZP2-B035MU ZP2-B04MU ZP2-B05MU ZP2-B04MB ZP2-06S P. 70 ZP2A-M01P P. 69 ZP2A-S02P ZP2-B06MU ZP2-B08MU ZP2-B10MU ZP2-B15MU ZP2-B06MB ZP2-B08MB ZP2-B10MT ZP2-B15MT ZP2-08S P. 70 ZP2A-S03P ZP2A-M02 P. 69 ZP2-10S P. 70 ZP2A-S04P ZP2-15S P. 71 ZP2A-S05P ZP2-B20MT ZP2-B25MT ZP2-B30MT ZP2A-M03 P. 69 ZP2-04S P. 71 ZP2A-S11 ZP2-B06MU

Vacuum Pad

ZP2-6030W ZP2-8030W ZP2A-003 P. 69 ZP2-04S P. 70 ZP2A-S01P ZP2-B02MU ZP2-B035MU ZP2-B04MU ZP2-B05MU ZP2-B04MB ZP2-06S P. 70 ZP2A-M01P P. 69 ZP2A-S02P ZP2-B06MU ZP2-B08MU ZP2-B10MU ZP2-B15MU ZP2-B06MB ZP2-B08MB ZP2-B10MT ZP2-B15MT ZP2-08S P. 70 ZP2A-S03P ZP2A-M02 P. 69 ZP2-10S P. 70 ZP2A-S04P ZP2-15S P. 71 ZP2A-S05P ZP2-B20MT ZP2-B25MT ZP2-B30MT ZP2A-M03 P. 69 ZP2-04S P. 71 ZP2A-S11 ZP2-B06MU

IDX-OM-W095

/70/80/90 Series 7-5 IDX-OM-W095 IDFC60/70/80/90 Series 7-6 IDX-OM-W095 C 8 C 8.1 8.2 1) 2) IDFC60/70/80/90 Series 8-1 IDX-OM-W095 L 9 L L 9.1 0 () 9.2 ADH4000-04 ADH4000-04 ADH-E400 N.O.

IDX-OM-W094

(REFRIGERANT) IDFA60-23 W R 0001 (2018 4 ) W R 0001 o 1 Z 12 o P Q R A Z 1 2 3 4 W X y Z 2018 2019 2020 2021 IDFA60/70/80/90 Series 1-4 IDX-OM-W094 1.3 HFC 1-4 IDFA60/70/80/90 Series 1-5 IDX-OM-W094 1.4 / 1 1.5 () IDFA60/70/80/90 Series 1-6 IDX-OM-W094 2 2.1 IN OUT (ONOFF ) 6-4 6-4 L N PE 3-5 IDFA60/70/80/90 Series 2-1 IDX-OM-W094 () IDFA60/70/80/90 Series 2-2 IDX-OM-W094 3

A

177 41 70 50 54 26 8.5 10.5 70 2.3 73 NAL5000 90 254 45 90 70 66 35 11 13 90 3.2 90 NAL6000 95 268 45 95 70 66 35 11 13 90 3.2 95 Courtesy of Steven Engineering, Inc. !

Magnetically Coupled Rodless Cylinder

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d b C H B d M6 x 1.0 M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 4 8 8 10

MXS Series Air Slide Table

Model F 50 50 50 60 35 60 70 70 80 FF 40 40 40 50 35 60 70 70 80 GA 25 25 25 35 50 54 107 155 195 KA NA 2 2 2 2 2 2 4 4 4 M 83 83 83 93 108 147 200 254 306 N 4 4 4 4 6 6 6 8 8 HA 35 35 35 35 35 70 70 76 88 ZZ 97 97 97 107 122 161 214 268 320 G 15 15 15 15 15 19 37 41 19 H 45 45 45 55 35 35 35 38 44 NN 2 2 2 2 3 4 5 6 7 I 10 10 10 10 10 10 58 70 87 J 44 44 44 54 69 108 113 155 190 K 31 41

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

[mm] 100 1000 70 10 75 LEY u L = 50 mm Max. speed = Over 200 mm/s i L = 100 mm Max. speed = Over 200 mm/s LES 10 10 Load mass m [kg] Load mass m [kg] LEYG32M LEYG32M LEPY LEPS LEYG32M LEYG32M LEYG25M LEYG25M 1 1 LER LEYG25M LEYG25M LEH 0.1 0.1 LEY -X5 Stroke [mm] 100 1000 70 10 75 Stroke [mm] 100 1000 70 10 75 11LEFS Horizontal Mounting, Ball Bushing Bearing o L = 50 mm Max. speed = 200

MXS

70 80 Z K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NN 2 2 2 2 3 4 5 6 7 NA 2 2 2 2 2 2 4 4 4 KA H 45 45 45 55 35 35 35 38 44 HA 35 35 35 35 35 70 70 76 88 G 15 15 15 15 15 19 37 41 19 GA 25 25 25 35 50 54 107 155 195 ZZ 97 97 97 107 122 161 214 268 320 N 4 4 4 4 6 6 6 8 8 FF 40 40 40 50 35 60 70 70 80 M 83 83 83 93 108 147 200 254 306 MXS20

Vacuum Ejector Series ZM

70 60 60 30 50 50 Air consumption 40 40 20 30 30 Suction flow rate 20 20 10 10 10 0 0 0 0 15 10 5 0.0 0.6 0.5 0.4 0.3 0.2 0.1 Flow rate l/min (ANR) Supply pressure (MPa) ZM07H Exhaust Characteristics Flow Characteristics 90 90 40 80 80 Vacuum pressure Vacuum pressure (kPa) Vacuum pressure (kPa) Suction flow rate l/min (ANR) Air consumption l/min (ANR) 70 70 Suction flow rate 30 60 60 Air

CQS

45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 Special long bolt for through hole mounting is available as an option.

Rotary Table/

O-ring Steel balls Size: 70 to 200 only Shock absorber Replacement parts Description Kit no.

Table of Contents

2 Detent assembly VF4000-12A Refer to How to Order Pilot Valve Assembly on page 3-8-70. Pilot valve assembly !

Table of Contents

70 ZF 60 60 50 50 ZP 40 40 30 30 ZCU 20 20 10 10 AMJ 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate (/min(ANR)) Suction flow rate (/min(ANR)) Misc.

Compact Cylinder Series CQS

D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 D' 35 40 45 50 55 60 35 40 45 50 55 60 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 C C' Cylinder model Mounting bolt size Mounting bolt size CQ2 CDQSKB12-5D -10D -15D -20D -25D -30D M3 x 30L x 35L x 40L x 45L x 50L x 55L M3 x 30L x 35L x 40L x 45L x 50L x 55L M5 x 35L x 40L x