2-Color Display Digital Flow Switch Series PFM

A B A B 4 (5/32") 10.1 8.1 4 (5/32") 10.1 36.1 6 10.3 8.3 6 10.3 36.3 8 (5/16") 12 10 8 (5/16") 12 37 1/4 10.3 8.3 1/4 10.3 36.3 PFM S-01/02--X693 PFM S-01/02--X694 7 5 7 5 10.2 10.2 (34.2) 43 1 43 1 A PFM A 51.5 (Max. 58.5) 51.5 (Max. 58.5) PFMV IN OUT 3 (34.2) PF2A 13 3 13 PF2W PF2D C 18 C 18 OUT IN B 48 20 20 48 B IF 2 x 3.4 2 x 3.4 C (Width across flats) C (Width across flats) A B A B

IDU/IDF

Note 5) Spare part for auto drain INA-20-41-04 is AD44x445.

A_HEC-OM-J017

34 Reading alarm status 2 01 32 05 34 36 3B 0D 01 32 02 34 30 38 30 03 30 30 0D Answer ERR11 Answer -1.52 deg.C Reading offset 01 32 05 36 36 3D 0D 01 32 02 36 2D 31 35 32 03 32 3F 0D 2 36 Offset setting (without writing EEPROM) 01 32 02 36 30 31 35 30 03 33 30 0D 2 Set at +1.50 deg.C 06 32 0D 37 Temperature setting (with writing EEPROM) F 01 3F 02 37 32 35 30 30 03 33 3F 0D 06 3F 0D Set

Digital Pressure Switch

-I With bracket Bracket A 01/N01 type W1/WF1 type -66No.PS-OMM0007-I Bracket B W1/WF1 type -67No.PS-OMM0007-I Bracket D 01/N01 type W1/WF1 type -68No.PS-OMM0007-I Panel mount adapter 01/N01 type W1/WF1/M5/C4/C6 type -69No.PS-OMM0007-I Panel mount adapter + Front protective cover 01/N01 type W1/WF1/M5/C4/C6 type -70No.PS-OMM0007-I Panel cut-out dimensions -71No.PS-OMM0007-I 01/N01 type (products

3 Port Air Operated Valve Series SYJA300 1

M5 x 0.8 SYJA514-01 0.32 0.46 1.1 0.32 0.41 1.2 75 (Without subplate 45) Rc 1/8 N.C. Base mounted (with sub-plate) 0.34 0.48 1.2 0.33 0.37 1.3 N.O. SYJA524-01 SYJA712-01 SYJA722-01 SYJA714-01 SYJA714-02 0.76 0.69 0.69 0.66 0.63 0.64 0.51 0.42 0.34 0.33 0.45 0.48 2.5 2.4 2.7 2.6 2.3 2.3 0.77 0.72 0.71 0.74 0.70 0.68 0.43 0.38 0.32 0.31 0.21 0.31 2.8 2.7 2.9 3.0 2.8 2.7 N.C. N.O.

ZSE2/ISE2

ZSE2-01-15CN1 pc. ZS-10-5 A-501 pc.

Compact Pressure Switch Series ZSE2 (For Vacuum)/ISE2 (For Positive Pressure)

hole Piping port M5 x 0.8 depth 5 2 x 3.5 Mounting hole Piping port M5 x 0.8 depth 5 13 13 01: R 1/8 T1: NPTF 1/8 01: R 1/8 T1: NPTF 1/8 IS ISG ZSM 785

Ionizer Gun

Ionizer IZG10 08 01 01 Ionizer Gun One-touch fitting Nozzle type Symbol Applicable tube O.D.

SYJA300

M5 x 0.8 SYJA514-01 0.32 0.46 1.1 0.32 0.41 1.2 64 (Without subplate 34) N.C. Base mounted (with sub-plate) 1/8 0.34 0.48 1.2 0.33 0.37 1.3 N.O. SYJA524-01 SYJA712-01 SYJA722-01 SYJA714-01 SYJA714-02 0.76 0.69 0.69 0.66 0.63 0.64 0.51 0.42 0.34 0.33 0.45 0.48 2.5 2.4 2.7 2.6 2.3 2.3 0.77 0.72 0.71 0.74 0.70 0.68 0.43 0.38 0.32 0.31 0.21 0.31 2.8 2.7 2.9 3.0 2.8 2.7 N.C.

High-Precision Digital Pressure Switch

For 20A/20B 25 5 1.5 4 x 2.6 Depth 7 or less Atmospheric vent port 30 20 30 20 Lead wire with connector M5 x 0.8 Thread depth 3.5 01 4 x 2.6 Depth 7 or less Atmospheric vent port 15.2 R1/8 7.2 N01 NPT1/8 A Piping specification Port size A 01 R1/8 Width across flats 10 N01 NPT1/8 Width across flats 12 15 3-Screen Display High-Precision Digital Pressure Switch ZSE20(F)/ISE20 Series Dimensions

Manifold Specifications

Prefix it to the part nos. of the solenoid valve, etc. 3-3-74 5 Port Solenoid Valve Base Mounted Series VZ5000 Common SUP/Common EXH How to Order Type 40 VV5Z5 05 40 2 01 1(P) port Rc 1/4 4(A), 2(B) Port size Stations P, R port thread type 02 2 stations 01 Rc1 8 Rc Nil 3/5(R) port G F 20 20 stations Rc 1/4 N NPTF T NPT 4(A), 2(B) port Note) For more than 10 stations, supply air to both

VCC

00 02 04 No 2 port valves used 2 pcs.

VT307

Ordering Example: VV307-01-052-01-F1 pc. (5 station manifolds base) V0307-1G4 pcs. DXT060-51-13A 1 pc.

VDW

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 1 2 10 20 Thread type VC Rc G NPT Nil F N Material VDW C S C37 SUS Type 30 VQ VVCW20-4A OUT port size Stations Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 VX2 VX Type 10 is M5 only.

Series SYJA300 3 Port Air Operated Valve

M5 X 0.8 SYJA514-01 N.C. Base mounted (With sub-plate) 75 (Without sub-plate 45) Rc(PT)1 /8 4.5 (0.25) SYJA524-01 N.O. SYJA712-01 N.C. Rc(PT)1 /8 9 (0.5) 80 Body ported SYJA722-01 N.O. Base mounted M5 X 0.8 Rc(PT) 1 /8, 1 /4 01 02 01 02 SYJA714N.C. Base mounted (With sub-plate) 130 (Without sub-plate 80) SYJA724N.O.

Fieldbus System

Note 2) Specify wiring type of each station on the manifold In the case of the 16-output SI unit Symbol 01 Stations Note 1 station specification sheet. Double wiring Note 1) 08 01 8 stations 1 station Specified layout Note 2) (Available up to 16 solenoids) Note 1) Indicate the sizes on the manifold specification sheet in the case of CM.

Series IRV10/20 Vacuum Regulator

Vacuum Regulator Series IRV10/20 RoHS How to Order Standard connections IRV 20 C08 Accessory w Body size 10 20 Max. flow 140 l/min (ANR) Max. flow 240 l/min (ANR) None Note 1) Nil With pressure gauge Note 2) Note 3) (IRV10: With GZ33-K-01, IRV20: With GZ43-K-01) G Note 3) ZN ZP ZA ZB With ZSE30A-01-N-ML With ZSE30A-01-P-ML With ZSE30A-01-A-ML With ZSE30A-01-B-ML NPN open collector 1 output

VDW

VVDW 2 0 4A VVDW 0 2 C 1 01 2 Series Series VX2 1 2 1 2 10 20 10 20 Thread type Rc G NPT Nil F N VXD Material C S Brass (C37) Stainless steel VXZ Series 30 OUT port size VVCW20-4A Stations VXE Symbol M5 01 Port size M5 1/8 (6A) 1 2 For 2 stations For 3 stations VXP Series 10 is available with M5 only.

4

Exhaust port type 2 3 Common exhaust Individual exhaust Ordering example: VV307-01-052-01-F 1 pc. (5 station manifolds base) VO307-1G14 pcs. DXT060-51-13A1 pc.

Manifold Specifications

Non plug-in type N T F Symbol 24 24 stations NPTF G Option VV5ZS3-51FD-091-01-MP5 VZS3150-5FZ VZS3250-5FZ 1 5 2 Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Note) Maximum stations 51F 16 stations 51G 15 stations 51 24 stations Symbol Port size 1 1 8 02 Rc 1 4 01 Rc (Manifold base) (2 position single) VV5ZS3-50-071-01-M5 VZS3150-5G 1 5 Embedded type One-touch