MHx-OMZ0003

M6x23 JMHZ2-16D D-M9N-5 M3X7 M-5ALHU-2 2 ASN2-M5-X937 M-5ALHU-2 3 V114-5LU KQ2S04-M5N 3x6 ISO9409-1 M4x25 M8 8 () 6x10 M6x10 5 - 3 3-1. 6 - 3-2. mm 16 MPa 0.1~0.7 (oC) -10~50 (mm) 0.01 (c.p.m.) 120 32.7 (N) 43.5 (mm) 10 (g) 430 M8 8 (www.smcworld.com)JMHZ2 Series P .15 M8 8 7 - 3-3. 2 1 F 8 - 3-4.

IDX-OM-W053

K,L1.6MPa 24085% 1 AC200V10% 50Hz 4 2 AC200V50/60Hz 9A/8A 2 AC200V50/60Hz 1.2A/1.3A 2 AC200V50/60Hz 180W/202W 3 5A 30A R134a(HFC) [GWP1430] 2305g Rc3/4 10mm 12 23kg 1ANR 2065% 2 330mA 4 () 6 1 6 6 2 mm A B C D E F G H J K L M N P Q IDFA6E Rc3/4 270 455 498 31 42 283 80 230 32 15 240 80 275 275 15 6 2 6 6 3 (50/60Hz) AC200/200,220V GFCI R R L N PE TB ILS V V EDV OLR PTC PE

SY3000-OMH0002

2) P 3) (2 ) 1 0.5MP 4) 5) AB (P AB )0.25MPa (PB PA)(Cv ) 14 No.SY3000-OMH0002 () (E) () () (PE) 15 No.SY3000-OMH0002 No. 1(ISO VG 32) (R) E 16 No.SY3000-OMH0002

HRX-OM-S004

Cooling Altitude [m] 1. Max. ambient capacity temp.

10-SYJ3000

(Type 20 manifold) SYJ3 2 5 M 1 M3 3 10 Body ported Base mounted (4 port) 2 3 10 3 5 M SYJ3 (Manifold use only) Base mounted (5 port) 10 4 M 2 5 3 SYJ3 Clean series 4 port Manual override Port size Body option Nil: Non-locking push type Nil: Without sub-plate 3: Main/Pilot valve common exhaust type For type 31, S31, 32, S32 manifold 5 port R port P, E port (With gasket and screws) D: Push-turn

Guide Table Series MGF

NO m: Refer to "Operating Conditions (Allowable eccentric load)" on page 12. m < Wo NO mo Wo m Wo mo < Wo YES mo Wo YES m Wo Model selected Allowable rotational torque Non-rotating accuracy T T (Nm) Non-rotating accuracy Bore size (mm) Stroke (mm) Bore size (mm) 40 0.08 100 75 50 30 63 40 0.06 3 4 5 7 100 63 0.05 10 12 16 22 100 13 17 22 30 Note) The value given for the non-rotating

Electro-Pneumatic Proportional Valve

: 0.12 10% or less 3% or less 1MPa 12, 24VDC 0 to 2W 0 to 4W Class B Series PVQ How to Order P V Q 13 5 L 03 M5 Valve type Body materials Symbol A Nil Body Brass C37 Note for PVQ13 for PVQ31, 33 13 31 33 N.C.

EX245-FPS1_2_3_eng

Required screws are as follows: 2 x M5 (End plate: torque = 1.5 Nm) 2 x M5 (SI unit: torque = 1.5 Nm) 4 x M(Valve manifold: refer to valve manifold catalogue) OFF US1 is not present or is below the dropout level (< approx. 17 VDC). Refer to the product catalog or operation manual to obtain more detailed information about outline dimensions.

Air-hydro Unit

Condition: Operating press.: 0.5 MPa Operating oil: Additive turbine oil Class 1 (ISO VG32) Oil piping length: 1 m Condition: Operating press.: 0.5 MPa Operating oil: Additive turbine oil Class 1 (ISO VG32) Oil piping length: 1 m Flow control valve Flow control valve Throttle valve Throttle valve Stop valve CCVS10/11/12/13 CCVS20/21/22/23 CCVS02 Piping bore Piping bore Piping bore Piping

3 Way Direct Acting NVKF 300 Series

(M5) 01T r/ NPTF {A port onl ' Special order Notel) Indicale in parentheses al end of parl # Ex.

NVKF

(M5) 01T r/ NPTF {A port onl ' Special order Notel) Indicale in parentheses al end of parl # Ex.

ITV0000

P-80 (YG) This catalog is printed on recycled paper with concern for the global environment.

Parallel Type Air Gripper Series MHZ

Note) Contact P/A when replacing seals.

VFR3000-OMY0001

(A)(B) (A)(B) Rc 1/8 4 2 4 2 (kg) 0.83 5 1 3 5 1 3 (mm2) PA 44 38 32 (EA)(P)(EB) (EA)(P)(EB) (A)(B) (A)(B) P1=0.7MPa,P2=0.5MPaS PB 38 40 31 4 2 4 2 (mm2) AEA 90 5 1 3 5 1 3 P2=0.5MPaS BEB 77 (EA)(P)(EB) (EA)(P)(EB) ()( ) 2.8N m 7 VFR3000-OMY0001 VFRA3000,4000 3 VFRA3000 VFRA4000 3 1(P) 8 VFR3000-OMY0001 R , 9 VFR3000-OMY0001 No. 1ISO VG 32 R (1) (2) (3) (4) (5) (6) 10 VFR3000

CC

The speed will be approximately 1.4 times the date given on p.4.12-3.

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

SY3000V-OMY0001

-2SY3000-OMY0001 / 1 1.5 *3) 3)1 1 () -3SY3000-OMY0001 SY Series 5 / / () ( ) () 1 DC DC N.O.( 33 AB , 3 , , () 3 EXH 0.1 2 () () C-R ( ) C-R 3 3 1) 2 , 4 No.SY3000V-OMY0001 SY Series 5 / / 2) ,1V & -10 ,1 1 3 1) M5 () 1/61/4 11.5Nm ) 2)Rc N m Rc 1/8 35 Rc 1/4 812 Rc 3/8 1416 5 No.SY3000V-OMY0001 SY Series 5 / DC () m [] ()ISO VG32 (MSDS) IP65 IP67(IEC60529

3.5, 2 m Conductor area: 0.15 mm2 (AWG26) Insulator O.D.: 0.95 mmCE marking, UL (CSA), RoHS compliance

3.5, 2 m Conductor area: 0.15 mm2 (AWG26) Insulator O.D.: 0.95 mmCE marking, UL (CSA), RoHS compliance

3.5, 2 m Conductor area: 0.15 mm2 (AWG26) Insulator O.D.: 0.95 mmCE marking, UL (CSA), RoHS compliance