High Vacuum Slit Valve

November 2021 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC Corporation All Rights Reserved

2-Color Display Digital Flow Switch Series PFM

6 Body B 14 Brass Electroless nickel plated IF Needle 15 Brass Electroless nickel plated O-ring 16 HNBR Fluoro coated O-ring 17 HNBR Fluoro coated !

By using H-NBR seal material for the main valve and seals, Ozone resistance has been improved. Side, top and bottom port/pipe directions are available to allow flexible installation.

By using H-NBR seal material for the main valve and seals, Ozone resistance has been improved. Side, top and bottom port/pipe directions are available to allow flexible installation.

By using H-NBR seal material for the main valve and seals, Ozone resistance has been improved. Side, top and bottom port/pipe directions are available to allow flexible installation.

SFOD-OMT0012

Position Init The upper left corner of all the displayed sub windows are aligned with the upper left corner of the display area of the main window. (1-1-4) Help (H) Select Help to confirm the version of the setting software. It is possible to change the display language.

SFOD-OMT0011CN

SFOD-OMT0011 2015 7 2016 3 A 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015-2016 SMC Corporation All Rights Reserved No.SFOD-OMT0011CN-A

VBA-OM-S001

OUT port Mounting VBA1: Tightening torque of 12 to 14 Nm (R1/4) VBA2: Tightening torque of 22 to 24 Nm (R3/8) Drain port Rc1/4 (4) O-ring : Mount the O-ring in the groove on the joint of the tank at the back of the booster regulator.

VBA-OM-S008

VBA11A 150 337 370 307 163 160 100 200 Rc 3/8 257 60 278 130 regulator A B C D E F G H I J K L M URL http://www.smcworld.com Rc 1/4 20 Rc 1/2 39 IN port Rc3/8 Rc 3/8 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3 5207 8249 Fax: +81 3 5298 5362 170 180 120 312 2008 SMC Corporation All Rights Reserved Assembly dimensions OUT port (J) Maintenance 411 IN port (I) Akihabara

FGX-OM-R008

A Dimensions: SFE4G/5H/7J Model A B C SFE4G 6 68.5 16.5 SFE5H 8 79 20.5 SFE7J 10 89 24 -7- Dimensions (Bracket) 1) SFE-BR3 2) SFE-BR4/5/7 Dimensions: SFE-BR4/5/7 Model A B C D E F G H J SFE-BR4 30 16 7 4.5 7.5 (24.5) 17 15.5 (19.5) SFE-BR5 30 10 8.2 4.5 8.1 (29) 20 18 (23) SFE-BR7 34 14 7.35 4.5 9.8 (35) 24 20 (27.3) ( ): The values inside the brackets are given as a guide. -8- Revision history

Polyurethane Flat Tubing Series TFU

(mm) No. of cores H 0.8 MPa Air D Burst pressure Operating temperature Material Color Min. bending radius (mm) Tube length per roll (m) Refer to the burst pressure characteristics curve.

Series PF2W Digital Flow Switch For Water Refer to www. poweraire .com for details of products compatible with overseas standards.

Note 6) Window comparator mode Since hysteresis (H) will reach 3 digits, keep P_1 and P_2 or n_1 and n_2 apart by 7 digits or more. (In case of output OUT2, n_1, 2 to be n_3, 4 and P_1, 2 to be P_3, 4.)

Electro-Pneumatic Regulator IT1000/2000/4000

(Note) Gauge port RC(PT)1/8, Pre6sur g6uge, 14{1.0}, 28{2.0}, 72{5.1), 100{7.1}, 145{10.2) How to Order Model t x#l r*m ? Electrlcal connectlon ?

Precision Clean Regulator Series SRP

SUS316L 1 Body SUS316 2 Valve guide PPS 3 Spacer Bonnet PPS 4 Knob PBT 5 Electroless nickel plated Set nut ZDC 6 Valve spring SUS316 7 Main valve Ceramics 8 Valve seat PTFE 9 O-ring Fluoro rubber 10 Diaphragm Fluoro rubber 11 Gasket Fluoro rubber 12 Pressure regulator spring Steel wire 13 Pressure regulator screw assembly 14 Dimensions 30.5 Bracket 40 SMC P K U C S O H L 36 51 31 30 Panel

Multistage Ejector Series ZL

Vacuum sensor unit 5 Nozzle 6 Diffuser 7 Detent plug P397110 Other than vacuum switch 8 Lead wire cover P397176 Vacuum switch specifications Front cover B With valve 12 Valve plate With valve 13 Needle With valve 14 Supply valve (N.C.) With valve SYJ514 15 Release valve (N.C.)

KDM

H Model Tubing O.D.

Air Suction Filter With One-touch Fittings ZFB Series

ZFB100, ZFB101 ZFB200, ZFB201 ZFB300, ZFB301 ZFB401 16 x 14 x L60 rZFB200-08 tZFB300-08, -10 ZFB301-11, ZFB401-13 I-34S-A 10 x 6 x L33 12 x 8 x L42 14 x 10 x L45 I-35S-A I-36S-A I-39S-A 10 pcs. 10 pcs. 10 pcs. 10 pcs. 10 pcs. 10 pcs. 10 pcs. yZFB401-13 Note) Elements and O-rings for the cover are sold in sets of 10 pieces each. 10 pcs.

HAA

Correction Factor by Ambient Temperature Mounting Caution (Example) Inlet air temperature: 100C, Ambient temperature: 20C, Amount of air: 2000 l/min (ANR), Air pressure: 0.7 MPa, Model: HAA22-14 Outlet Air Temperature at Above Conditions Use outlet air temperature of 38.5C from outlet air temperature table. At this time correction factor line becomes . 1.

Size: 1 (100), Valve Type: 1 (N.C.), Seal Material: A (NBR), Pressure Range: 140 (0 to 14 MPa), Thread: Rc, Port Size: 10 (3/8, SGH100), Pilot Valve: H (VO307, for 10/14 MPa), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal)

Size: 1 (100), Valve Type: 1 (N.C.), Seal Material: A (NBR), Pressure Range: 140 (0 to 14 MPa), Thread: Rc, Port Size: 10 (3/8, SGH100), Pilot Valve: H (VO307, for 10/14 MPa), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Light/Surge Suppressor: Z (Light/Surge Suppressor, Non-polar)